A 2-DOF Large Stroke Flexure Based Positioning Mechanism

K.G.P. Folkersma, S.E. Boer, D.M. Brouwer, J.L. Herder, H.M.J.R. Soemers

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

8 Citations (Scopus)
25 Downloads (Pure)

Abstract

Flexure based stages are particularly important for vacuum applications because they combine low hysteresis, no wear and no contamination with a high supporting stiffness. However, flexure hinges inherently lose stiffness in supporting directions when deflected. Therefore the workspace to footprint ratio is limited. In this article we present the design and modeling of a two degrees of freedom cross flexure based stage that combines a large workspace to footprint ratio with high vibration mode frequencies. Because the mechanism is an assembly of optimized components, the stage is designed according to the exact constraint principle to avoid build-up of internal stresses due to misalignment. FEM results have been validated by measurements on an experimental test setup. The test setup has a workspace-area to footprint ratio of 1/32. The lowest measured natural frequency with locked actuators over a 60 × 60mm workspace was 80Hz.
Original languageEnglish
Title of host publicationASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
Subtitle of host publicationVolume 4: 36th Mechanisms and Robotics Conference, Parts A and B
Place of PublicationChicago, IL
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages221-228
ISBN (Print)978-0-7918-4503-5
DOIs
Publication statusPublished - 12 Aug 2012
Event36th Mechanisms and Robotics Conference, MECH 2012 - Chicago, United States
Duration: 12 Aug 201215 Aug 2012
Conference number: 36

Conference

Conference36th Mechanisms and Robotics Conference, MECH 2012
Abbreviated titleMECH
CountryUnited States
CityChicago
Period12/08/1215/08/12
Otherheld as part of the 2012 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference (IDETC/CIE)

Keywords

  • METIS-288631
  • IR-81951

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    Folkersma, K. G. P., Boer, S. E., Brouwer, D. M., Herder, J. L., & Soemers, H. M. J. R. (2012). A 2-DOF Large Stroke Flexure Based Positioning Mechanism. In ASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference: Volume 4: 36th Mechanisms and Robotics Conference, Parts A and B (pp. 221-228). Chicago, IL: American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DETC2012-70377