Abstract
Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a one-axis biomimetic accelerometer has been developed and fabricated using surface micromachining and SU- 8 lithography. Measu- rements show that this MEMS hair-based accelerometer has a resonance frequency of 320 Hz, a detection threshold of 0.10 m/s2 and a dynamic range of more than 35 dB. The accelerometer exhibits a clear directional response to external accelerations.
| Original language | Undefined |
|---|---|
| Pages (from-to) | 22-25 |
| Number of pages | 4 |
| Journal | Vonk |
| Volume | 32 |
| Issue number | 4 |
| Publication status | Published - Sep 2014 |
Keywords
- EWI-25707
- IR-94193
- METIS-309886
- TST-Life like