Find Research Outputs

Search concepts
Selected filters

Publication Year

  • 2020
  • 2019
  • 2018
  • 2017
  • 2016
  • 2015
  • 2014
  • 2013
  • 2012
  • 2011

Author

  • Johan W. Berenschot
2020

High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding

Kooijman, L. J., Pordeli, Y., van der Wel, B. Y., Berenschot, J. W., Eijkel, J. C. T. & Tas, N. R., 31 Oct 2020, 23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences: uTAS 2019. Chemical and Biological Microssytems Society, p. 1188-1189

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Downloads (Pure)
2019

Postdeposition UV-Ozone Treatment: An Enabling Technique to Enhance the Direct Adhesion of Gold Thin Films to Oxidized Silicon

Le-The, H., Tiggelaar, R. M., Berenschot, E., Van Den Berg, A., Tas, N. & Eijkel, J. C. T., 12 Jun 2019, In : ACS nano. 13, p. 6782-6789 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
40 Downloads (Pure)

Selective area growth and stencil lithography for in situ fabricated quantum devices

Schüffelgen, P., Rosenbach, D., Li, C., Schmitt, T. W., Schleenvoigt, M., Jalil, A. R., Schmitt, S., Kölzer, J., Wang, M., Bennemann, B., Parlak, U., Kibkalo, L., Trellenkamp, S., Grap, T., Meertens, D., Luysberg, M., Mussler, G., Berenschot, E., Tas, N., Golubov, A. A. & 3 others, Brinkman, A., Schäpers, T. & Grützmacher, D., 29 Jul 2019, In : Nature nanotechnology. 14, 9, p. 825-831 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering

Le-The, H., Lozeman, J. J. A., Lafuente, M., Muñoz, P., Bomer, J. G., Duy-Tong, H., Berenschot, E., Van Den Berg, A., Tas, N. R., Odijk, M. & Eijkel, J. C. T., 7 Jul 2019, In : Nanoscale. 11, 25, p. 12152-12160 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2 Citations (Scopus)
12 Downloads (Pure)

Wafer-Scale Self-Aligned Fabrication of Nanometric Curved Tunneling Junctions

Pordeli, Y., Borgelink, B. T. H., Van Der Wel, B. Y., Berenschot, E. J. W., Dogan, T., De Boer, M. J., Bruinink, C. M., Zandvliet, H. J. W., Gardeniers, H. J. G. E. & Tas, N. R., Jun 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Piscataway, NJ: IEEE, p. 2376-2379 4 p. 8808559

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2018

3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures

Wilbers, J. G. E., Berenschot, J. W., Tiggelaar, R. M., Dogan, T., Sugimura, K., Van Der Wiel, W. G., Gardeniers, J. G. E. & Tas, N. R., 15 Feb 2018, In : Journal of micromechanics and microengineering. 28, 4, 044003.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)
4 Downloads (Pure)
Open Access
File
8 Citations (Scopus)
51 Downloads (Pure)

Morphology of single picosecond pulse subsurface laser-induced modifications of sapphire and subsequent selective etching

Capuano, L., Pohl, R., Tiggelaar, R. M., Berenschot, J. W., Gardeniers, J. G. E. & Römer, G. R. B. E., 29 Oct 2018, In : Optics express. 26, 22, p. 29283-29295 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
7 Citations (Scopus)
49 Downloads (Pure)

Scalable 3D Nanoparticle Trap for Electron Microscopy Analysis

Sun, X., Berenschot, E. J. W., Veltkamp, H-W., Gardeniers, H. J. G. E. & Tas, N. R., 28 Nov 2018, In : Small. 14, 48, 1803283.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
21 Downloads (Pure)

Sidewall patterning - A new wafer-scale method for accurate patterning of vertical silicon structures

Westerik, P. J., Vijselaar, W. J. C., Berenschot, J. W., Tas, N. R., Huskens, J. & Gardeniers, J. G. E., 1 Jan 2018, In : Journal of micromechanics and microengineering. 28, 1, 015008.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
3 Citations (Scopus)
33 Downloads (Pure)

Spatial decoupling of light absorption and catalytic activity of Ni–Mo-loaded high-aspect-ratio silicon microwire photocathodes

Vijselaar, W., Westerik, P., Veerbeek, J., Tiggelaar, R. M., Berenschot, E., Tas, N. R., Gardeniers, H. & Huskens, J., Mar 2018, In : Nature energy. 3, 3, p. 185-192 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
44 Citations (Scopus)
29 Downloads (Pure)

