A compliance feedforward scheme for a class of LTV motion systems

Nikolaos Kontaras, Marcel Heertjes, Hans Zwart, Maarten Steinbuch

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    2 Citations (Scopus)
    191 Downloads (Pure)

    Abstract

    The implementation of lightweight high-performance motion systems in lithography applications imposes among others lower requirements on actuators, amplifiers, and cooling. However, the decreased stiffness of lightweight designs brings the effect of structural flexibilities to the fore especially when the so-called point of interest is not at a fixed location. This is for example the case when exposing a silicon wafer. To deal with structural flexibilities, a feedforward controller is proposed that combines two concepts: (a) continuous compliance compensation control and (b) snap feedforward control. Expanded to a subclass of LTV motion systems, the resulting controller compensates for the position-dependent and time-varying compliance of a flexible structure. The compliance function used will be derived using partial differential equations (PDE). The method is validated by simulation results.

    Original languageEnglish
    Title of host publication2017 American Control Conference, ACC 2017
    PublisherIEEE
    Pages4504-4509
    Number of pages6
    ISBN (Electronic)978-1-5090-5992-8
    ISBN (Print)978-1-5090-4583-9
    DOIs
    Publication statusPublished - 29 Jun 2017
    Event2017 American Control Conference, ACC 2017 - Seattle, United States
    Duration: 24 May 201726 May 2017
    http://acc2017.a2c2.org/

    Conference

    Conference2017 American Control Conference, ACC 2017
    Abbreviated titleACC
    CountryUnited States
    CitySeattle
    Period24/05/1726/05/17
    Internet address

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