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• Fabrication and properties of GeSi and SiON layers for above-IC integrated optics

  Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., Jun 2015, In : Solid-state electronics. 108, p. 8-12 5 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  File

  • Integrated optics
  • integrated optics
  • CMOS
  • oxynitrides
  • Fabrication
  4 Citations (Scopus)

  30 Downloads (Pure)

• Electric field and interface charge extraction in field-plate assisted RESURF devices

  Boksteen, B. K., Heringa, A., Ferrara, A., Steeneken, P. G., Schmitz, J. & Hueting, R. J. E., 1 Feb 2015, In : IEEE transactions on electron devices. 62, 2, p. 622-629 8 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  4 Citations (Scopus)

• Electrical test structures for verifying continuity of ultra-thin insulating and conducting films

  Banerjee, S., van der Velde, F. J., Yang, M., Schmitz, J. & Kovalgin, A. Y., 28 Mar 2017, Electrical test structures for verifying continuity of ultra-thin insulating and conducting films. New York: IEEE, p. 1-6 6 p.

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

  • continuity
  • conduction
  • aluminum nitrides
  • closures
  • ellipsometry

• Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

  van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

  Open Access

  File

  • Atomic layer deposition
  • Sheet resistance
  • Contact resistance
  • Tungsten
  • Characterization (materials science)
  1 Citation (Scopus)

  64 Downloads (Pure)

• Effects of Oxygen, Nitrogen and Fluorine on the Crystallinity of Tungsten by Hot-Wire Assisted ALD

  Yang, M., Aarnink, A. A. I., Wolters, R. A. M., Schmitz, J. & Kovalgin, A. Y., 6 Dec 2017, In : ECS journal of solid state science and technology. 6, 12, p. P839-P844

  Research output: Contribution to journal › Article › Academic › peer-review

  • Atomic layer deposition
  • Fluorine
  • Tungsten
  • Crystallinity
  • Hydrogen
  3 Citations (Scopus)

  1 Downloads (Pure)

• Editorial: Extended papers selected from ESSDERC 2015

  Grasser, T., Schmitz, J. & Lemme, M. C., 1 Nov 2016, In : Solid-state electronics. 125, p. 1-1 1 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  File
  46 Downloads (Pure)

• Deposition of thin layers containing Ga, C and N by sequential pulses of Trimethylgallium and Ammonia

  Banerjee, S., Aarnink, A. A. I., Kip, G. A. M., Gravesteijn, D. J., Schmitz, J. & Kovalgin, A. Y., 25 Jul 2016. 1 p.

  Research output: Contribution to conference › Paper › Academic

  Open Access

  File

  • gallium nitrides
  • gallium
  • ammonia
  • pulses
  • carbon
  142 Downloads (Pure)

• Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150 °C

  Rangarajan, B., Kovalgin, A. Y. & Schmitz, J., 15 Sep 2013, In : Surface and coatings technology. 230, p. 46-50 5 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  4 Citations (Scopus)

• Degradation and reliability of silicon power transistors

  Schmitz, J., Oct 2013, 2013 IEEE International Integrated Reliability Workshop Final Report.

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

• Deep reactive ion etching of in situ boron doped LPCVD Ge_0.7Si_0.3 using SF₆ and O₂ plasma

  Kazmi, S. N. R., Salm, C. & Schmitz, J., Oct 2013, In : Microelectronic engineering. 110, p. 311-314 4 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Boron
  • Reactive ion etching
  • Plasmas
  • boron
  • etching
  1 Citation (Scopus)

• Conduction and electric field effect in ultra-thin TiN films

  Van Hao, B., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 31 Jul 2013, In : Applied physics letters. 103, 5, p. 051904 4 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  13 Citations (Scopus)

  1 Downloads (Pure)

• Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor

  Yang, M., Aarnink, A. A. I., Kovalgin, A. Y., Gravesteijn, D. J., Wolters, R. A. M. & Schmitz, J., Jan 2016, In : Journal of vacuum science and technology A: vacuum, surfaces, and films. 34, 1, 10 p., 01A129.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • Atomic layer deposition
  • Tungsten
  • cold walls
  • Chemical vapor deposition
  • atomic layer epitaxy
  9 Citations (Scopus)

