A corrugated zone to obtain stress-reduction in a micro-mechanical resonating sensor

V.L. Spiering, S. Bouwstra, R.M.E.J. Spiering, T.J.A. Popma, J.H.J. Fluitman

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Pages-
    Publication statusPublished - 28 Nov 1990

    Keywords

    • METIS-133519

    Cite this

    Spiering, V. L., Bouwstra, S., Spiering, R. M. E. J., Popma, T. J. A., & Fluitman, J. H. J. (1990). A corrugated zone to obtain stress-reduction in a micro-mechanical resonating sensor. -.