A design procedure for an acoustic mirror providing dual reflection of longitudinal and shear waves in Solidly Mounted BAW Resonators (SMRs)

Sumy Jose, Andreas Jansman, Raymond Josephus Engelbart Hueting

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    9 Citations (Scopus)
    190 Downloads (Pure)

    Abstract

    The quality factor of the traditional Solidly Mounted Resonator (SMR) is limited by substrate losses, as the traditionally employed acoustic mirror reflects longitudinal waves but not shear waves. Modern mirrors do reflect both waves, but design rules for such mirrors have not been published so far. We propose a systematic design procedure derived from optics leading to a novel embodiment for the acoustic mirror which effectively reflects both longitudinal and shear waves. This method can be applied for the acoustic mirror design for any given material combination. An analytical model is presented; its agreement with FEM simulations is good. With the optimized design, we can obtain a minimum transmission for longitudinal and shear waves of −25 dB and −20 dB at resonance frequencies for longitudinal and shear waves, respectively, for various reflector material combinations.
    Original languageUndefined
    Title of host publicationProceedings of the IEEE International Ultrasonics Symposium (IUS) 2009
    Place of PublicationPiscataway
    PublisherIEEE
    Pages2111-2114
    Number of pages4
    ISBN (Print)978-1-4244-4389-5
    DOIs
    Publication statusPublished - Sep 2009
    EventIEEE International Ultrasonics Symposium, IUS 2009 - Rome, Italy
    Duration: 20 Sep 200923 Sep 2009

    Publication series

    Name
    PublisherIEEE Press

    Conference

    ConferenceIEEE International Ultrasonics Symposium, IUS 2009
    Abbreviated titleIUS
    CountryItaly
    CityRome
    Period20/09/0923/09/09

    Keywords

    • IR-71168
    • METIS-270802
    • Transmission curve
    • Acoustic mirror
    • SC-DPM: Device Physics and Modeling
    • EWI-17832
    • Solidly Mounted Resonator (SMR)
    • Stop-band theory
    • Bulk Acoustic Wave (BAW)

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