A corrugated zone to obtain stress-reduction in a micro-mechanical resonating sensor

V.L. Spiering, S. Bouwstra, R.M.E.J. Spiering, T.J.A. Popma, J.H.J. Fluitman

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Number of pages1
    Publication statusPublished - 28 Nov 1990
    EventFOM dagen 1990 - Veldhoven, Netherlands
    Duration: 28 Nov 199030 Nov 1990

    Conference

    ConferenceFOM dagen 1990
    CountryNetherlands
    CityVeldhoven
    Period28/11/9030/11/90

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