A compact three-electrode discharge system for long-pulse KrCl excimer lasers

L.C. Casper, Hubertus M.J. Bastiaens, P.J.M. Peters, Klaus J. Boller, R.M. Hofstra

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

Abstract

Spatially very homogeneous gas discharges with long-pulse duration have been realized in HCl-based rare-gas halide gas mixtures at over-atmospheric pressures. A low inductive three-electrode prepulse–mainpulse configuration with two discharge volumes has been used as excitation circuit. The energy transfer efficiency of the pump circuit is very high and reaches 87%. Furthermore, the rise time of the discharge current is very short, in order to improve the discharge stability for high pump powers. Experiments in Xe/HCl/Ne mixtures reveal spatially very homogeneous discharges for up to 370 ns (FWHM) with a power deposition of 260 kW cm-3. For discharges in Kr/HCl/Ne mixtures, we also observe very homogeneous discharges for pump power densities of more than 500 kW cm-3. Discharges in mixtures with a krypton concentration of 100 mbar and 0.5 mbar HCl are homogeneous for 300 ns against 200 ns when 1 mbar of HCl is used.
Original languageUndefined
Pages (from-to)015009-1-015009-5
Number of pages5
JournalPlasma sources science and technology
Volume17
Issue number1
DOIs
Publication statusPublished - 2008

Keywords

  • IR-58250
  • METIS-243507

Cite this

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title = "A compact three-electrode discharge system for long-pulse KrCl excimer lasers",
abstract = "Spatially very homogeneous gas discharges with long-pulse duration have been realized in HCl-based rare-gas halide gas mixtures at over-atmospheric pressures. A low inductive three-electrode prepulse–mainpulse configuration with two discharge volumes has been used as excitation circuit. The energy transfer efficiency of the pump circuit is very high and reaches 87{\%}. Furthermore, the rise time of the discharge current is very short, in order to improve the discharge stability for high pump powers. Experiments in Xe/HCl/Ne mixtures reveal spatially very homogeneous discharges for up to 370 ns (FWHM) with a power deposition of 260 kW cm-3. For discharges in Kr/HCl/Ne mixtures, we also observe very homogeneous discharges for pump power densities of more than 500 kW cm-3. Discharges in mixtures with a krypton concentration of 100 mbar and 0.5 mbar HCl are homogeneous for 300 ns against 200 ns when 1 mbar of HCl is used.",
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author = "L.C. Casper and Bastiaens, {Hubertus M.J.} and P.J.M. Peters and Boller, {Klaus J.} and R.M. Hofstra",
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A compact three-electrode discharge system for long-pulse KrCl excimer lasers. / Casper, L.C.; Bastiaens, Hubertus M.J.; Peters, P.J.M.; Boller, Klaus J.; Hofstra, R.M.

In: Plasma sources science and technology, Vol. 17, No. 1, 2008, p. 015009-1-015009-5.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - A compact three-electrode discharge system for long-pulse KrCl excimer lasers

AU - Casper, L.C.

AU - Bastiaens, Hubertus M.J.

AU - Peters, P.J.M.

AU - Boller, Klaus J.

AU - Hofstra, R.M.

PY - 2008

Y1 - 2008

N2 - Spatially very homogeneous gas discharges with long-pulse duration have been realized in HCl-based rare-gas halide gas mixtures at over-atmospheric pressures. A low inductive three-electrode prepulse–mainpulse configuration with two discharge volumes has been used as excitation circuit. The energy transfer efficiency of the pump circuit is very high and reaches 87%. Furthermore, the rise time of the discharge current is very short, in order to improve the discharge stability for high pump powers. Experiments in Xe/HCl/Ne mixtures reveal spatially very homogeneous discharges for up to 370 ns (FWHM) with a power deposition of 260 kW cm-3. For discharges in Kr/HCl/Ne mixtures, we also observe very homogeneous discharges for pump power densities of more than 500 kW cm-3. Discharges in mixtures with a krypton concentration of 100 mbar and 0.5 mbar HCl are homogeneous for 300 ns against 200 ns when 1 mbar of HCl is used.

AB - Spatially very homogeneous gas discharges with long-pulse duration have been realized in HCl-based rare-gas halide gas mixtures at over-atmospheric pressures. A low inductive three-electrode prepulse–mainpulse configuration with two discharge volumes has been used as excitation circuit. The energy transfer efficiency of the pump circuit is very high and reaches 87%. Furthermore, the rise time of the discharge current is very short, in order to improve the discharge stability for high pump powers. Experiments in Xe/HCl/Ne mixtures reveal spatially very homogeneous discharges for up to 370 ns (FWHM) with a power deposition of 260 kW cm-3. For discharges in Kr/HCl/Ne mixtures, we also observe very homogeneous discharges for pump power densities of more than 500 kW cm-3. Discharges in mixtures with a krypton concentration of 100 mbar and 0.5 mbar HCl are homogeneous for 300 ns against 200 ns when 1 mbar of HCl is used.

KW - IR-58250

KW - METIS-243507

U2 - 10.1088/0963-0252/17/1/015009

DO - 10.1088/0963-0252/17/1/015009

M3 - Article

VL - 17

SP - 015009-1-015009-5

JO - Plasma sources science and technology

JF - Plasma sources science and technology

SN - 0963-0252

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