Abstract
A capacitive differential pressure sensor has been developed. The process used for the fabrication of the sensor is IC-compatible, meaning that the device can potentially be monolithically integrated on one chip with a suitable signal conditioning circuit. A sensor for a differential pressure range of ±1bar was fabricated and tested with a frequency modulated detection circuit, and good agreement was found with the theoretical model of the sensor. A nominal sensitivity ΔC/C of 18% has been measured for a positive differential pressure of 1 bar.
Original language | English |
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Pages (from-to) | 250-252 |
Journal | Journal of micromechanics and microengineering |
Volume | 7 |
Issue number | 3 |
DOIs | |
Publication status | Published - 1997 |
Keywords
- METIS-111962