A 2D particle velocity sensor with minimal flow disturbance

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    Abstract

    A 2D sound particle velocity sensor, consisting of a cross of two connected, heated wires is presented. We developed a fabrication process by which the wires become freely suspended 350 micrometer above the chip surface. This largely eliminates the influence of boundary layer effects and increases the temperature gradient along the wires, both due to the large distance to the silicon substrate. As a result, the sensor has increased sensitivity and reduced power consumption compared with an earlier design. Furthermore, due to the fully symmetrical structure of the sensor, the sensitive directions are exactly orthogonal to each other and have near identical sensitivity, thus requiring no individual calibration.
    Original languageUndefined
    Pages (from-to)8706-8714
    Number of pages9
    JournalIEEE sensors journal
    Volume16
    Issue number24
    DOIs
    Publication statusPublished - 18 May 2016

    Keywords

    • EWI-27727
    • Sensor
    • Particle velocity
    • IR-103460
    • heated wire
    • METIS-321714
    • orthogonal

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