A capacitive microphone with polysilicon membranes

A. Torkkeli, J. Saarilahti, H. Seppa, H. Sipola, O. Rusanen, J. Hietanen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationEurosensors XIII
    Place of PublicationThe Hague, the Netherlands
    Pages57-60
    Number of pages4
    Publication statusPublished - 12 Sep 1999

    Keywords

    • METIS-113792

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