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• 2013

  Conduction and electric field effect in ultra-thin TiN films

  Van Hao, B., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 31 Jul 2013, In : Applied physics letters. 103, 5, p. 051904 4 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  13 Citations (Scopus)

  1 Downloads (Pure)

• Deep reactive ion etching of in situ boron doped LPCVD Ge_0.7Si_0.3 using SF₆ and O₂ plasma

  Kazmi, S. N. R., Salm, C. & Schmitz, J., Oct 2013, In : Microelectronic engineering. 110, p. 311-314 4 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Boron
  • Reactive ion etching
  • Plasmas
  • boron
  • etching
  1 Citation (Scopus)

• Degradation and reliability of silicon power transistors

  Schmitz, J., Oct 2013, 2013 IEEE International Integrated Reliability Workshop Final Report.

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

• Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150 °C

  Rangarajan, B., Kovalgin, A. Y. & Schmitz, J., 15 Sep 2013, In : Surface and coatings technology. 230, p. 46-50 5 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  4 Citations (Scopus)

• GridPix detectors: production and beam test results

  Koppert, W. J. C., van Bakel, N., Bilevych, Y., Bilevych, Y., Colas, P., Desch, K., Fransen, M., van der Graaf, H., Hartjes, F., Hessey, N. P., Kaminski, J., Schmitz, J., Schön, R. & Zappon, F., Dec 2013, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 732, p. 245-249 5 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  9 Citations (Scopus)

• Low-temperature deposition of high-quality siliconoxynitride films for CMOS-integrated optics

  Rangarajan, B., Kovalgin, A. Y., Worhoff, K. & Schmitz, J., 13 Mar 2013, In : Optics letters. 38, 6, p. 941-943 3 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  16 Citations (Scopus)

• Mechanical resonators on CMOS for integrated passive band pass filters

  Kazmi, S. N. R., Salm, C. & Schmitz, J., 23 Jul 2013, ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day'. p. 193-196 4 p. 6523517. (ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day').

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

  • Passive filters
  • Bandpass filters
  • Resonators
  • Germanium
  • Boron

• Microchip post-processing: There is plenty of room at the top

  Schmitz, J., 1 Jan 2013, Future Trends in Microelectronics: Frontiers and Innovations. Luryi, S., Xu, J. & Zaslavsky, A. (eds.). Wiley, p. 110-119 10 p.

  Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic › peer-review

  • CMOS integrated circuits
  • Thesauri
  • Microsystems
  • Thermoanalysis
  • Hot Temperature
  2 Citations (Scopus)

• Role of junction depth in light emission from silicon p-i-n LEDs

  Piccolo, G., Sammak, A., Hueting, R. J. E., Schmitz, J. & Nanver, L. K., 16 Sep 2013, Proceeding of European Solid State Device Research Conference (ESSDERC 2013). USA: IEEE, p. 119-122 4 p.

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

• Strain and conduction-band offset in narrow n-type finFETs

  van Hemert, T., Kaleli, B., Hueting, R. J. E., Esseni, D., van Dal, M. J. H. & Schmitz, J., 1 Mar 2013, In : IEEE transactions on electron devices. 60, 3, p. 1005-1010 6 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  3 Citations (Scopus)

• The gridpix detector: History and perspective

  van der Graaf, H., Aarnink, A. A. I., Aarts, A., van Bakel, N., Berbee, E., Berkien, A., van Beuzekom, M., Bosma, M., Campbell, M., Chefdeville, M. A., Colas, P., Colijn, A. P., Fomaini, A., Fransen, M., Giganon, A., Giomataris, I., Gotink, W., de Groot, N., Hartjes, F., van der Heijden, B. & 18 others, Hessey, N., Jansweijer, P., Konig, A., Koppert, W., Llopart, X., de Nooij, L., van der Putten, S., Rövekamp, J., Salm, C., San Segundo Bello, D., Schmitz, J., Smits, S. M., Timmermans, J., Verkooijen, H., Visschers, J., Visser, J., Wijnen, T. & Wyrsch, N., 24 Apr 2013, In : Modern physics letters. A. 28, 28-13, p. 13400211-13400217 7 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  2 Citations (Scopus)

