A capacitive differential pressure sensor with CMOS process compatibility

M. Pedersen, M.G.H. Meijerink, Wouter Olthuis, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationMME '96 Micromechanics Europe
    Place of PublicationBarcelona, Spain
    Pages271-274
    Publication statusPublished - 21 Oct 1996
    Event7th MicroMechanics Europe Workshop, MME 1996 - Barcelona, Spain
    Duration: 21 Oct 199622 Oct 1996
    Conference number: 7

    Other

    Other7th MicroMechanics Europe Workshop, MME 1996
    Abbreviated titleMME
    CountrySpain
    CityBarcelona
    Period21/10/9622/10/96

    Cite this