A closed-loop large range of motion positioning system in MEMS

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the DSPE Conference on Precision Mechatronics 2012
Publisher	Dutch Society of Precision Engineering
Pages	73-75
Publication status	Published - 4 Sept 2012
Event	1st DSPE Conference on Precision Mechatronics 2012 - Deurne, Netherlands Duration: 4 Sept 2012 → 5 Sept 2012 Conference number: 1

Conference	1st DSPE Conference on Precision Mechatronics 2012
Country/Territory	Netherlands
City	Deurne
Period	4/09/12 → 5/09/12

Keywords

@inproceedings{ab98e61682b54e9091e1f6a13b1490ed,

title = "A closed-loop large range of motion positioning system in MEMS",

keywords = "METIS-288698, IR-81985",

author = "B. Krijnen and Brouwer, {Dannis Michel}",

year = "2012",

month = sep,

day = "4",

language = "English",

pages = "73--75",

booktitle = "Proceedings of the DSPE Conference on Precision Mechatronics 2012",

publisher = "Dutch Society of Precision Engineering",

note = "1st DSPE Conference on Precision Mechatronics 2012 ; Conference date: 04-09-2012 Through 05-09-2012",

}

TY - GEN

T1 - A closed-loop large range of motion positioning system in MEMS

AU - Krijnen, B.

AU - Brouwer, Dannis Michel

N1 - Conference code: 1

PY - 2012/9/4

Y1 - 2012/9/4

KW - METIS-288698

KW - IR-81985

M3 - Conference contribution

SP - 73

EP - 75

BT - Proceedings of the DSPE Conference on Precision Mechatronics 2012

PB - Dutch Society of Precision Engineering

T2 - 1st DSPE Conference on Precision Mechatronics 2012

Y2 - 4 September 2012 through 5 September 2012

ER -