A capacitive differential pressure sensor with CMOS process compatibility

M. Pedersen, M.G.H. Meijerink, Wouter Olthuis, Piet Bergveld

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	MME '96 Micromechanics Europe
Place of Publication	Barcelona, Spain
Pages	271-274
Publication status	Published - 21 Oct 1996
Event	7th MicroMechanics Europe Workshop, MME 1996 - Barcelona, Spain Duration: 21 Oct 1996 → 22 Oct 1996 Conference number: 7

Other	7th MicroMechanics Europe Workshop, MME 1996
Abbreviated title	MME
Country/Territory	Spain
City	Barcelona
Period	21/10/96 → 22/10/96

Cite this

@inproceedings{6ae12ccd035c4742ac340bb6e374171f,

title = "A capacitive differential pressure sensor with CMOS process compatibility",

author = "M. Pedersen and M.G.H. Meijerink and Wouter Olthuis and Piet Bergveld",

year = "1996",

month = oct,

day = "21",

language = "English",

pages = "271--274",

booktitle = "MME '96 Micromechanics Europe",

note = "7th MicroMechanics Europe Workshop, MME 1996, MME ; Conference date: 21-10-1996 Through 22-10-1996",

}

TY - GEN

T1 - A capacitive differential pressure sensor with CMOS process compatibility

AU - Pedersen, M.

AU - Meijerink, M.G.H.

AU - Olthuis, Wouter

AU - Bergveld, Piet

N1 - Conference code: 7

PY - 1996/10/21

Y1 - 1996/10/21

M3 - Conference contribution

SP - 271

EP - 274

BT - MME '96 Micromechanics Europe

CY - Barcelona, Spain

T2 - 7th MicroMechanics Europe Workshop, MME 1996

Y2 - 21 October 1996 through 22 October 1996

ER -