  46 Downloads (Pure)

• Comparison of electrical techniques for temperature evaluation in power MOS transistors

  Ferrara, A., Steeneken, P. G., Reimann, K., Heringa, A., Yan, L., Boksteen, B. K., Swanenberg, M., Koops, G. E. J., Scholten, A. J., Surdeanu, R., Schmitz, J. & Hueting, R. J. E., 26 Mar 2013, IEEE International Conference on Microelectronic Test Structures (ICMTS 2013). USA: IEEE, p. 115-120 6 p.

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

  • Power transistors
  • MOSFET devices
  • Temperature
  • Diodes
  • Chucks
  5 Citations (Scopus)

• Comparison of C-V measurement methods for RF-MEMS capacitive switches

  Wang, J., Salm, C. & Schmitz, J., 26 Mar 2013, IEEE International Conference on Microelectronic Test Structures, ICMTS 2013. USA: IEEE Electron Devices Society, p. 53-58 6 p.

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
  4 Citations (Scopus)

• CMOS post-processing for monolithic microsystems

  Schmitz, J., 11 Mar 2014, Nano and Giga Challenges in Electronics, Photonics and Renewable Energy, Nano & Giga 2014. Tempe, Arizona, USA: Arizona State University, p. - 1 p.

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

• CMOS-MEMS Post Processing Compatible Capacitively Transduced GeSi Resonators

  Kazmi, S. N. R., Aarnink, A. A. I., Salm, C. & Schmitz, J., 25 Jul 2012, Proceedings of 2012 IEEE International Frequency Control Symposium (IFCS). USA: IEEE Electron Devices Society, p. 1-4 4 p.

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
  4 Citations (Scopus)

• Characterization of recessed Ohmic contacts to AlGaN/GaN

  Hajlasz, M., Donkers, J. J. T. M., Sque, S. J., Heil, S. B. S., Gravesteijn, D. J., Rietveld, F. J. R. & Schmitz, J., 23 Mar 2015, Proceedings of the International Conference on Microelectronic Test Structures, ICMTS 2015. USA: IEEE Solid-State Circuits Society, p. 158-162 5 p. (Proceedings of the IEEE International Conference on Microelectronic Test Structures).

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
  2 Citations (Scopus)

• A nitride-based epitaxial surface layer formed by ammonia treatment of silicene-terminated ZrB₂

  Wiggers, F. B., Van Hao, B., Friedlein, R., Yamada-Takamura, Y., Schmitz, J., Kovalgin, A. Y. & de Jong, M. P., 5 Apr 2016, In : Journal of chemical physics. 144, 134703, p. 1-5 5 p.

  Research output: Contribution to journal › Article › Academic › peer-review
  4 Citations (Scopus)

• Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode

  Kaleli, B., Nguyen, D. M., Schmitz, J., Wolters, R. A. M. & Hueting, R. J. E., 1 May 2014, In : Microelectronic engineering. 119, p. 16-19 4 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • titanium nitride
  • Titanium nitride
  • titanium nitrides
  • Lead zirconate titanate
  • Ferroelectric materials
  10 Citations (Scopus)

• Analysis of Short-Circuit Transients in the LHC Main Dipole Circuit

  Liakopoulou, A., Annema, A. J., Bortot, L., Charifoulline, Z., Maciejewski, M., Prioli, M., Ravaioli, E., Salm, C., Schmitz, J. & Verweij, A. P., 2019. 1 p.

  Research output: Contribution to conference › Abstract › Academic

  Open Access

  File

  • short circuits
  • fuses
  • hadrons
  • dipoles
  • simulation
  19 Downloads (Pure)

• Analysis of ferroelectric and electrical properties of sub 100 nm thick PZT/LNO stacks on an encapsulated TiN electrode

  Kaleli, B., Nguyen, D. M., Schmitz, J., Wolters, R. A. M. & Hueting, R. J. E., 16 Sep 2013, p. -.

  Research output: Contribution to conference › Poster › Other research output