A compact refractometric sensor based on grated silicon photonic wires

L.J. Kauppinen; Hugo Hoekstra; R.M. de Ridder

doi:10.1016/j.snb.2008.12.023

A compact refractometric sensor based on grated silicon photonic wires

L.J. Kauppinen, Hugo Hoekstra, R.M. de Ridder

Research output: Contribution to journal › Article › Academic › peer-review

6 Citations (Scopus)

Abstract

Grated silicon photonic wires for refractometric applications have been fabricated using a 248-nm deep UV lithography. It is shown experimentally, that a device with length of only 180m has an index sensitivity of $10^{-6}$ assuming a detector power resolution of 1%. It is also demonstrated that the device is suitable to monitor index changes in a liquid cladding, which could be used to monitor on chip chemical reactions.

Original language	Undefined
Article number	10.1016/j.snb.2008.12.023
Pages (from-to)	194-198
Number of pages	5
Journal	Sensors and actuators. B: Chemical
Volume	139
Issue number	1
DOIs	https://doi.org/10.1016/j.snb.2008.12.023
Publication status	Published - 20 May 2009

Keywords

IOMS-SNS: SENSORS
Grating
Silicon
Sensor
IR-62805
photonic wire
EWI-15342
METIS-263842
Waveguide

Access to Document

10.1016/j.snb.2008.12.023

http://eprints.eemcs.utwente.nl/secure2/15342/01/Kauppinen_L.J._-_Sensors_and__Act._B.-_Chem-_Vol_139,_P_194-198.pdf

Cite this

@article{103876a4482b441893f399e26e4c7dda,

title = "A compact refractometric sensor based on grated silicon photonic wires",

abstract = "Grated silicon photonic wires for refractometric applications have been fabricated using a 248-nm deep UV lithography. It is shown experimentally, that a device with length of only 180m has an index sensitivity of $10^{-6}$ assuming a detector power resolution of 1%. It is also demonstrated that the device is suitable to monitor index changes in a liquid cladding, which could be used to monitor on chip chemical reactions.",

keywords = "IOMS-SNS: SENSORS, Grating, Silicon, Sensor, IR-62805, photonic wire, EWI-15342, METIS-263842, Waveguide",

author = "L.J. Kauppinen and Hugo Hoekstra and {de Ridder}, R.M.",

note = "10.1016/j.snb.2008.12.023 ",

year = "2009",

month = may,

day = "20",

doi = "10.1016/j.snb.2008.12.023",

language = "Undefined",

volume = "139",

pages = "194--198",

journal = "Sensors and actuators. B: Chemical",

issn = "0925-4005",

publisher = "Elsevier",

number = "1",

}

TY - JOUR

T1 - A compact refractometric sensor based on grated silicon photonic wires

AU - Kauppinen, L.J.

AU - Hoekstra, Hugo

AU - de Ridder, R.M.

N1 - 10.1016/j.snb.2008.12.023

PY - 2009/5/20

Y1 - 2009/5/20

N2 - Grated silicon photonic wires for refractometric applications have been fabricated using a 248-nm deep UV lithography. It is shown experimentally, that a device with length of only 180m has an index sensitivity of $10^{-6}$ assuming a detector power resolution of 1%. It is also demonstrated that the device is suitable to monitor index changes in a liquid cladding, which could be used to monitor on chip chemical reactions.

AB - Grated silicon photonic wires for refractometric applications have been fabricated using a 248-nm deep UV lithography. It is shown experimentally, that a device with length of only 180m has an index sensitivity of $10^{-6}$ assuming a detector power resolution of 1%. It is also demonstrated that the device is suitable to monitor index changes in a liquid cladding, which could be used to monitor on chip chemical reactions.

KW - IOMS-SNS: SENSORS

KW - Grating

KW - Silicon

KW - Sensor

KW - IR-62805

KW - photonic wire

KW - EWI-15342

KW - METIS-263842

KW - Waveguide

U2 - 10.1016/j.snb.2008.12.023

DO - 10.1016/j.snb.2008.12.023

M3 - Article

VL - 139

SP - 194

EP - 198

JO - Sensors and actuators. B: Chemical

JF - Sensors and actuators. B: Chemical

SN - 0925-4005

IS - 1

M1 - 10.1016/j.snb.2008.12.023

ER -