Three-dimensional fractal geometry for gas permeation in microchannels

Malankowska, M., Schlautmann, S., Berenschot, E. J. W., Tiggelaar, R. M., Pina, M. P., Mallada, R., Tas, N. R. & Gardeniers, H., 27 Jan 2018, In : Micromachines. 9, 2, 12 p., 45.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Citation (Scopus)
72 Downloads (Pure)

Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps

Le The, H., Lozeman, J. J. A., Bomer, J. G., Tong, H. D., Berenschot, E., van den Berg, A., Odijk, M. & Eijkel, J. C. T., 11 Nov 2018, MicroTAS 2018: The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences. Tseng, F-G. & Lee, G-B. (eds.). The Chemical and Biological Microsystems Society, p. 574-577 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
37 Downloads (Pure)
2017

Shrinkage Control of Photoresist for Large-Area Fabrication of Sub-30 nm Periodic Nanocolumns

Le The, H., Berenschot, J. W., Tiggelaar, R. M., Tas, N. R., van den Berg, A. & Eijkel, J. C. T., Mar 2017, In : Advanced Materials Technologies. 2, 3, 1600238.

Research output: Contribution to journalArticleAcademicpeer-review

15 Citations (Scopus)
13 Downloads (Pure)

Wafer-scale nanostructure formation inside vertical nano-pores

Berenschot, J. W., Sun, X., The, H. L., Tiggelaar, R. M., de Boer, M. J., Eijkel, J. C. T., Gardeniers, J. G. E., Tas, N. R. & Sarajlic, E., Apr 2017, IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017). Piscataway, NJ: IEEE, 4 p. (IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
2 Citations (Scopus)
101 Downloads (Pure)
2016

3D-fractal engineering based on oxide-only corner lithography

Berenschot, J. W., Tiggelaar, R. M., Geerlings, J., Gardeniers, J. G. E., Tas, N. R., Malankowska, M., Pina, M. P. & Mallada, R., 30 May 2016, 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP). IEEE, 4 p. (Category numberCFP16DTI-ART; Code 122735).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
4 Downloads (Pure)

Displacement Talbot lithography nanopatterned microsieve array for directional neuronal network formation in brain-on-chip

Xie, S., Schurink, B., Berenschot, J. W., Tiggelaar, R. M., Gardeniers, J. G. E. & Lüttge, R., 2016, In : Journal of vacuum science and technology. B: Microelectronics and nanometer structures. 34, 6, 06KI02.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
4 Citations (Scopus)
17 Downloads (Pure)

Large-area fabrication of sub-30 NM periodic nanostructures

Le The, H., Berenschot, J. W., Tiggelaar, R. M., Tas, N. R., van den Berg, A. & Eijkel, J. C. T., 9 Oct 2016, 20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, MicroTAS 2016. The Chemical and Biological Microsystems Society, p. 1124-1125 2 p. (International Conference on Miniaturized Systems for Chemistry and LifeSciences (MicroTAS); no. --).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
106 Downloads (Pure)

Let's twist again: elasto-capillary assembly of parallel ribbons

Legrain, A. B. H., Berenschot, J. W., Abelmann, L., Bico, J. & Tas, N. R., Aug 2016, In : Soft matter. 12, 34, p. 7186-7194 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
3 Citations (Scopus)
48 Downloads (Pure)

Nanopores Created using an Internal Shadowmask Process

de Vreede, L., Berenschot, J. W., Tas, N. R., van den Beld, W. T. E., Loessberg-Zahl, J. T., van den Berg, A. & Eijkel, J. C. T., 17 Apr 2016, IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2016). IEEE

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Downloads (Pure)

Nano-pyramid arrays for nano-particle trapping

Sun, X., Veltkamp, H-W., Berenschot, J. W., Gardeniers, J. G. E. & Tas, N. R., 24 Jan 2016, Nano-pyramid arrays for nano-particle trapping. Category numberCFP16MEM-ART; Code 119597, p. 185-188

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
4 Downloads (Pure)

Ultra-thin nanochannel-based liquid TEM cell for EELS analysis and high resolution imaging

Arik, Y. B., Matsui, R., Sarajlic, E., Takayama, Y., Boom, B. A., Berenschot, J. W., le Gac, S., Tas, N. R. & Fujita, H., 24 Jan 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, p. 804-807

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
2015

Capillary origami of micro-machined micro-objects: Bi-layer conductive hinges

Legrain, A. B. H., Berenschot, J. W., Tas, N. R. & Abelmann, L., 9 Jun 2015, In : Microelectronic engineering. 140, p. 60-66 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)

