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Author

  • Jurriaan Schmitz
2014

CMOS post-processing for monolithic microsystems

Schmitz, J., 11 Mar 2014, Nano and Giga Challenges in Electronics, Photonics and Renewable Energy, Nano & Giga 2014. Tempe, Arizona, USA: Arizona State University, p. - 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Growth and properties of subnanometer thin titanium nitride films

Kovalgin, A. Y., Van Hao, B., Schmitz, J. & Wolters, R. A. M., 10 Mar 2014, p. 1.

Research output: Contribution to conferenceAbstract

File
21 Downloads (Pure)

Identifying failure mechanisms in LDMOS transistors by analytical stability analysis

Ferrara, A., Steeneken, P. G., Boksteen, B. K., Heringa, A., Scholten, A. J., Schmitz, J. & Hueting, R. J. E., 22 Sep 2014, Proceedings of the 44th European Solid State Device Research Conference, ESSDERC 2014. USA: IEEE Circuits & Systems Society, p. 321-324 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Materials and integration schemes for above-IC integrated optics

Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., 7 Apr 2014, 15th International Conference on Ultimate Integration on Silicon, ULIS 2014. USA: IEEE Circuits & Systems Society, p. 153-156 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Sheet resistance under Ohmic contacts to AlGaN/GaN heterostructures

Hajlasz, M., Donkers, J. J. T. M., Sque, S. J., Heil, S. B. S., Gravesteijn, D. J., Rietveld, F. J. R. & Schmitz, J., 18 Jun 2014, In : Applied physics letters. 104, p. 242109 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

14 Citations (Scopus)

Silicon LEDs in FinFET technology

Piccolo, G., Kuindersma, P. I., Ragnarsson, L-A., Hueting, R. J. E., Collaert, N. & Schmitz, J., 26 Sep 2014, Proceeding ofthe 44th European Solid State Device Research Conference (ESSDERC). USA: IEEE Circuits & Systems Society, p. 274-277 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

12 Citations (Scopus)

State of the art in microfabrication

Schmitz, J., 2 Jun 2014, p. 1-10. 10 p.

Research output: Contribution to conferencePaper

2 Downloads (Pure)

Comparison of C-V measurement methods for RF-MEMS capacitive switches

Wang, J., Salm, C. & Schmitz, J., 26 Mar 2013, IEEE International Conference on Microelectronic Test Structures, ICMTS 2013. USA: IEEE Electron Devices Society, p. 53-58 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Comparison of electrical techniques for temperature evaluation in power MOS transistors

Ferrara, A., Steeneken, P. G., Reimann, K., Heringa, A., Yan, L., Boksteen, B. K., Swanenberg, M., Koops, G. E. J., Scholten, A. J., Surdeanu, R., Schmitz, J. & Hueting, R. J. E., 26 Mar 2013, IEEE International Conference on Microelectronic Test Structures (ICMTS 2013). USA: IEEE, p. 115-120 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)

Conduction and electric field effect in ultra-thin TiN films

Van Hao, B., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 31 Jul 2013, In : Applied physics letters. 103, 5, p. 051904 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)
1 Downloads (Pure)

Deep reactive ion etching of in situ boron doped LPCVD Ge0.7Si0.3 using SF6 and O2 plasma

Kazmi, S. N. R., Salm, C. & Schmitz, J., Oct 2013, In : Microelectronic engineering. 110, p. 311-314 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Degradation and reliability of silicon power transistors

Schmitz, J., Oct 2013, 2013 IEEE International Integrated Reliability Workshop Final Report.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150 °C

Rangarajan, B., Kovalgin, A. Y. & Schmitz, J., 15 Sep 2013, In : Surface and coatings technology. 230, p. 46-50 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

GridPix detectors: production and beam test results

Koppert, W. J. C., van Bakel, N., Bilevych, Y., Bilevych, Y., Colas, P., Desch, K., Fransen, M., van der Graaf, H., Hartjes, F., Hessey, N. P., Kaminski, J., Schmitz, J., Schön, R. & Zappon, F., Dec 2013, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 732, p. 245-249 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Low-temperature deposition of high-quality siliconoxynitride films for CMOS-integrated optics

