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  • Fred Bijkerk
2020

A semi-Analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence

Nikolaev, K. V., Soltwisch, V., Honicke, P., Scholze, F., De La Rie, J., Yakunin, S. N., Makhotkin, I. A., Van De Kruijs, R. W. E. & Bijkerk, F., 1 Mar 2020, In : Journal of synchrotron radiation. 27, p. 386-395 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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1 Citation (Scopus)
7 Downloads (Pure)

Etching processes of transferred and non-transferred multi-layer graphene in the presence of extreme UV, H2O and H2

Mund, B. K., Sturm, J. M., van den Beld, W. T. E., Lee, C. J. & Bijkerk, F., 28 Feb 2020, In : Applied surface science. 504, 144485.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
8 Downloads (Pure)

Hydrogen diffusion through Ru thin films

Soroka, O., Sturm, J. M., Lee, C. J., Schreuders, H., Dam, B. & Bijkerk, F., 26 May 2020, In : International journal of hydrogen energy. 45, 29, p. 15003-15010 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
15 Downloads (Pure)

Reflective aperiodic multilayer filters for metrology at XUV sources

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 3 Feb 2020, In : Optics express. 28, 3, p. 3331-3351 21 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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14 Downloads (Pure)

Similarity in ruthenium damage induced by photons with different energies: From visible light to hard X-rays

Milov, I., Lipp, V., Ilnitsky, D., Medvedev, N., Migdal, K., Zhakhovsky, V., Khokhlov, V., Petrov, Y., Inogamov, N., Semin, S., Kimel, A., Ziaja, B., Makhotkin, I. A., Louis, E. & Bijkerk, F., 31 Jan 2020, In : Applied surface science. 501, 143973.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Citation (Scopus)
14 Downloads (Pure)
Open Access
File
1 Citation (Scopus)
10 Downloads (Pure)

The role of pinhole structures in Mo thin films on multi-layer graphene synthesis

Kizir, S., van den Beld, W., Schurink, B., van de Kruijs, R. W. E., Benschop, J. P. H. & Bijkerk, F., 12 Mar 2020, In : Journal of Physics : Materials. 3, 2, 9 p., 025004.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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13 Downloads (Pure)

W/B short period multilayer structures for soft x-rays

Medvedev, R., Zameshin, A., Sturm, J. M., Yakshin, A. & Bijkerk, F., 1 Apr 2020, In : AIP advances. 10, 4, 8 p., 045305.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
6 Downloads (Pure)
2019

Adaptive piezoelectric optics for XUV wavelengths

Bayraktar, M., Lucke, P., Nematollahi, M., Yakshin, A., Louis, E., Rijnders, A. J. H. M. & Bijkerk, F., 13 Jun 2019.

Research output: Contribution to conferencePoster

Open Access

Angular and spectral bandwidth of Extreme UV multilayers near spacer material absorption edges

Zameshin, A., Yakshin, A., Chandrasekaran, A. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 602-608 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
128 Downloads (Pure)
Open Access
File
10 Downloads (Pure)

Comparison of hydrogen transport through thin metal, Si and oxide layers

Soroka, O., Sturm, J. M. & Bijkerk, F., 21 Jan 2019.

Research output: Contribution to conferencePoster

Open Access
File
8 Downloads (Pure)
Open Access
File
8 Downloads (Pure)

EUV full-band spectrum and DUV/EUV ratio dependency on source operating conditions

Liu, F., Bayraktar, M., Lim, J-K., Bijkerk, F., Havermans, P. & Claes, B., 20 Jun 2019.

Research output: Contribution to conferencePoster

Extreme UV secondary electron yield measurements of Ru, Sn, and Hf oxide thin films

Sturm, J. M., Liu, F., Darlatt, E., Kolbe, M., Aarnink, A. A. I., Lee, C. J. & Bijkerk, F., 1 Jul 2019, In : Journal of Micro/ Nanolithography, MEMS, and MOEMS. 18, 3, 033501.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
128 Downloads (Pure)

Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength

Kuznetsov, D., Yakshin, A., Sturm, J. M. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 585-592 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
21 Downloads (Pure)

Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers

Nikolaev, K. V., Yakunin, S. N., Makhotkin, I. A., de la Rie, J., Medvedev, R. V., Rogachev, A. V., Trunckin, I. N., Vasiliev, A. L., Hendrikx, C. P., Gateshki, M., van de Kruijs, R. W. E. & Bijkerk, F., Mar 2019, In : Acta Crystallographica Section A: Foundations and Advances. 75, p. 342-351 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Citation (Scopus)
30 Downloads (Pure)

Hydrogenation dynamics of Ru capped y thin films

Soroka, O., Sturm, J. M., Van De Kruijs, R. W. E., Makhotkin, I. A., Nikolaev, K., Yakunin, S. N., Lee, C. J. & Bijkerk, F., 8 Oct 2019, In : Journal of Applied Physics. 126, 14, 145301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
1 Citation (Scopus)
Open Access
File
7 Downloads (Pure)

In-situ studies of silicide formation during growth of molybdenum-silicon interfaces

Reinink, J., Zameshin, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Oct 2019, In : Journal of Applied Physics. 126, 13, 135304.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
22 Downloads (Pure)

Low-energy ion polishing of Si in W/Si soft X-ray multilayer structures

Medvedev, R. V., Nikolaev, K. V., Zameshin, A. A., Ijpes, D., Makhotkin, I. A., Yakunin, S. N., Yakshin, A. E. & Bijkerk, F., 28 Jul 2019, In : Journal of Applied Physics. 126, 4, 045302.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2 Citations (Scopus)
13 Downloads (Pure)
Open Access
File
2 Downloads (Pure)

