A capacitive microphone with polysilicon membranes

A. Torkkeli, J. Saarilahti, H. Seppa, H. Sipola, O. Rusanen, J. Hietanen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Keywords

@inproceedings{041dde0d60184329ae96017ba6ea6d51,

title = "A capacitive microphone with polysilicon membranes",

keywords = "METIS-113792",

author = "A. Torkkeli and J. Saarilahti and H. Seppa and H. Sipola and O. Rusanen and J. Hietanen",

year = "1999",

month = sep,

day = "12",

language = "Undefined",

pages = "57--60",

booktitle = "Eurosensors XIII",

}