A complete three-dimensional sound intensity sensor integrated on a single chip

Doekle Reinder Yntema, J.W. van Honschoten, Remco J. Wiegerink, Michael Curt Elwenspoek

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    Complete characterization of a sound field requires measurement of both sound pressure and particle velocity. In this paper, we present a three-dimensional acoustic particle velocity sensor chip. Furthermore, a sound pressure sensor was integrated on the same chip, enabling three-dimensional sound intensity measurements. The integration of multiple sensors on a single silicon chip results in highly reproducible sensors and a very small sensor-to-sensor distance allowing for accurate single-point measurements. The latter is demonstrated by measurement of the 3D particle velocity field of a very small (1 × 1 mm2) sound source.
    Original languageUndefined
    Article number10.1088/0960-1317/18/11/115004
    Pages (from-to)1-9
    Number of pages9
    JournalJournal of micromechanics and microengineering
    Issue number2008/16200/11
    Publication statusPublished - 23 Sept 2008


    • EWI-14706
    • IR-62641
    • METIS-255043

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