A compact refractometric sensor based on grated silicon photonic wires

L.J. Kauppinen, Hugo Hoekstra, R.M. de Ridder

    Research output: Contribution to journalArticleAcademicpeer-review

    6 Citations (Scopus)

    Abstract

    Grated silicon photonic wires for refractometric applications have been fabricated using a 248-nm deep UV lithography. It is shown experimentally, that a device with length of only 180m has an index sensitivity of $10^{-6}$ assuming a detector power resolution of 1%. It is also demonstrated that the device is suitable to monitor index changes in a liquid cladding, which could be used to monitor on chip chemical reactions.
    Original languageUndefined
    Article number10.1016/j.snb.2008.12.023
    Pages (from-to)194-198
    Number of pages5
    JournalSensors and actuators. B: Chemical
    Volume139
    Issue number1
    DOIs
    Publication statusPublished - 20 May 2009

    Keywords

    • IOMS-SNS: SENSORS
    • Grating
    • Silicon
    • Sensor
    • IR-62805
    • photonic wire
    • EWI-15342
    • METIS-263842
    • Waveguide

    Cite this

    Kauppinen, L. J., Hoekstra, H., & de Ridder, R. M. (2009). A compact refractometric sensor based on grated silicon photonic wires. Sensors and actuators. B: Chemical, 139(1), 194-198. [10.1016/j.snb.2008.12.023]. https://doi.org/10.1016/j.snb.2008.12.023
    Kauppinen, L.J. ; Hoekstra, Hugo ; de Ridder, R.M. / A compact refractometric sensor based on grated silicon photonic wires. In: Sensors and actuators. B: Chemical. 2009 ; Vol. 139, No. 1. pp. 194-198.
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    abstract = "Grated silicon photonic wires for refractometric applications have been fabricated using a 248-nm deep UV lithography. It is shown experimentally, that a device with length of only 180m has an index sensitivity of $10^{-6}$ assuming a detector power resolution of 1{\%}. It is also demonstrated that the device is suitable to monitor index changes in a liquid cladding, which could be used to monitor on chip chemical reactions.",
    keywords = "IOMS-SNS: SENSORS, Grating, Silicon, Sensor, IR-62805, photonic wire, EWI-15342, METIS-263842, Waveguide",
    author = "L.J. Kauppinen and Hugo Hoekstra and {de Ridder}, R.M.",
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    Kauppinen, LJ, Hoekstra, H & de Ridder, RM 2009, 'A compact refractometric sensor based on grated silicon photonic wires', Sensors and actuators. B: Chemical, vol. 139, no. 1, 10.1016/j.snb.2008.12.023, pp. 194-198. https://doi.org/10.1016/j.snb.2008.12.023

    A compact refractometric sensor based on grated silicon photonic wires. / Kauppinen, L.J.; Hoekstra, Hugo; de Ridder, R.M.

    In: Sensors and actuators. B: Chemical, Vol. 139, No. 1, 10.1016/j.snb.2008.12.023, 20.05.2009, p. 194-198.

    Research output: Contribution to journalArticleAcademicpeer-review

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    T1 - A compact refractometric sensor based on grated silicon photonic wires

    AU - Kauppinen, L.J.

    AU - Hoekstra, Hugo

    AU - de Ridder, R.M.

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    AB - Grated silicon photonic wires for refractometric applications have been fabricated using a 248-nm deep UV lithography. It is shown experimentally, that a device with length of only 180m has an index sensitivity of $10^{-6}$ assuming a detector power resolution of 1%. It is also demonstrated that the device is suitable to monitor index changes in a liquid cladding, which could be used to monitor on chip chemical reactions.

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    KW - Silicon

    KW - Sensor

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    KW - photonic wire

    KW - EWI-15342

    KW - METIS-263842

    KW - Waveguide

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    Kauppinen LJ, Hoekstra H, de Ridder RM. A compact refractometric sensor based on grated silicon photonic wires. Sensors and actuators. B: Chemical. 2009 May 20;139(1):194-198. 10.1016/j.snb.2008.12.023. https://doi.org/10.1016/j.snb.2008.12.023