@inproceedings{2179a83f952444eba98fa61030680c78,
title = "A CMOS-MEMS rotary microactuator suitable for hard disk drive applications",
abstract = "This work presents an electrothermal rotary actuator fabricated using CMOS-MEMS technology. The device discussed herein shows a rotational stroke of more than 10° and an electrothermal actuation cut-off frequency of 300 Hz. The device footprint is less than 1 mm x 1 mm and power consumption is less than 10 mW. The above performance and the device topology make it attractive for application in hard disk drive (HDD) head actuation applications. This paper details fabrication and characterization of this device and methods for extending its performance to levels needed for HDD applications.",
keywords = "CMOS MEMS, Electrothermal actuation, Hard disk drive, Rotary actuator, Second stage actuator, n/a OA procedure",
author = "W.C. Messner and J.A. Bain and M. Koenders and J. Groenesteijn and G.H. Marsman and P.J. Gilgunn and G.K. Fedder",
year = "2009",
doi = "10.1109/SENSOR.2009.5285802",
language = "English",
isbn = "978-1-4244-4190-7",
series = "TRANSDUCERS - International Conference on Solid-State Sensors, Actuators and Microsystems",
publisher = "IEEE",
number = "15",
pages = "1509--1512",
booktitle = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",
address = "United States",
note = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",
}
