A bio-inspired hair- based acceleration sensor

H. Droogendijk

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    Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a one-axis biomimetic accelerometer has been developed and fabricated using surface micromachining and SU- 8 lithography. Measu- rements show that this MEMS hair-based accelerometer has a resonance frequency of 320 Hz, a detection threshold of 0.10 m/s2 and a dynamic range of more than 35 dB. The accelerometer exhibits a clear directional response to external accelerations.
    Original languageUndefined
    Pages (from-to)22-25
    Number of pages4
    Issue number4
    Publication statusPublished - Sep 2014


    • EWI-25707
    • IR-94193
    • METIS-309886
    • TST-Life like

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