Rangarajan, B., Kovalgin, A. Y., Worhoff, K. & Schmitz, J., 13 Mar 2013, In : Optics letters. 38, 6, p. 941-943 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

14 Citations (Scopus)

Mechanical resonators on CMOS for integrated passive band pass filters

Kazmi, S. N. R., Salm, C. & Schmitz, J., 23 Jul 2013, ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day'. p. 193-196 4 p. 6523517. (ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day').

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Microchip post-processing: There is plenty of room at the top

Schmitz, J., 1 Jan 2013, Future Trends in Microelectronics: Frontiers and Innovations. Luryi, S., Xu, J. & Zaslavsky, A. (eds.). Wiley, p. 110-119 10 p.

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

2 Citations (Scopus)

Role of junction depth in light emission from silicon p-i-n LEDs

Piccolo, G., Sammak, A., Hueting, R. J. E., Schmitz, J. & Nanver, L. K., 16 Sep 2013, Proceeding of European Solid State Device Research Conference (ESSDERC 2013). USA: IEEE, p. 119-122 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Strain and conduction-band offset in narrow n-type finFETs

van Hemert, T., Kaleli, B., Hueting, R. J. E., Esseni, D., van Dal, M. J. H. & Schmitz, J., 1 Mar 2013, In : IEEE transactions on electron devices. 60, 3, p. 1005-1010 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

The gridpix detector: History and perspective

van der Graaf, H., Aarnink, A. A. I., Aarts, A., van Bakel, N., Berbee, E., Berkien, A., van Beuzekom, M., Bosma, M., Campbell, M., Chefdeville, M. A., Colas, P., Colijn, A. P., Fomaini, A., Fransen, M., Giganon, A., Giomataris, I., Gotink, W., de Groot, N., Hartjes, F., van der Heijden, B. & 18 others, Hessey, N., Jansweijer, P., Konig, A., Koppert, W., Llopart, X., de Nooij, L., van der Putten, S., Rövekamp, J., Salm, C., San Segundo Bello, D., Schmitz, J., Smits, S. M., Timmermans, J., Verkooijen, H., Visschers, J., Visser, J., Wijnen, T. & Wyrsch, N., 24 Apr 2013, In : Modern physics letters. A. 28, 28-13, p. 13400211-13400217 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

The safe operating volume as a general measure for the operating limits of LDMOS transistors

Ferrara, A., Steeneken, P. G., Heringa, A., Boksteen, B. K., Swanenberg, M., Scholten, A. J., van Dijk, L., Schmitz, J. & Hueting, R. J. E., 9 Dec 2013, International Electron Devices Meeting (IEDM 2013). USA: IEEE Electron Devices Society, p. 6.7.1-6.7.4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2012

CMOS-MEMS Post Processing Compatible Capacitively Transduced GeSi Resonators

Kazmi, S. N. R., Aarnink, A. A. I., Salm, C. & Schmitz, J., 25 Jul 2012, Proceedings of 2012 IEEE International Frequency Control Symposium (IFCS). USA: IEEE Electron Devices Society, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Fast RF-CV characterization through High-Speed 1-port S-Parameter measurements

Herfst, R. W., Steeneken, P. G., Tiggelman, M. P. J., Stulemeijer, J. & Schmitz, J., 1 Aug 2012, In : IEEE transactions on semiconductor manufacturing. 25, 3, p. 310-316 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)
1 Citation (Scopus)

Laterally confined large-grained Poly-GeSi films: Crystallization and dopant activation using green laser

Rangarajan, B., Kovalgin, A. Y., Oesterlin, P., de Kloe, R., Brunets, I. & Schmitz, J., 1 Oct 2012, In : ECS journal of solid state science and technology. 1, 6, p. 263-268 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Low-Stress Highly-Conductive In-Situ Boron Doped Ge0.7Si0.3 Films by LPCVD

