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Author

  • Remco J. Wiegerink
2020

A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface

de Oliveira, A. C., Schut, T. V. P., Groenesteijn, J., Fan, Q., Wiegerink, R. J. & Makinwa, K. A. A., 13 Jan 2020, 2019 IEEE Sensors: SENSORS 2019 - Conference Proceedings. Piscataway, NJ: IEEE, 8956695. (Proceedings of IEEE Sensors; vol. 2019).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Disposable DNA Amplification Chips with Integrated Low-Cost Heaters

Veltkamp, H-W., Akegawa Monteiro, F., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 25 Feb 2020, In : Micromachines. 11, 3, 28 p., 238.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
9 Downloads (Pure)

Magnetic field strength improvement for Lorentz actuation of a μ-Coriolis mass flow sensor

Schut, T. V. P., Klein, Y. P., Wiegerink, R. J. & Lotters, J. C., 1 Mar 2020, In : Microelectronic engineering. 224, 111236.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

μ-Coriolis mass flow sensor with resistive readout

Schut, T., Wiegerink, R. & Lötters, J., 11 Feb 2020, In : Micromachines. 11, 2, 184.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
7 Downloads (Pure)
2019

A short post-processing method for high aspect ratio trenches after Bosch etching

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sep 2019. 1 p.

Research output: Contribution to conferenceAbstract

Open Access
File
28 Downloads (Pure)

Device simulation of heavily doped silicon electrical resistivity at extremely high temperatures

Zhao, Y., Hueting, R., Veltkamp, H-W., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 4 Jul 2019, Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop 2019. p. 108-109 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor

Yu, Q., Veltkamp, H-W., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 103-105. 3 p.

Research output: Contribution to conferencePaper

Open Access
File
31 Downloads (Pure)

Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology

Zhao, Y., Veltkamp, H-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 116-119. 4 p.

Research output: Contribution to conferencePaper

Open Access
File
10 Downloads (Pure)

Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels

Zhao, Y., Veltkamp, H-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sep 2019.

Research output: Contribution to conferenceAbstract

Open Access
File
13 Downloads (Pure)

High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., Jan 2019, 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Vol. 32. p. 648-651 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology

Veltkamp, H. W., Zhao, Y., De Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lotters, J. C., 17 Oct 2019, 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. IEEE, p. 648-651 4 p. 8870667

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Towards 3D printed microfluidic devices in α-alumina

Veltkamp, H-W., Zhao, Y., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 156-159. 4 p.

Research output: Contribution to conferencePaper

Open Access
File
52 Downloads (Pure)

Towards 3D printed microfluidic structures in alumina

Veltkamp, H-W., Zhao, Y., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 4 Jul 2019, Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop. Delft, p. 120-121 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Towards a disposable polymer-based micro-bioreactor

Akegawa Monteiro, F., Veltkamp, H-W., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 4 Jul 2019, Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop. Delft, p. 78-79 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Towards a fully integrated and disposable DNA amplification chip

Akegawa Monteiro, F., Veltkamp, H-W., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 128-131. 4 p.

Research output: Contribution to conferencePaper

Open Access
File
47 Downloads (Pure)

Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future?

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 9 Oct 2019, p. 30-31. 2 p.

Research output: Contribution to conferenceAbstract

2018

Design principles and fabrication method for a miniaturized fuel gas combustion reactor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 7 Jun 2018, Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop. Enschede, p. 10 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Experimental analysis of thermomechanical noise in micro Coriolis mass flow sensors

Alveringh, D., Wiegerink, R. J., Groenesteijn, J., Sanders, R. G. P. & Lötters, J. C., 1 Mar 2018, In : Sensors and actuators. A: Physical. 271, p. 212-216 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
4 Downloads (Pure)

Inline relative permittivity sensing using silicon electrodes realized in surface channel technology

Alveringh, D., Wiegerink, R. J. & Lotters, J. C., 24 Apr 2018, 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018: the 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, Northern Ireland, 21-25 January 2018. Piscataway, NJ: IEEE, p. 840-843 4 p. (International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Method of fabricating a micro machined channel

Zhao, Y., Veltkamp, H-W., Zeng, Y., Lötters, J. C. & Wiegerink, R. J., 17 Sep 2018, Patent No. WO2019054873A1, 17 Sep 2018, Priority date 15 Sep 2018, Priority No. 2019560

Research output: Patent

Open Access
File
2 Downloads (Pure)

Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

Zeng, Y., Groenesteijn, J., Alveringh, D., Steenwelle, R. J. A., Ma, K., Wiegerink, R. J. & Lötters, J. C., 21 Jan 2018.

Research output: Contribution to conferencePaper

File
1 Citation (Scopus)
134 Downloads (Pure)

Micro machined fuel gas combustion unit

Zhao, Y., Veltkamp, H-W., Zeng, Y., Lötters, J. C. & Wiegerink, R. J., 17 Sep 2018, Patent No. WO2019054872A1, 17 Sep 2018, Priority date 15 Sep 2018, Priority No. 2019559

Research output: Patent

Open Access
File
2 Downloads (Pure)

On frequency-based interface circuits for capacitive MEMS accelerometers

Qiao, Z., Boom, B. A., Annema, A. J., Wiegerink, R. J. & Nauta, B., 25 Sep 2018, In : Micromachines. 9, 10, 21 p., 488.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
3 Citations (Scopus)
109 Downloads (Pure)

Trench-assisted surface channel technology (TASCT) as platform for high-temperature physical parameter sensing

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 7 Jun 2018, Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop. Enschede, p. 9 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2017

A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization

Groenesteijn, J., de Boer, M. J., Lötters, J. C. & Wiegerink, R. J., 1 Jul 2017, In : Microfluidics and nanofluidics. 21, 7, 127.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
11 Citations (Scopus)
150 Downloads (Pure)