Mirror, in particular for a microlithographic projection exposure system

Wylie-Van Eerd, B., Bijkerk, F., Hild, K., Gruner, T., Schulte, S. & Weyler, S., 14 Feb 2019, IPC No. G21K 1/ 06 A I, Patent No. WO2019029990, Priority date 9 Aug 2017, Priority No. DE201710213900

Research output: Patent

Multilayer filter using the borrmann effect for euv source monitoring

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 1 Jan 2019, Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015. Optical Society of America

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Multiscale modeling of damage processes in Ru thin films induced by femtosecond laser pulses

Milov, I., Lipp, V., Ilnitsky, D., Medvedev, N., Migdal, K., Zhakhovsky, V., Khokhlov, V., Petrov, Y., Inogamov, N., Ziaja, B., Medvedev, V., Makhotkin, I. A., Louis, E. & Bijkerk, F., 30 Oct 2019.

Research output: Contribution to conferencePoster

Multiscale modeling of damage processes in Ru thin films induced by femtosecond laser pulses

Milov, I., Lipp, V., Ilnitsky, D., Medvedev, N., Migdal, K., Zhakhovsky, V., Khokhlov, V., Petrov, Y., Inogamov, N., Ziaja, B., Medvedev, V., Makhotkin, I. A., Louis, E. & Bijkerk, F., 30 Sep 2019.

Research output: Contribution to conferencePoster

Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

Nematollahi, M., Lucke, P., Bayraktar, M., Yakshin, A., Rijnders, A. J. H. M. & Bijkerk, F., 15 Oct 2019, In : Optics letters. 44, 20, p. 5104-5107 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
34 Downloads (Pure)

Nanoscale Transition Metal Thin Films: Growth Characteristics and Scaling Law for Interlayer Formation

Chandrasekaran, A., van de Kruijs, R. W. E., Sturm, J. M., Zameshin, A. & Bijkerk, F., 11 Dec 2019, In : ACS applied materials & interfaces. 11, 49, p. 46311−46326 16 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Citation (Scopus)
17 Downloads (Pure)
Open Access
File
2 Citations (Scopus)
131 Downloads (Pure)

Oxidation of metal thin films by atomic oxygen: A low energy ion scattering study

Stilhano Vilas Boas, C. R., Sturm, J. M. & Bijkerk, F., 21 Oct 2019, In : Journal of Applied Physics. 126, 15, 7 p., 155301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Citation (Scopus)
44 Downloads (Pure)
Open Access
File
6 Downloads (Pure)
Open Access
File
2 Downloads (Pure)

Spectral investigation of Sn laser-produced plasmas in the extreme ultraviolet range

Bouza, Z., Scheers, J., Sheil, J., Schupp, R., Torretti, F., Bayraktar, M., Bijkerk, F., Shah, C., Bekker, H., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R. & Versolato, O., 8 Oct 2019.

Research output: Contribution to conferencePoster

Spectral Unraveling of EUV Lithography Light Sources

Bouza, Z., Scheers, J., Sheil, J., Schupp, R., Bayraktar, M., Bijkerk, F., Shah, C., Bekker, H., Ubachs, W., Hoekstra, R. & Versolato, O., 10 May 2019.

Research output: Contribution to conferencePoster

2018

Advancing X-ray standing wave data analysis

Makhotkin, I. A., Yakunin, S. N., Hendrikx, C. P., Chandrasekaran, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Nov 2018.

Research output: Contribution to conferencePoster

File
20 Downloads (Pure)

Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 1 Jan 2018, In : Applied surface science. 427, Part B, p. 1033-1040 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2 Citations (Scopus)
21 Downloads (Pure)

Broadband spectrometer development based on high-density free-standing transmission gratings

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 31 Jan 2018.

Research output: Contribution to conferencePoster

Comprehensive studies of single-shot damage of Ru thin films induced by EUV FEL fs pulses

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., Lipp, V., Ziaja, B., Khokhlov, V., Zhakhovsky, V., Petrov, Y., Shepelev, V., Ilnitsky, D., Migdal, K., Inogamov, N., Medvedev, V., Louis, E. & Bijkerk, F., 25 Jan 2018.

Research output: Contribution to conferencePoster

Comprehensive studies of single-shot damage of Ru thin films induced by EUV FEL fs pulses

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., Lipp, V., Ziaja, B., Khokhlov, V., Zhakhovsky, V., Petrov, Y., Shepelev, V., Ilnitsky, D., Migdal, K., Inogamov, N., Medvedev, V., Louis, E. & Bijkerk, F., 23 Jan 2018.

Research output: Contribution to conferencePoster

Control of YH3 formation and stability via hydrogen surface adsorption and desorption

Soroka, O., Sturm, J. M., van de Kruijs, R. W. E., Lee, C. J. & Bijkerk, F., 15 Oct 2018, In : Applied surface science. 455, p. 70-74 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
4 Citations (Scopus)
23 Downloads (Pure)

Damage processes in thin Ru films induced by single and multiple ultra-short XUV pulses

Makhotkin, I. A., Milov, I., Sobierajski, R., Medvedev, N., Lipp, V., Ziaja, B., Khokhlov, V., Zhakhovsky, V., Petrov, Y., Shepelev, V., Ilnitsky, D., Migdal, K., Inogamov, N., Medvedev, V., Louis, E. & Bijkerk, F., 17 Sep 2018.

Research output: Contribution to conferencePoster

Double matrix effect in Low Energy Ion Scattering from La surfaces

Zameshin, A. A., Yakshin, A. E., Sturm, J. M., Brongerma, H. H. & Bijkerk, F., 15 May 2018, In : Applied surface science. 440, p. 570-579 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
4 Citations (Scopus)
27 Downloads (Pure)