Development of a biomimetic eardrum for acoustic sensing

Westerik, P., Westerik, P. J., Berenschot, J. W. & Krijnen, G. J. M., 1 Nov 2015, Proceedings IEEE Sensors 2015. Piscataway: IEEE, p. 743-746 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
1 Citation (Scopus)
26 Downloads (Pure)

Elasto-capillary folding using stop-programmable hinges fabricated by 3D micro-nachining

Legrain, A. B. H., Berenschot, J. W., Tas, N. R. & Abelmann, L., 19 May 2015, In : PLoS ONE. 10, 5, p. e0125891 20 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
3 Citations (Scopus)
19 Downloads (Pure)

Electric field controlled nanoscale contactless deposition using a nanofluidic scanning probe

Geerlings, J., Sarajlic, E., Berenschot, J. W., Sanders, R. G. P., Siekman, M. H., Abelmann, L. & Tas, N. R., 23 Sep 2015, In : Applied physics letters. 107, 12, p. 123109 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Highly uniform sieving structure by corner lithography and silicon wet etching

Schurink, B., Berenschot, J. W., Tiggelaar, R. M. & Luttge, R., 16 Aug 2015, In : Microelectronic engineering. 144, p. 12-18 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)
2014

Controllable elastocapillary folding of three-dimensional micro-objects by through-wafer filling

Legrain, A. B. H., Janson, T. G., Berenschot, J. W., Abelmann, L. & Tas, N. R., 3 Jun 2014, In : Journal of Applied Physics. 115, p. 214905 9 p., 214905.

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)

Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds

Geerlings, J., Sarajlic, E., Berenschot, J. W., Siekman, M. H., Jansen, H. V., Abelmann, L. & Tas, N. R., 17 Sep 2014, In : Journal of micromechanics and microengineering. 24, 10, p. 105013 16 p., 105013.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Electrospray deposition from AFM probes with nanoscale apertures

Geerlings, J., Sarajlic, E., Berenschot, J. W., Sanders, R. G. P., Abelmann, L. & Tas, N. R., 26 Jan 2014, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014. San Francisco: IEEE, p. 100-103 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)

Fabrication of novel AFM probe with high-aspect-ratio ultra-sharp three-face silicon nitride tips

Vermeer, R., Berenschot, J. W., Sarajlic, E., Tas, N. R. & Jansen, H. V., Aug 2014, Proceedings of the 14th IEEE International Conference on Nanotechnology. USA: IEEE, p. 229-233 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)
1 Downloads (Pure)

Thermal flow-sensor drift reduction by thermopile voltage cancellation via power feedback control

Dijkstra, M., Lammerink, T. S. J., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J. & Elwenspoek, M. C., Aug 2014, In : Journal of microelectromechanical systems. 23, 4, p. 908-917 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Thermal-wave balancing flow sensor with low-drift power feedback

Dijkstra, M., Lammerink, T. S. J., Pjetri, O., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J. & Elwenspoek, M. C., 11 Apr 2014, In : Journal of micromechanics and microengineering. 24, 5, p. 055016 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
1 Citation (Scopus)
65 Downloads (Pure)
2013

Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling

Legrain, A. B. H., Janson, T. G., Berenschot, J. W., Krijnen, G. J. M., Abelmann, L. & Tas, N. R., 2013, 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. Los Alamitos, CA, USA: IEEE, p. 538-541 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Design, fabrication and characterization of a suspended plate mechano-optical modulator

Syed Nawazuddin, M. B., de Boer, M. J., Berenschot, J. W., Ma, K., Elwenspoek, M. C. & Wiegerink, R. J., 20 Jan 2013, 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013. IEEE, p. 560-563 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon

Berenschot, J. W., Jansen, H. V. & Tas, N. R., May 2013, In : Journal of micromechanics and microengineering. 23, 5, p. 10 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
50 Citations (Scopus)
148 Downloads (Pure)

Wafer-scale fabrication of nanoapertures using corner lithography

Burouni, N., Berenschot, J. W., Elwenspoek, M. C., Sarajlic, E., Leussink, P. J., Jansen, H. V. & Tas, N. R., Jul 2013, In : Nanotechnology. 24, 28, p. 10 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
11 Citations (Scopus)
71 Downloads (Pure)
2012

3D Nanofabrication of components by repeated corner lithography: Self Aligned sub-50nm apertures

