A corrugated zone to obtain stress reduction in a micro-mechanical resonating sensor

V.L. Spiering, S. Bouwstra, R.M.E.J. Spiering, T.J.A. Popma, J.H.J. Fluitman

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 11 Mar 1992

Keywords

  • METIS-133513

Cite this

Spiering, V. L., Bouwstra, S., Spiering, R. M. E. J., Popma, T. J. A., & Fluitman, J. H. J. (1992). A corrugated zone to obtain stress reduction in a micro-mechanical resonating sensor. -.
Spiering, V.L. ; Bouwstra, S. ; Spiering, R.M.E.J. ; Popma, T.J.A. ; Fluitman, J.H.J. / A corrugated zone to obtain stress reduction in a micro-mechanical resonating sensor.
@conference{0ee2c7282a844ff0ab12fe205a90c6cf,
title = "A corrugated zone to obtain stress reduction in a micro-mechanical resonating sensor",
keywords = "METIS-133513",
author = "V.L. Spiering and S. Bouwstra and R.M.E.J. Spiering and T.J.A. Popma and J.H.J. Fluitman",
year = "1992",
month = "3",
day = "11",
language = "Undefined",
pages = "--",

}

Spiering, VL, Bouwstra, S, Spiering, RMEJ, Popma, TJA & Fluitman, JHJ 1992, 'A corrugated zone to obtain stress reduction in a micro-mechanical resonating sensor' pp. -.

A corrugated zone to obtain stress reduction in a micro-mechanical resonating sensor. / Spiering, V.L.; Bouwstra, S.; Spiering, R.M.E.J.; Popma, T.J.A.; Fluitman, J.H.J.

1992. -.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - A corrugated zone to obtain stress reduction in a micro-mechanical resonating sensor

AU - Spiering, V.L.

AU - Bouwstra, S.

AU - Spiering, R.M.E.J.

AU - Popma, T.J.A.

AU - Fluitman, J.H.J.

PY - 1992/3/11

Y1 - 1992/3/11

KW - METIS-133513

M3 - Poster

SP - -

ER -

Spiering VL, Bouwstra S, Spiering RMEJ, Popma TJA, Fluitman JHJ. A corrugated zone to obtain stress reduction in a micro-mechanical resonating sensor. 1992.