A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

Sourish Banerjee, Alexey Y. Kovalgin

    Research output: Contribution to conferencePaperAcademicpeer-review

    5 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes'. Together they form a unique fingerprint.

    Physics & Astronomy