A µsensor array in a fluidic system for space applications

Vincent Spiering; Piet Bergveld; Miko Elwenspoek; Albert van den Berg

A µsensor array in a fluidic system for space applications

Vincent Spiering, Piet Bergveld, Miko Elwenspoek, Albert van den Berg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

The development of a hybrid integration method for a multi μsensor array unit in a fluid channel on a breadboard is presented. The method is illustrated by means of the fabrication of a demonstrator micro fluid analysis system, also called a Micro Total Analysis System (μTAS), containing a pressure-, temperature-, pH-, pO₂ and pCO₂-sensor. This system is designed for a multi-user and multi-purpose application in life science, biotechnology research, and life support systems according to the technical requirements for space.

Original language	English
Title of host publication	1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands
Subtitle of host publication	proceedings
Place of Publication	Delft, Netherlands
Publisher	Delft University Press
Pages	143-146
Number of pages	4
ISBN (Print)	90-407-1321-9
Publication status	Published - 20 Mar 1996
Event	1996 National Sensor Conference - Delft, The Netherlands, Delft, Netherlands Duration: 20 Mar 1996 → 21 Mar 1996

Conference

Conference	1996 National Sensor Conference
Country/Territory	Netherlands
City	Delft
Period	20/03/96 → 21/03/96
Other	March 20-21, 1996

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Spiering1996usensorFinal published version, 292 KB

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@inproceedings{6c15bb1fad7243e3b37de6f47f929175,

title = "A µsensor array in a fluidic system for space applications",

abstract = "The development of a hybrid integration method for a multi μsensor array unit in a fluid channel on a breadboard is presented. The method is illustrated by means of the fabrication of a demonstrator micro fluid analysis system, also called a Micro Total Analysis System (μTAS), containing a pressure-, temperature-, pH-, pO2 and pCO2-sensor. This system is designed for a multi-user and multi-purpose application in life science, biotechnology research, and life support systems according to the technical requirements for space.",

author = "Vincent Spiering and Piet Bergveld and Miko Elwenspoek and {van den Berg}, Albert",

year = "1996",

month = mar,

day = "20",

language = "English",

isbn = "90-407-1321-9",

pages = "143--146",

booktitle = "1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands",

publisher = "Delft University Press",

note = "1996 National Sensor Conference ; Conference date: 20-03-1996 Through 21-03-1996",

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A µsensor array in a fluidic system for space applications. / Spiering, Vincent; Bergveld, Piet; Elwenspoek, Miko et al.
1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands: proceedings. Delft, Netherlands: Delft University Press, 1996. p. 143-146.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A µsensor array in a fluidic system for space applications

AU - Spiering, Vincent

AU - Bergveld, Piet

AU - Elwenspoek, Miko

AU - van den Berg, Albert

PY - 1996/3/20

Y1 - 1996/3/20

N2 - The development of a hybrid integration method for a multi μsensor array unit in a fluid channel on a breadboard is presented. The method is illustrated by means of the fabrication of a demonstrator micro fluid analysis system, also called a Micro Total Analysis System (μTAS), containing a pressure-, temperature-, pH-, pO2 and pCO2-sensor. This system is designed for a multi-user and multi-purpose application in life science, biotechnology research, and life support systems according to the technical requirements for space.

AB - The development of a hybrid integration method for a multi μsensor array unit in a fluid channel on a breadboard is presented. The method is illustrated by means of the fabrication of a demonstrator micro fluid analysis system, also called a Micro Total Analysis System (μTAS), containing a pressure-, temperature-, pH-, pO2 and pCO2-sensor. This system is designed for a multi-user and multi-purpose application in life science, biotechnology research, and life support systems according to the technical requirements for space.

M3 - Conference contribution

SN - 90-407-1321-9

SP - 143

EP - 146

BT - 1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands

PB - Delft University Press

CY - Delft, Netherlands

T2 - 1996 National Sensor Conference

Y2 - 20 March 1996 through 21 March 1996

ER -

A µsensor array in a fluidic system for space applications

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