A capacitive RF power sensor based on MEMS technology

Luis Jose Fernandez

Research output: ThesisPhD Thesis - Research UT, graduation UT

54 Downloads (Pure)

Abstract

Existing power sensors for RF signals are based on thermistors, diodes and thermocouples. These power sensors are used as terminating devices and therefore they dissipate the complete incoming signal. Furthermore, new telecommunication systems require low weight, volume and power consumption and a high level of integration with electronics. These requirements are expected to be fulfilled by RF MEMS devices. The design and fabrication of a power sensor for RF signals based on MEMS technology was the main objective of this thesis. The research was performed in the context of the European project EMMA (Electro Mechanical Microcomponents for precision Applications).
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Elwenspoek, M.C., Supervisor
  • Wiegerink, Remco J., Co-Supervisor
Thesis sponsors
Award date17 Dec 2005
Place of PublicationEnschede
Publisher
Print ISBNs90-365-2294-3
Publication statusPublished - 17 Dec 2005

Fingerprint

MEMS
Sensors
Thermistors
Telecommunication systems
Thermocouples
Diodes
Electric power utilization
Electronic equipment
Fabrication

Keywords

  • IR-57486
  • EWI-9793
  • METIS-228360

Cite this

Fernandez, L. J. (2005). A capacitive RF power sensor based on MEMS technology. Enschede: University of Twente.
Fernandez, Luis Jose. / A capacitive RF power sensor based on MEMS technology. Enschede : University of Twente, 2005. 134 p.
@phdthesis{12e5b93dd5b4468491de5c79efadc0d0,
title = "A capacitive RF power sensor based on MEMS technology",
abstract = "Existing power sensors for RF signals are based on thermistors, diodes and thermocouples. These power sensors are used as terminating devices and therefore they dissipate the complete incoming signal. Furthermore, new telecommunication systems require low weight, volume and power consumption and a high level of integration with electronics. These requirements are expected to be fulfilled by RF MEMS devices. The design and fabrication of a power sensor for RF signals based on MEMS technology was the main objective of this thesis. The research was performed in the context of the European project EMMA (Electro Mechanical Microcomponents for precision Applications).",
keywords = "IR-57486, EWI-9793, METIS-228360",
author = "Fernandez, {Luis Jose}",
year = "2005",
month = "12",
day = "17",
language = "English",
isbn = "90-365-2294-3",
publisher = "University of Twente",
address = "Netherlands",
school = "University of Twente",

}

Fernandez, LJ 2005, 'A capacitive RF power sensor based on MEMS technology', University of Twente, Enschede.

A capacitive RF power sensor based on MEMS technology. / Fernandez, Luis Jose.

Enschede : University of Twente, 2005. 134 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

TY - THES

T1 - A capacitive RF power sensor based on MEMS technology

AU - Fernandez, Luis Jose

PY - 2005/12/17

Y1 - 2005/12/17

N2 - Existing power sensors for RF signals are based on thermistors, diodes and thermocouples. These power sensors are used as terminating devices and therefore they dissipate the complete incoming signal. Furthermore, new telecommunication systems require low weight, volume and power consumption and a high level of integration with electronics. These requirements are expected to be fulfilled by RF MEMS devices. The design and fabrication of a power sensor for RF signals based on MEMS technology was the main objective of this thesis. The research was performed in the context of the European project EMMA (Electro Mechanical Microcomponents for precision Applications).

AB - Existing power sensors for RF signals are based on thermistors, diodes and thermocouples. These power sensors are used as terminating devices and therefore they dissipate the complete incoming signal. Furthermore, new telecommunication systems require low weight, volume and power consumption and a high level of integration with electronics. These requirements are expected to be fulfilled by RF MEMS devices. The design and fabrication of a power sensor for RF signals based on MEMS technology was the main objective of this thesis. The research was performed in the context of the European project EMMA (Electro Mechanical Microcomponents for precision Applications).

KW - IR-57486

KW - EWI-9793

KW - METIS-228360

M3 - PhD Thesis - Research UT, graduation UT

SN - 90-365-2294-3

PB - University of Twente

CY - Enschede

ER -

Fernandez LJ. A capacitive RF power sensor based on MEMS technology. Enschede: University of Twente, 2005. 134 p.