Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a one-axis biomimetic accelerometer has been developed and fabricated using surface micromachining and SU- 8 lithography. Measu- rements show that this MEMS hair-based accelerometer has a resonance frequency of 320 Hz, a detection threshold of 0.10 m/s2 and a dynamic range of more than 35 dB. The accelerometer exhibits a clear directional response to external accelerations.
|Number of pages||4|
|Publication status||Published - Sep 2014|
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