A compact refractometric sensor based on grated silicon photonic wires

L.J. Kauppinen; Hugo Hoekstra; R.M. de Ridder

doi:10.1016/j.snb.2008.12.023

A compact refractometric sensor based on grated silicon photonic wires

L.J. Kauppinen, Hugo Hoekstra, R.M. de Ridder

Research output: Contribution to journal › Article › Academic › peer-review

6 Citations (Scopus)

Abstract

Grated silicon photonic wires for refractometric applications have been fabricated using a 248-nm deep UV lithography. It is shown experimentally, that a device with length of only 180m has an index sensitivity of $10^{-6}$ assuming a detector power resolution of 1%. It is also demonstrated that the device is suitable to monitor index changes in a liquid cladding, which could be used to monitor on chip chemical reactions.

Original language	Undefined
Article number	10.1016/j.snb.2008.12.023
Pages (from-to)	194-198
Number of pages	5
Journal	Sensors and actuators. B: Chemical
Volume	139
Issue number	1
DOIs	https://doi.org/10.1016/j.snb.2008.12.023
Publication status	Published - 20 May 2009

Keywords

IOMS-SNS: SENSORS
Grating
Silicon
Sensor
IR-62805
photonic wire
EWI-15342
METIS-263842
Waveguide

Access to Document

10.1016/j.snb.2008.12.023

http://eprints.eemcs.utwente.nl/secure2/15342/01/Kauppinen_L.J._-_Sensors_and__Act._B.-_Chem-_Vol_139,_P_194-198.pdf

Cite this

Kauppinen, L. J., Hoekstra, H., & de Ridder, R. M. (2009). A compact refractometric sensor based on grated silicon photonic wires. Sensors and actuators. B: Chemical, 139(1), 194-198. [10.1016/j.snb.2008.12.023]. https://doi.org/10.1016/j.snb.2008.12.023

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