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  • Fred Bijkerk
2020

Etching processes of transferred and non-transferred multi-layer graphene in the presence of extreme UV, H2O and H2

Mund, B. K., Sturm, J. M., van den Beld, W. T. E., Lee, C. J. & Bijkerk, F., 28 Feb 2020, In : Applied surface science. 504, 144485.

Research output: Contribution to journalArticleAcademicpeer-review

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Similarity in ruthenium damage induced by photons with different energies: From visible light to hard X-rays

Milov, I., Lipp, V., Ilnitsky, D., Medvedev, N., Migdal, K., Zhakhovsky, V., Khokhlov, V., Petrov, Y., Inogamov, N., Semin, S., Kimel, A., Ziaja, B., Makhotkin, I. A., Louis, E. & Bijkerk, F., 31 Jan 2020, In : Applied surface science. 501, 143973.

Research output: Contribution to journalArticleAcademicpeer-review

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1 Citation (Scopus)
6 Downloads (Pure)
Open Access
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4 Downloads (Pure)
2019
Open Access

Angular and spectral bandwidth of Extreme UV multilayers near spacer material absorption edges

Zameshin, A., Yakshin, A., Chandrasekaran, A. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 602-608 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

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119 Downloads (Pure)
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3 Downloads (Pure)

Comparison of hydrogen transport through thin metal, Si and oxide layers

Soroka, O., Sturm, J. M. & Bijkerk, F., 21 Jan 2019.

Research output: Contribution to conferencePoster

Open Access
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6 Downloads (Pure)
Open Access
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4 Downloads (Pure)

EUV full-band spectrum and DUV/EUV ratio dependency on source operating conditions

Liu, F., Bayraktar, M., Lim, J-K., Bijkerk, F., Havermans, P. & Claes, B., 20 Jun 2019.

Research output: Contribution to conferencePoster

Extreme UV secondary electron yield measurements of Ru, Sn, and Hf oxide thin films

Sturm, J. M., Liu, F., Darlatt, E., Kolbe, M., Aarnink, A. A. I., Lee, C. J. & Bijkerk, F., 1 Jul 2019, In : Journal of Micro/ Nanolithography, MEMS, and MOEMS. 18, 3, 033501.

Research output: Contribution to journalArticleAcademicpeer-review

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70 Downloads (Pure)

Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength

Kuznetsov, D., Yakshin, A., Sturm, J. M. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 585-592 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

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14 Downloads (Pure)

Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers

Nikolaev, K. V., Yakunin, S. N., Makhotkin, I. A., de la Rie, J., Medvedev, R. V., Rogachev, A. V., Trunckin, I. N., Vasiliev, A. L., Hendrikx, C. P., Gateshki, M., van de Kruijs, R. W. E. & Bijkerk, F., Mar 2019, In : Acta Crystallographica Section A: Foundations and Advances. 75, p. 342-351 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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1 Citation (Scopus)
24 Downloads (Pure)

Hydrogenation dynamics of Ru capped y thin films

Soroka, O., Sturm, J. M., Van De Kruijs, R. W. E., Makhotkin, I. A., Nikolaev, K., Yakunin, S. N., Lee, C. J. & Bijkerk, F., 8 Oct 2019, In : Journal of Applied Physics. 126, 14, 145301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
Open Access
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3 Downloads (Pure)

In-situ studies of silicide formation during growth of molybdenum-silicon interfaces

Reinink, J., Zameshin, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Oct 2019, In : Journal of Applied Physics. 126, 13, 135304.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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15 Downloads (Pure)

Low-energy ion polishing of Si in W/Si soft X-ray multilayer structures

Medvedev, R. V., Nikolaev, K. V., Zameshin, A. A., Ijpes, D., Makhotkin, I. A., Yakunin, S. N., Yakshin, A. E. & Bijkerk, F., 28 Jul 2019, In : Journal of Applied Physics. 126, 4, 045302.

Research output: Contribution to journalArticleAcademicpeer-review

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3 Downloads (Pure)
Open Access
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2 Downloads (Pure)

Multilayer filter using the borrmann effect for euv source monitoring

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 1 Jan 2019, Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015. Optical Society of America

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Multiscale modeling of damage processes in Ru thin films induced by femtosecond laser pulses

Milov, I., Lipp, V., Ilnitsky, D., Medvedev, N., Migdal, K., Zhakhovsky, V., Khokhlov, V., Petrov, Y., Inogamov, N., Ziaja, B., Medvedev, V., Makhotkin, I. A., Louis, E. & Bijkerk, F., 30 Sep 2019.

Research output: Contribution to conferencePoster

Multiscale modeling of damage processes in Ru thin films induced by femtosecond laser pulses

Milov, I., Lipp, V., Ilnitsky, D., Medvedev, N., Migdal, K., Zhakhovsky, V., Khokhlov, V., Petrov, Y., Inogamov, N., Ziaja, B., Medvedev, V., Makhotkin, I. A., Louis, E. & Bijkerk, F., 30 Oct 2019.