A versatile technology platform for microfluidic handling systems, part II: channel design and technology

Groenesteijn, J., de Boer, M. J., Lötters, J. C. & Wiegerink, R. J., 1 Jul 2017, In : Microfluidics and nanofluidics. 21, 7, 126.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
5 Citations (Scopus)
69 Downloads (Pure)

Coriolis mass flow and density sensor actuation using a phase-locked loop

Alveringh, D., Schut, T., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017. p. 102-105 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
111 Downloads (Pure)

Design principles and fabrication method for a miniaturized fuel gas combustion reactor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 37-40

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
103 Downloads (Pure)

Fabrication of large-volume rectangular channels using trench-sidewall technology and a SOI substrate

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 114-117

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
91 Downloads (Pure)

Fabrication process for a large volume silicon nitride micro-combustor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 450.

Research output: Contribution to conferenceAbstract

Open Access
File
61 Downloads (Pure)

Integrated pressure sensing using capacitive Coriolis mass flow sensors

Alveringh, D., Wiegerink, R. J. & Lötters, J. C., 2 Jun 2017, In : Journal of microelectromechanical systems. 26, 3, p. 653-661 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Micro Coriolis mass flow sensor driven by external piezo ceramic

Zeng, Y., Groenesteijn, J., Alveringh, D., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, p. 45-48.

Research output: Contribution to conferencePaper

Open Access
File
96 Downloads (Pure)

Micro Coriolis mass flow sensor with integrated resistive pressure sensors

Groenesteijn, J., Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W. & Lötters, J. C., 4 Oct 2017, p. 16-19. 4 p.

Research output: Contribution to conferencePaper

Open Access

Nano-G accelerometer using geometric anti-springs

Boom, B. A., Bertolini, A., Hennes, E., Brookhuis, R. A., Wiegerink, R. J., Brand, van den, J. F. J., Beker, M. G., Oner, A. & Wees, van, D., 22 Jan 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, p. 33-36 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
13 Citations (Scopus)
308 Downloads (Pure)

Phase relation recovery for scanning laser Doppler vibrometry

Alveringh, D., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 12 Jan 2017, In : Measurement science and technology. 28, 2, p. 025208 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Resistive pressure sensors integrated with a Coriolis mass flow sensor

Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W. & Lötters, J. C., 18 Jun 2017, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, p. 1167-1170 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)

Selective SiO2 etching in three dimensional structures using parylene-C as mask

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 380.

Research output: Contribution to conferenceAbstract

Open Access
File
90 Downloads (Pure)

SU-8 micro Coriolis mass flow sensor

Monge, R., Groenesteijn, J., Alveringh, D., Wiegerink, R. J., Lötters, J. C. & Fernandez, L. J., 31 Mar 2017, In : Sensors and actuators. B: Chemical. 241, p. 744-749 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

Universal modular fluidic and electronic interfacing platform for microfluidic devices

Alveringh, D., Sanders, R. G. P., Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017. p. 106-109 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
141 Downloads (Pure)
2016

A 2D acoustic particle velocity sensor with perfectly orthogonal sensitivity directions

Pjetri, O., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 1 Aug 2016, In : Sensors and actuators. A: Physical. 246, p. 28-34 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)
1 Downloads (Pure)

A 2D particle velocity sensor with minimal flow disturbance

Pjetri, O., Wiegerink, R. J. & Krijnen, G. J. M., 18 May 2016, In : IEEE sensors journal. 16, 24, p. 8706-8714 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)

Editorial

Wiegerink, R., Staufer, U. & Tsoukalas, D., 1 Jan 2016, In : Microelectronic engineering. 159, p. A1

Research output: Contribution to journalEditorialAcademicpeer-review

Fluid flow device, comprising a valve unit, as well as method of manufacturing the same

Lötters, J. C., Groen, M., Wiegerink, R. J., Brouwer, D. M., Brookhuis, R. A. & Meutstege, E., 9 May 2016, (Submitted) Patent No. WO2016182437

Research output: Patent

File
17 Downloads (Pure)

Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning

Alveringh, D., Tsoukalas, D. (ed.), Wiegerink, R. J. (ed.), Groenesteijn, J., Staufer, U. (ed.) & Lötters, J. C., 15 Jun 2016, In : Microelectronic engineering. 159, p. 1-5 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
4 Citations (Scopus)
86 Downloads (Pure)

Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve

Groenesteijn, J., Alveringh, D., Groen, M., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 788-791 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
1 Downloads (Pure)

Three-axis force-torque sensor with fully differential capacitive readout

Brookhuis, R. A., Sanders, R. G. P., Sikkens, B. N. A. & Wiegerink, R. J., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. Piscataway, NJ, USA: IEEE, p. 885-888 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

7 Citations (Scopus)
1 Downloads (Pure)

Towards nanogram per second Coriolis mass flow sensing

Groenesteijn, J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 193-196 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

6 Citations (Scopus)
1 Downloads (Pure)

Vortex generation and sensing in microfabricated surface channels

Alveringh, D., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. Shanghai: IEEE, p. 812-815 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

1 Citation (Scopus)
2015

A 2D particle velocity sensor with minimal flow-disturbance

Pjetri, O., Wiegerink, R. J. & Krijnen, G. J. M., 1 Nov 2015, Proceedings IEEE Sensors 2015. Piscataway: IEEE, p. 1307-1310 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
38 Downloads (Pure)

A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning

Alveringh, D., Groenesteijn, J., Ma, K., Wiegerink, R. J. & Lötters, J. C., 21 Sep 2015, 41st International Conference on Micro- and Nano-Engineering, MNE 2015. The Hague: MNE 2015, p. - 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
14 Downloads (Pure)