• The safe operating volume as a general measure for the operating limits of LDMOS transistors

  Ferrara, A., Steeneken, P. G., Heringa, A., Boksteen, B. K., Swanenberg, M., Scholten, A. J., van Dijk, L., Schmitz, J. & Hueting, R. J. E., 9 Dec 2013, International Electron Devices Meeting (IEDM 2013). USA: IEEE Electron Devices Society, p. 6.7.1-6.7.4 4 p.

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
  1 Citation (Scopus)
• 2012

  CMOS-MEMS Post Processing Compatible Capacitively Transduced GeSi Resonators

  Kazmi, S. N. R., Aarnink, A. A. I., Salm, C. & Schmitz, J., 25 Jul 2012, Proceedings of 2012 IEEE International Frequency Control Symposium (IFCS). USA: IEEE Electron Devices Society, p. 1-4 4 p.

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
  4 Citations (Scopus)

• Fast RF-CV characterization through High-Speed 1-port S-Parameter measurements

  Herfst, R. W., Steeneken, P. G., Tiggelman, M. P. J., Stulemeijer, J. & Schmitz, J., 1 Aug 2012, In : IEEE transactions on semiconductor manufacturing. 25, 3, p. 310-316 7 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  7 Citations (Scopus)

• Four point probe structures with buried and surface electrodes for the electrical characterization of ultrathin conducting films

  Groenland, A. W., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 2 Jan 2012, In : IEEE transactions on semiconductor manufacturing. 25, 2, p. 178-184 7 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  1 Citation (Scopus)

• Laterally confined large-grained Poly-GeSi films: Crystallization and dopant activation using green laser

  Rangarajan, B., Kovalgin, A. Y., Oesterlin, P., de Kloe, R., Brunets, I. & Schmitz, J., 1 Oct 2012, In : ECS journal of solid state science and technology. 1, 6, p. 263-268 6 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  3 Citations (Scopus)

• Low-Stress Highly-Conductive In-Situ Boron Doped Ge_0.7Si_0.3 Films by LPCVD

  Kazmi, S. N. R., Kovalgin, A. Y., Aarnink, A. A. I., Salm, C. & Schmitz, J., 29 Aug 2012, In : ECS journal of solid state science and technology. 1, 5, p. P222-P226 5 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  4 Citations (Scopus)

• Micro- and nano-link ultra-low power heaters for sensors

  Groenland, A. W., Vereshchagina, E., Kovalgin, A. Y., Wolters, R. A. M., Gardeniers, J. G. E. & Schmitz, J., 17 Sep 2012, European Solid-State Device Research Conference, ESSDERC 2012. USA: IEEE Solid-State Circuits Society, p. 169-172 4 p.

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
  2 Citations (Scopus)

  2 Downloads (Pure)

• Nanoscale carrier injectors for high luminescence Si-based LEDs

  Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 27 Apr 2012, In : Solid-state electronics. 74, Special Issue, Selected Papers from the ESSDERC 2011 Conference, p. 43-48 6 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  2 Citations (Scopus)

  1 Downloads (Pure)

• Novel test structures for dedicated temperature budget determination

  Faber, E. J., Wolters, R. A. M. & Schmitz, J., 1 Aug 2012, In : IEEE transactions on semiconductor manufacturing. 25, 3, p. 339-345 7 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  4 Citations (Scopus)

• On the degradation of field-plate assisted RESURF power devices

  Boksteen, B. K., Dhar, S., Ferrara, A., Heringa, A., Hueting, R. J. E., Koops, G. E. J., Salm, C. & Schmitz, J., 10 Dec 2012, IEEE International Electron Devices Meeting, IEDM 2012. San Francisco - USA: IEEE International Electron Device Meeting, p. 311-314 4 p. (Technical Digest).

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
  3 Citations (Scopus)