A combined near field optical and force microscope

Scanning near field optical microscopy (SNOM) is the optical alternative of the scanning probe microscopical techniques which enables a lateral resolution down to about 10 nm, unlimited by diffraction. Moreover, the potential of non- destructive imaging of chemical and biological samples with nanometer resolution in ambient conditions is a crucial advantage over electron microscopy. An integrated microscope has been constructed which allows simultaneous detection of optical and force interaction between a microfabricated SiN probe and a sample surface. Images are obtained in a transmission mode by detection of the light emanating from a 'super-tip' in contact with the sample surface and illuminated by total internal reflection. Physical and technical aspects of the instrument are discussed and illustrated with typical images.