A closed-loop large range of motion positioning system in MEMS

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the DSPE Conference on Precision Mechatronics 2012
PublisherDutch Society of Precision Engineering
Pages73-75
Publication statusPublished - 4 Sep 2012
Event1st DSPE Conference on Precision Mechatronics 2012 - Deurne, Netherlands
Duration: 4 Sep 20125 Sep 2012
Conference number: 1

Conference

Conference1st DSPE Conference on Precision Mechatronics 2012
CountryNetherlands
CityDeurne
Period4/09/125/09/12

Keywords

  • METIS-288698
  • IR-81985

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