Burouni, N., Berenschot, J. W., Elwenspoek, M. C. & Tas, N. R., 20 Aug 2012, Proceedings of the 12th IEEE International Conference on Nanotechnology (IEEE- NANO). Hoes Lane, USA: IEEE, p. - 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
25 Downloads (Pure)

3D Nanofabrication of Fluidic Components by Corner Lithography

Berenschot, J. W., Burouni, N., Schurink, B., van Honschoten, J. W., Sanders, R. G. P., Truckenmüller, R. K., Jansen, H. V., Elwenspoek, M. C., van Apeldoorn, A. A. & Tas, N. R., 21 Dec 2012, In : Small. 8, 24, p. 3823-3831 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
26 Citations (Scopus)
42 Downloads (Pure)

Cantilever arrays with self-aligned nanotips of uniform height

Koelmans, W. W., Peters, T., Peters, T., Berenschot, J. W., de Boer, M. J., Siekman, M. H. & Abelmann, L., 6 Apr 2012, In : Nanotechnology. 23, 13, p. 135301-135309 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)

Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)O3 thin film membranes

Sardan Sukas, Ö., Yagubizade, H., Berenschot, J. W., de Boer, M. J., Nguyen, D. M. & Abelmann, L., 2012, 23rd Micromechanics and Microsystems Europe Workshop, MME 2012. Ilmenau: Ilmenau University of Technology, p. C9 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Electrospray deposition from fountain pen AFM probes

Geerlings, J., Sarajlic, E., Berenschot, J. W., Abelmann, L. & Tas, N. R., 9 Sep 2012, Proceedings of the 23rd Micromechanics and Microsystems Europe Workshop (MME 2012). Ilmenau: Ilmenau University of Technology, p. C19 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Fabrication of micron-sized tetrahedra by Si〈1 1 1〉 micromachining and retraction edge lithography

Kozhummal, R., Berenschot, J. W., Jansen, H. V., Tas, N. R., Zacharias, M. & Elwenspoek, M. C., 20 Jul 2012, In : Journal of micromechanics and microengineering. 22, 8, p. 085032 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
7 Citations (Scopus)
51 Downloads (Pure)

Nano-slit electrospray emitters fabricated by a micro- to nanofluidic via technology

Dijkstra, M., Berenschot, J. W., de Boer, M. J., van der Linden, H. J., Hankemeier, T., Lammerink, T. S. J., Wiegerink, R. J., Elwenspoek, M. C. & Tas, N. R., 1 Jul 2012, In : Microfluidics and nanofluidics. 13, 1, p. 29-35 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
2 Citations (Scopus)
46 Downloads (Pure)

Towards a Casimir force measurement between micromachined parallel plate structures

Syed Nawazuddin, M. B., Lammerink, T. S. J., Berenschot, J. W., de Boer, M. J., Ma, K., Elwenspoek, M. C. & Wiegerink, R. J., 20 Nov 2012, In : Challenges. 3, 2, p. 261-277 17 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
60 Downloads (Pure)
2011

Dimensional Control in Corner Lithography for Wafer-Scale Fabrication of Nano-Apertures

Burouni, N., Berenschot, E., Elwenspoek, M. & Tas, N., 20 Feb 2011, 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011. Piscataway, NJ: IEEE, p. 940-943 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)

Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube

Legrain, A. B. H., Berenschot, J. W., Sanders, R. G. P., Ma, K., Tas, N. R. & Abelmann, L., 2011, Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. Norway: Department of micro and nano systems technology, Vestfold University College, p. 250-253 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
34 Downloads (Pure)

Mechano-optical switching in a mems integrated photonic crystal slab waveguide

Chakkalakkal Abdulla, S. M., Kauppinen, L. J., Dijkstra, M., Dijkstra, M., Berenschot, J. W., de Boer, M. J., de Ridder, R. M. & Krijnen, G. J. M., 23 Jan 2011, Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. USA: IEEE Micro Electro Mechanical Systems, p. 9-12 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

10 Citations (Scopus)

Micro-assembly of three dimensional tetrahedra by capillary forces

van Honschoten, J. W., Legrain, A. B. H., Legrain, A., Berenschot, J. W., Abelmann, L. & Tas, N. R., 23 Jan 2011, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 288-291 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning

Chakkalakkal Abdulla, S. M., Kauppinen, L. J., Dijkstra, M., de Boer, M. J., Berenschot, J. W., de Ridder, R. M. & Krijnen, G. J. M., Dec 2011, In : Journal of micromechanics and microengineering. 21, 12, p. 125010 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)