A corrugated zone to obtain stress-reduction in a micro-mechanical resonating sensor

V.L. Spiering, S. Bouwstra, R.M.E.J. Spiering, T.J.A. Popma, J.H.J. Fluitman

Research output: Contribution to conference › Poster › Other research output

Original language	English
Number of pages	1
Publication status	Published - 28 Nov 1990
Event	FOM dagen 1990 - Veldhoven, Netherlands Duration: 28 Nov 1990 → 30 Nov 1990

Cite this

@conference{3c84217a43d144d3a881a2b3c5e96b95,

title = "A corrugated zone to obtain stress-reduction in a micro-mechanical resonating sensor",

author = "V.L. Spiering and S. Bouwstra and R.M.E.J. Spiering and T.J.A. Popma and J.H.J. Fluitman",

year = "1990",

month = nov,

day = "28",

language = "English",

note = "FOM dagen 1990 ; Conference date: 28-11-1990 Through 30-11-1990",

}