A 2D particle velocity sensor with minimal flow disturbance

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Abstract

A 2D sound particle velocity sensor, consisting of a cross of two connected, heated wires is presented. We developed a fabrication process by which the wires become freely suspended 350 micrometer above the chip surface. This largely eliminates the influence of boundary layer effects and increases the temperature gradient along the wires, both due to the large distance to the silicon substrate. As a result, the sensor has increased sensitivity and reduced power consumption compared with an earlier design. Furthermore, due to the fully symmetrical structure of the sensor, the sensitive directions are exactly orthogonal to each other and have near identical sensitivity, thus requiring no individual calibration.
Original languageUndefined
Pages (from-to)8706-8714
Number of pages9
JournalIEEE sensors journal
Volume16
Issue number24
DOIs
Publication statusPublished - 18 May 2016

Keywords

  • EWI-27727
  • Sensor
  • Particle velocity
  • IR-103460
  • heated wire
  • METIS-321714
  • orthogonal

Cite this

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title = "A 2D particle velocity sensor with minimal flow disturbance",
abstract = "A 2D sound particle velocity sensor, consisting of a cross of two connected, heated wires is presented. We developed a fabrication process by which the wires become freely suspended 350 micrometer above the chip surface. This largely eliminates the influence of boundary layer effects and increases the temperature gradient along the wires, both due to the large distance to the silicon substrate. As a result, the sensor has increased sensitivity and reduced power consumption compared with an earlier design. Furthermore, due to the fully symmetrical structure of the sensor, the sensitive directions are exactly orthogonal to each other and have near identical sensitivity, thus requiring no individual calibration.",
keywords = "EWI-27727, Sensor, Particle velocity, IR-103460, heated wire, METIS-321714, orthogonal",
author = "O. Pjetri and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.}",
note = "10.1109/JSEN.2016.2570213",
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A 2D particle velocity sensor with minimal flow disturbance. / Pjetri, O.; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M.

In: IEEE sensors journal, Vol. 16, No. 24, 18.05.2016, p. 8706-8714.

Research output: Contribution to journalArticleAcademicpeer-review

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T1 - A 2D particle velocity sensor with minimal flow disturbance

AU - Pjetri, O.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

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PY - 2016/5/18

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N2 - A 2D sound particle velocity sensor, consisting of a cross of two connected, heated wires is presented. We developed a fabrication process by which the wires become freely suspended 350 micrometer above the chip surface. This largely eliminates the influence of boundary layer effects and increases the temperature gradient along the wires, both due to the large distance to the silicon substrate. As a result, the sensor has increased sensitivity and reduced power consumption compared with an earlier design. Furthermore, due to the fully symmetrical structure of the sensor, the sensitive directions are exactly orthogonal to each other and have near identical sensitivity, thus requiring no individual calibration.

AB - A 2D sound particle velocity sensor, consisting of a cross of two connected, heated wires is presented. We developed a fabrication process by which the wires become freely suspended 350 micrometer above the chip surface. This largely eliminates the influence of boundary layer effects and increases the temperature gradient along the wires, both due to the large distance to the silicon substrate. As a result, the sensor has increased sensitivity and reduced power consumption compared with an earlier design. Furthermore, due to the fully symmetrical structure of the sensor, the sensitive directions are exactly orthogonal to each other and have near identical sensitivity, thus requiring no individual calibration.

KW - EWI-27727

KW - Sensor

KW - Particle velocity

KW - IR-103460

KW - heated wire

KW - METIS-321714

KW - orthogonal

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DO - 10.1109/JSEN.2016.2570213

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