A µsensor array in a fluidic system for space applications

Vincent Spiering, Piet Bergveld, Miko Elwenspoek, Albert van den Berg

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    The development of a hybrid integration method for a multi μsensor array unit in a fluid channel on a breadboard is presented. The method is illustrated by means of the fabrication of a demonstrator micro fluid analysis system, also called a Micro Total Analysis System (μTAS), containing a pressure-, temperature-, pH-, pO2 and pCO2-sensor. This system is designed for a multi-user and multi-purpose application in life science, biotechnology research, and life support systems according to the technical requirements for space.
    Original languageEnglish
    Title of host publication1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands
    Subtitle of host publicationproceedings
    Place of PublicationDelft, Netherlands
    PublisherDelft University Press
    Number of pages4
    ISBN (Print)90-407-1321-9
    Publication statusPublished - 20 Mar 1996
    Event1996 National Sensor Conference - Delft, The Netherlands, Delft, Netherlands
    Duration: 20 Mar 199621 Mar 1996


    Conference1996 National Sensor Conference
    OtherMarch 20-21, 1996


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