Research output: Contribution to conferencePoster

Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

Nematollahi, M., Lucke, P., Bayraktar, M., Yakshin, A., Rijnders, A. J. H. M. & Bijkerk, F., 15 Oct 2019, In : Optics letters. 44, 20, p. 5104-5107 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

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25 Downloads (Pure)

Nanoscale Transition Metal Thin Films: Growth Characteristics and Scaling Law for Interlayer Formation

Chandrasekaran, A., van de Kruijs, R. W. E., Sturm, J. M., Zameshin, A. & Bijkerk, F., 11 Dec 2019, In : ACS applied materials & interfaces. 11, 49, p. 46311−46326 16 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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12 Downloads (Pure)
Open Access
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1 Citation (Scopus)
113 Downloads (Pure)

Oxidation of metal thin films by atomic oxygen: A low energy ion scattering study

Stilhano Vilas Boas, C. R., Sturm, J. M. & Bijkerk, F., 21 Oct 2019, In : Journal of Applied Physics. 126, 15, 7 p., 155301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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25 Downloads (Pure)
Open Access
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5 Downloads (Pure)
Open Access
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1 Downloads (Pure)

Spectral investigation of Sn laser-produced plasmas in the extreme ultraviolet range

Bouza, Z., Scheers, J., Sheil, J., Schupp, R., Torretti, F., Bayraktar, M., Bijkerk, F., Shah, C., Bekker, H., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R. & Versolato, O., 8 Oct 2019.

Research output: Contribution to conferencePoster

Spectral Unraveling of EUV Lithography Light Sources

Bouza, Z., Scheers, J., Sheil, J., Schupp, R., Bayraktar, M., Bijkerk, F., Shah, C., Bekker, H., Ubachs, W., Hoekstra, R. & Versolato, O., 10 May 2019.

Research output: Contribution to conferencePoster

2018

Advancing X-ray standing wave data analysis

Makhotkin, I. A., Yakunin, S. N., Hendrikx, C. P., Chandrasekaran, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Nov 2018.

Research output: Contribution to conferencePoster

File
20 Downloads (Pure)

Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 1 Jan 2018, In : Applied surface science. 427, Part B, p. 1033-1040 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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2 Citations (Scopus)
14 Downloads (Pure)

Broadband spectrometer development based on high-density free-standing transmission gratings

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 31 Jan 2018.

Research output: Contribution to conferencePoster

Comprehensive studies of single-shot damage of Ru thin films induced by EUV FEL fs pulses

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., Lipp, V., Ziaja, B., Khokhlov, V., Zhakhovsky, V., Petrov, Y., Shepelev, V., Ilnitsky, D., Migdal, K., Inogamov, N., Medvedev, V., Louis, E. & Bijkerk, F., 23 Jan 2018.

Research output: Contribution to conferencePoster

Comprehensive studies of single-shot damage of Ru thin films induced by EUV FEL fs pulses

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., Lipp, V., Ziaja, B., Khokhlov, V., Zhakhovsky, V., Petrov, Y., Shepelev, V., Ilnitsky, D., Migdal, K., Inogamov, N., Medvedev, V., Louis, E. & Bijkerk, F., 25 Jan 2018.

Research output: Contribution to conferencePoster

Control of YH3 formation and stability via hydrogen surface adsorption and desorption

Soroka, O., Sturm, J. M., van de Kruijs, R. W. E., Lee, C. J. & Bijkerk, F., 15 Oct 2018, In : Applied surface science. 455, p. 70-74 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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2 Citations (Scopus)
14 Downloads (Pure)

Damage processes in thin Ru films induced by single and multiple ultra-short XUV pulses

Makhotkin, I. A., Milov, I., Sobierajski, R., Medvedev, N., Lipp, V., Ziaja, B., Khokhlov, V., Zhakhovsky, V., Petrov, Y., Shepelev, V., Ilnitsky, D., Migdal, K., Inogamov, N., Medvedev, V., Louis, E. & Bijkerk, F., 17 Sep 2018.

Research output: Contribution to conferencePoster

Double matrix effect in Low Energy Ion Scattering from La surfaces

Zameshin, A. A., Yakshin, A. E., Sturm, J. M., Brongerma, H. H. & Bijkerk, F., 15 May 2018, In : Applied surface science. 440, p. 570-579 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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4 Citations (Scopus)
20 Downloads (Pure)

Formation of H2O on a CO2 dosed Ru(0 0 0 1) surface under Extreme Ultraviolet Light and H2

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Oct 2018, In : Applied surface science. 456, p. 538-544 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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1 Citation (Scopus)
20 Downloads (Pure)

Formation of H2O on the surface of CO2 dosed Ru(0001) under Extreme Ultraviolet Light and H2

Mund, B. K., Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., Jan 2018.

Research output: Contribution to conferencePoster

Hydrogen diffusion measurements using Y thin film monitoring

Soroka, O., Sturm, J. M., Lee, C. J. & Bijkerk, F., Jan 2018.

Research output: Contribution to conferencePoster

Influence of internal stress and layer thickness on the formation of hydrogen induced thin film blisters in Mo/Si multilayers

van den Bos, R. A. J. M., Reinink, J., Lopaev, D. V., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 22 Feb 2018, In : Journal of physics D: applied physics. 51, 11, 11 p., 115302.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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2 Citations (Scopus)
24 Downloads (Pure)

In situ and real-time monitoring of structure formation during non-reactive sputter deposition of lanthanum and reactive sputter deposition of lanthanum nitride

Krause, B., Kuznetsov, D. S., Yakshin, A. E., Ibrahimkutty, S., Baumbach, T. & Bijkerk, F., Aug 2018, In : Journal of applied crystallography. 51, p. 1013-1020 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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29 Downloads (Pure)

Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., lipp, V., Chalupsky, J., Sturm, J. M., Tiedtke, K., de Vries, G., Störmer, M., Siewert, F., van de Kruijs, R., Louis, E., Jacyna, I., Jurek, M., Juha, L., Hájková, V., Vozda, V., Burian, T., Saksl, K. & 13 others, Faatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T., Enkisch, H. & Bijkerk, F., 23 Jul 2018, In : Optics express. 26, 15, p. 19665-19685 21 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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5 Citations (Scopus)
39 Downloads (Pure)