A capacitive differential pressure sensor has been developed. The process used for the fabrication of the sensor is IC-compatible, meaning that the device can potentially be monolithically integrated on one chip with a suitable signal conditioning circuit. A sensor for a differential pressure range of ±1bar was fabricated and tested with a frequency modulated detection circuit, and good agreement was found with the theoretical model of the sensor. A nominal sensitivity ΔC/C of 18% has been measured for a positive differential pressure of 1 bar.
Pedersen, M., Meijerink, M. G. H., Olthuis, W., & Bergveld, P. (1997). A capacitive differential pressure sensor with polyimide diaphragm. Journal of micromechanics and microengineering, 7(3), 250-252. https://doi.org/10.1088/0960-1317/7/3/046