Kazmi, S. N. R., Kovalgin, A. Y., Aarnink, A. A. I., Salm, C. & Schmitz, J., 29 Aug 2012, In : ECS journal of solid state science and technology. 1, 5, p. P222-P226 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Micro- and nano-link ultra-low power heaters for sensors

Groenland, A. W., Vereshchagina, E., Kovalgin, A. Y., Wolters, R. A. M., Gardeniers, J. G. E. & Schmitz, J., 17 Sep 2012, European Solid-State Device Research Conference, ESSDERC 2012. USA: IEEE Solid-State Circuits Society, p. 169-172 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
2 Downloads (Pure)

Nanoscale carrier injectors for high luminescence Si-based LEDs

Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 27 Apr 2012, In : Solid-state electronics. 74, Special Issue, Selected Papers from the ESSDERC 2011 Conference, p. 43-48 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
1 Downloads (Pure)

Novel test structures for dedicated temperature budget determination

Faber, E. J., Wolters, R. A. M. & Schmitz, J., 1 Aug 2012, In : IEEE transactions on semiconductor manufacturing. 25, 3, p. 339-345 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

On the degradation of field-plate assisted RESURF power devices

Boksteen, B. K., Dhar, S., Ferrara, A., Heringa, A., Hueting, R. J. E., Koops, G. E. J., Salm, C. & Schmitz, J., 10 Dec 2012, IEEE International Electron Devices Meeting, IEDM 2012. San Francisco - USA: IEEE International Electron Device Meeting, p. 311-314 4 p. (Technical Digest).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
2011
4 Citations (Scopus)
1 Downloads (Pure)

Characterization of Green Laser Crystallized GeSi Thin Films

Rangarajan, B., Brunets, I., Oesterlin, P., Kovalgin, A. Y. & Schmitz, J., 2011, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology 2011. p. a06-04 6 p. (MRS online proceedings; vol. 1321).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

37 Downloads (Pure)

Charge protection characterisation and drift time resolution improvement for GridPix

Koppert, W. J. C., Fransen, M., van Bakel, N., van der Graaf, H., Hartjes, F., Timmermans, J., Visser, J., Kluit, R., Gromov, V., Zappon, F., Blanco Carballo, V. M., Schmitz, J., Bilevych, Y. & Bilevych, Y., 23 Oct 2011, IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2011. USA: IEEE, p. 1799-1802 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Exploring Capacitance-Voltage measurements to find the Piezoelectric Coefficient of Aluminum Nitride

van Hemert, T., Sakriotis, D., Hueting, R. J. E. & Schmitz, J., 4 Apr 2011, 24th International Conference on Microelectronic Test Structures, ICMTS 2011. USA: IEEE Electron Devices Society, p. 69-73 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

8 Citations (Scopus)

Extracting the Conduction Band Offset in Strained FinFETs from Subthreshold-Current Measurements

van Hemert, T., Kaleli, B., Hueting, R. J. E., Esseni, D., van Dal, M. J. H. & Schmitz, J., 12 Sep 2011, Proceedings of the 41st European Solid-State Device Research Conference (Essderc 2011). USA: IEEE Solid-State Circuits Society, p. 275-278 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Gap-closing test structures for temperature budget determination

Faber, E. J., Wolters, R. A. M. & Schmitz, J., 4 Apr 2011, 24th International Conference on Microelectronic Test Structures, ICMTS 2011. USA: IEEE Electron Devices Society, p. 165-169 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Green Laser Crystallization of GeSi thin Films and Dopant Activation

Rangarajan, B., Brunets, I., Oesterlin, P., Kovalgin, A. Y. & Schmitz, J., 1 May 2011, 219th ECS Meeting Transactions. The Electrochemical Society Inc., p. 17-25 9 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry

Van Hao, B., Groenland, A. W., Aarnink, A. A. I., Wolters, R. A. M., Schmitz, J. & Kovalgin, A. Y., 3 Jan 2011, In : Journal of the Electrochemical Society. 158, 3, p. 214-220 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

