A capacitive differential pressure sensor with polyimide diaphragm

M. Pedersen, M.G.H. Meijerink, W. Olthuis, P. Bergveld

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    22 Citations (Scopus)
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    A capacitive differential pressure sensor has been developed. The process used for the fabrication of the sensor is IC-compatible, meaning that the device can potentially be monolithically integrated on one chip with a suitable signal conditioning circuit. A sensor for a differential pressure range of ±1bar was fabricated and tested with a frequency modulated detection circuit, and good agreement was found with the theoretical model of the sensor. A nominal sensitivity ΔC/C of 18% has been measured for a positive differential pressure of 1 bar.
    Original languageEnglish
    Pages (from-to)250-252
    JournalJournal of micromechanics and microengineering
    Issue number3
    Publication statusPublished - 1997


    • METIS-111962


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