A 3x1 integrated pyroelectric sensor based on VDF/TrFE copolymer

D. Setiadi, D. Setiadi, P.M. Sarro, Paulus P.L. Regtien

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Abstract

This paper presents an integrated pyroelectric sensor based on a vinylidene fluoride¿trifluoroethylene (VDF/TrFE) copolymer. A silicon substrate that contains field-effect transistor (FET) readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology. An array of 3 × 1 integrated pyroelectric sensor has been realized. The current and voltage sensitivities and noise of this sensor have been measured. Voltage noise decreases with increasing frequency, and it is at 100 kHz.
Original languageUndefined
Pages (from-to)103-109
Number of pages7
JournalSensors and actuators. A: Physical
Volume52
Issue number1-3
DOIs
Publication statusPublished - 1996

Keywords

  • METIS-111735
  • IR-14682

Cite this

Setiadi, D. ; Setiadi, D. ; Sarro, P.M. ; Regtien, Paulus P.L. / A 3x1 integrated pyroelectric sensor based on VDF/TrFE copolymer. In: Sensors and actuators. A: Physical. 1996 ; Vol. 52, No. 1-3. pp. 103-109.
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A 3x1 integrated pyroelectric sensor based on VDF/TrFE copolymer. / Setiadi, D.; Setiadi, D.; Sarro, P.M.; Regtien, Paulus P.L.

In: Sensors and actuators. A: Physical, Vol. 52, No. 1-3, 1996, p. 103-109.

Research output: Contribution to journalArticleAcademicpeer-review

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T1 - A 3x1 integrated pyroelectric sensor based on VDF/TrFE copolymer

AU - Setiadi, D.

AU - Setiadi, D.

AU - Sarro, P.M.

AU - Regtien, Paulus P.L.

PY - 1996

Y1 - 1996

N2 - This paper presents an integrated pyroelectric sensor based on a vinylidene fluoride¿trifluoroethylene (VDF/TrFE) copolymer. A silicon substrate that contains field-effect transistor (FET) readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology. An array of 3 × 1 integrated pyroelectric sensor has been realized. The current and voltage sensitivities and noise of this sensor have been measured. Voltage noise decreases with increasing frequency, and it is at 100 kHz.

AB - This paper presents an integrated pyroelectric sensor based on a vinylidene fluoride¿trifluoroethylene (VDF/TrFE) copolymer. A silicon substrate that contains field-effect transistor (FET) readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology. An array of 3 × 1 integrated pyroelectric sensor has been realized. The current and voltage sensitivities and noise of this sensor have been measured. Voltage noise decreases with increasing frequency, and it is at 100 kHz.

KW - METIS-111735

KW - IR-14682

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DO - 10.1016/0924-4247(96)80133-6

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JO - Sensors and actuators. A: Physical

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