A 2D particle velocity sensor with minimal flow-disturbance

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    Abstract

    A 2D sound particle velocity sensor, consisting of a cross of two connected, heated wires is presented. We developed a fabrication process by which the wires become freely suspended 350 μm above the chip surface. This largely eliminates the influence of boundary layer effects and increases the temperature gradient along the wires, both due to the large distance to the silicon substrate. As a result, the sensor has increased sensitivity and reduced power consumption compared to an earlier design [1]. Furthermore, due to the fully symmetrical structure of the sensor the sensitive directions are exactly orthogonal to each other and have near identical sensitivity, thus requiring no individual calibration.
    Original languageUndefined
    Title of host publicationProceedings IEEE Sensors 2015
    Place of PublicationPiscataway
    PublisherIEEE
    Pages1307-1310
    Number of pages4
    ISBN (Print)978-1-4799-8203-5
    DOIs
    Publication statusPublished - 1 Nov 2015
    Event2015 IEEE Sensors - Busan Exhibition and Convention Center, Busan, Korea, Republic of
    Duration: 1 Nov 20154 Nov 2015

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference2015 IEEE Sensors
    CountryKorea, Republic of
    CityBusan
    Period1/11/154/11/15

    Keywords

    • EWI-26761
    • IR-99322
    • METIS-315574
    • TST-Life like

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