A capacitive differential pressure sensor with polyimide diaphragm

M. Pedersen; M.G.H. Meijerink; W. Olthuis; P. Bergveld

doi:10.1088/0960-1317/7/3/046

A capacitive differential pressure sensor with polyimide diaphragm

M. Pedersen, M.G.H. Meijerink, W. Olthuis, P. Bergveld

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Abstract

A capacitive differential pressure sensor has been developed. The process used for the fabrication of the sensor is IC-compatible, meaning that the device can potentially be monolithically integrated on one chip with a suitable signal conditioning circuit. A sensor for a differential pressure range of ±1_bar was fabricated and tested with a frequency modulated detection circuit, and good agreement was found with the theoretical model of the sensor. A nominal sensitivity ΔC/C of 18% has been measured for a positive differential pressure of 1 bar.

Original language	English
Pages (from-to)	250-252
Journal	Journal of micromechanics and microengineering
Volume	7
Issue number	3
DOIs	https://doi.org/10.1088/0960-1317/7/3/046
Publication status	Published - 1997

Keywords

METIS-111962

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Pedersen1997capacitiveFinal published version, 206 KB

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abstract = "A capacitive differential pressure sensor has been developed. The process used for the fabrication of the sensor is IC-compatible, meaning that the device can potentially be monolithically integrated on one chip with a suitable signal conditioning circuit. A sensor for a differential pressure range of ±1bar was fabricated and tested with a frequency modulated detection circuit, and good agreement was found with the theoretical model of the sensor. A nominal sensitivity ΔC/C of 18% has been measured for a positive differential pressure of 1 bar.",

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A capacitive differential pressure sensor with polyimide diaphragm

Abstract

Keywords

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