A corrugated zone to obtain stress reduction in a micro-mechanical resonating sensor

V.L. Spiering, S. Bouwstra, R.M.E.J. Spiering, T.J.A. Popma, J.H.J. Fluitman

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 11 Mar 1992
    EventPosterbijdrage - Veldhoven
    Duration: 11 Mar 1992 → …

    Conference

    ConferencePosterbijdrage
    CityVeldhoven
    Period11/03/92 → …

    Keywords

    • METIS-133513

    Cite this