A corrugated zone to obtain stress-reduction in a micromechanical resonating sensor

V.L. Spiering, S. Bouwstra, T.J.A. Popma, J.H.J. Fluitman

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Pages-
    Publication statusPublished - 14 Jun 1991
    EventMESA Dag 1991 - Enschede, Netherlands
    Duration: 14 Jun 199114 Jun 1991

    Conference

    ConferenceMESA Dag 1991
    CountryNetherlands
    CityEnschede
    Period14/06/9114/06/91
    Other(MESA Day/Meeting)

    Keywords

    • METIS-117927

    Cite this