A corrugated zone to obtain stress-reduction in a micromechanical resonating sensor

V.L. Spiering, S. Bouwstra, T.J.A. Popma, J.H.J. Fluitman

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 14 Jun 1991
Event	MESA Dag 1991 - Enschede, Netherlands Duration: 14 Jun 1991 → 14 Jun 1991

Keywords

@conference{3a28c237af374640b88b335a05c6f005,

title = "A corrugated zone to obtain stress-reduction in a micromechanical resonating sensor",

keywords = "METIS-117927",

author = "V.L. Spiering and S. Bouwstra and T.J.A. Popma and J.H.J. Fluitman",

year = "1991",

month = jun,

day = "14",

language = "English",

pages = "--",

note = "MESA Dag 1991 ; Conference date: 14-06-1991 Through 14-06-1991",

}