A corrugated zone to obtain stress-reduction in a micro-mechanical resonating sensor

V.L. Spiering, S. Bouwstra, R.M.E.J. Spiering, T.J.A. Popma, J.H.J. Fluitman

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 28 Nov 1990

Keywords

  • METIS-133519

Cite this

Spiering, V. L., Bouwstra, S., Spiering, R. M. E. J., Popma, T. J. A., & Fluitman, J. H. J. (1990). A corrugated zone to obtain stress-reduction in a micro-mechanical resonating sensor. -.
Spiering, V.L. ; Bouwstra, S. ; Spiering, R.M.E.J. ; Popma, T.J.A. ; Fluitman, J.H.J. / A corrugated zone to obtain stress-reduction in a micro-mechanical resonating sensor.
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Spiering, VL, Bouwstra, S, Spiering, RMEJ, Popma, TJA & Fluitman, JHJ 1990, 'A corrugated zone to obtain stress-reduction in a micro-mechanical resonating sensor' pp. -.

A corrugated zone to obtain stress-reduction in a micro-mechanical resonating sensor. / Spiering, V.L.; Bouwstra, S.; Spiering, R.M.E.J.; Popma, T.J.A.; Fluitman, J.H.J.

1990. -.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - A corrugated zone to obtain stress-reduction in a micro-mechanical resonating sensor

AU - Spiering, V.L.

AU - Bouwstra, S.

AU - Spiering, R.M.E.J.

AU - Popma, T.J.A.

AU - Fluitman, J.H.J.

PY - 1990/11/28

Y1 - 1990/11/28

KW - METIS-133519

M3 - Poster

SP - -

ER -

Spiering VL, Bouwstra S, Spiering RMEJ, Popma TJA, Fluitman JHJ. A corrugated zone to obtain stress-reduction in a micro-mechanical resonating sensor. 1990.