44 Citations (Scopus)
1 Downloads (Pure)

Increased light emission by geometrical changes in Si LEDs

Puliyankot Palackavalapil, V., Piccolo, G., Hueting, R. J. E., Heringa, A., Kovalgin, A. Y. & Schmitz, J., 14 Sep 2011, Proceedings of the 8th International Conference on Group IV Photonics (GFP). USA: IEEE Photonics Society, p. 287-289 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
1 Downloads (Pure)

Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells

Lu, J., Kovalgin, A. Y., van der Werf, K. H. M., Schropp, R. E. I. & Schmitz, J., 1 Jul 2011, In : IEEE transactions on electron devices. 58, 5, p. 2014-2021 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
15 Citations (Scopus)
23 Downloads (Pure)

Integration of Solar Cells on Top of CMOS Chips - Part II: CIGS Solar Cells

Lu, J., Liu, W., Kovalgin, A. Y., Sun, Y. & Schmitz, J., 1 Aug 2011, In : IEEE transactions on electron devices. 58, 8, p. 2620-2627 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
7 Citations (Scopus)
26 Downloads (Pure)

Light emission enhancement by geometrical scaling of carrier injectors in Si-based LEDs

Piccolo, G., Puliyankot Palackavalapil, V., Kovalgin, A. Y., Hueting, R. J. E., Heringa, A. & Schmitz, J., 12 Sep 2011, 2011 Proceedings of the 41st European Solid-State Device Research Conference (Essderc). USA: IEEE Solid-State Circuits Society, p. 175-178 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Low Stress In Situ Boron Doped Poly SiGe Layers for MEMS Modular Integration with CMOS

Kazmi, S. N. R., Aarnink, A. A. I., Kovalgin, A. Y., Salm, C. & Schmitz, J., 1 May 2011, In : ECS transactions. 35, 30, p. 45-52 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Materials Characterization of CIGS solar cells on Top of CMOS chips

Lu, J., Liu, W., Kovalgin, A. Y., Sun, Y. & Schmitz, J., 1 Jun 2011, Proceedings of 2011 MRS Spring Meeting. Venkatasubramanian, R., Radousky, H. & Liang, H. (eds.). Cambridge, UK: Cambridge University Press, p. e06-23 8 p. (MRS proceedings; vol. 1325).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
63 Downloads (Pure)

Microsecond pulsed DC matching measurements on MOSFETs in strong and weak inversion

Andricciola, P., Andricciola, P., Tuinhout, H., Wils, N. & Schmitz, J., 4 Apr 2011, 24th International Conference on Microelectronic Test Structures, ICMTS 2011. USA: IEEE Electron Devices Society, p. 90-94 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Nano-Link Based Ultra Low Power Micro Electronic Hotplates for Sensors and Actuators

Groenland, A. W., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 1 May 2011, In : ECS transactions. 35, 30, p. 25-34 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
1 Downloads (Pure)

On the kinetics of platinum silicide formation

Faber, E. J., Wolters, R. A. M. & Schmitz, J., 22 Feb 2011, In : Applied physics letters. 98, 8, p. 082102 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)

Realization of Silicon-Nanodots-Based CMOS Backend-Compatible Electrical SPP Source

Brunets, I., Walters, R. J., Kovalgin, A. Y., Polman, A. & Schmitz, J., 1 May 2011, 219th ECS Meeting. Pennington, NJ, USA: Electro Chemical Society, p. MA2011-01 4 p. (Meeting Abstracts; vol. MA2011-01).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Simultaneous extraction of threshold voltage and mobility degradation from on-the-fly NBTI measurements

Herfst, R. W., Schmitz, J. & Scholten, A. J., 10 Apr 2011, 2011 IEEE International Reliability Physics Symposium, IRPS 2011: Monterey, California, USA, 10-14 April 2011. IEEE Reliability Society, p. XT.6.1-6.4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)