@article{a9a5c303d32d40498e7430e1b3227558,
title = "A 4th-order band-pass filter using differential readout of two in-phase actuated contour-mode resonators",
abstract = "A 4th-order band-pass filter (BPF) based on the subtraction of two 2nd-order contour-mode Lamb-wave resonators is presented. The resonators have slightly different resonance frequencies around 380 MHz. Each resonator consists of a 500 nm pulsed-laser deposited lead zirconate titanate (PZT) thin-film on top of a 3 μm silicon (PZT-on-Si). The resonators are actuated in-phase, and their outputs are subtracted. Utilizing this technique, the feed-through signals are eliminated while the outputs of the resonators are added up constructively, due to the phase difference between the two output signals. The BPF is presented using 50 Ω termination with a bandwidth of approximately 3.9 MHz and 43 dB stopband rejection. This technique provides further opportunities for MEMS filter design in addition to existing methods, i.e., mechanical and/or electrical coupling. It also resolves the design issue associated with high feed-through when exploiting piezoelectric materials with high-dielectric constant like PZT.",
keywords = "TST-ACTUATORS, EWI-23875, Band-pass filter, High frequency, IR-87577, Resonator, PZT, METIS-300110, RF MEMS",
author = "H. Yagubizade and M. Darvishi and Elwenspoek, \{Michael Curt\} and Tas, \{Niels Roelof\}",
note = "eemcs-eprint-23875 ",
year = "2013",
month = oct,
day = "24",
doi = "10.1063/1.4826944",
language = "English",
volume = "103",
pages = "173517",
journal = "Applied physics letters",
issn = "0003-6951",
publisher = "American Institute of Physics",
number = "17",
}