Original language | Undefined |
---|---|
Pages (from-to) | 498-504 |
Number of pages | 7 |
Journal | Journal of micromechanics and microengineering |
Volume | 2000 |
Issue number | 10 |
Publication status | Published - 2000 |
Keywords
- METIS-111851
S. Bohm, B.H. Timmer, Wouter Olthuis, Piet Bergveld
Research output: Contribution to journal › Article › Academic › peer-review
Original language | Undefined |
---|---|
Pages (from-to) | 498-504 |
Number of pages | 7 |
Journal | Journal of micromechanics and microengineering |
Volume | 2000 |
Issue number | 10 |
Publication status | Published - 2000 |