A detailed analysis of the optical beam deflection technique for use in atomic force microscopy

Constant A.J. Putman; Bart G. de Grooth; Niek F. van Hulst; Jan Greve

doi:10.1063/1.352149

A detailed analysis of the optical beam deflection technique for use in atomic force microscopy

Constant A.J. Putman, Bart G. de Grooth, Niek F. van Hulst, Jan Greve

Optical Sciences

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Abstract

A Michelson interferometer and an optical beam deflection configuration (both shot noise and diffraction limited) are compared for application in an atomic force microscope. The comparison shows that the optical beam deflection method and the interferometer have essentially the same sensitivity. This remarkable result is explained by indicating the physical equivalence of both methods. Furthermore, various configurations using optical beam deflection are discussed. All the setups are capable of detecting the cantilever displacements with atomic resolution in a 10 kHz bandwidth.

Original language	English
Pages (from-to)	6-12
Number of pages	6
Journal	Journal of Applied Physics
Volume	72
Issue number	2
DOIs	https://doi.org/10.1063/1.352149
Publication status	Published - 1992

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title = "A detailed analysis of the optical beam deflection technique for use in atomic force microscopy",

abstract = "A Michelson interferometer and an optical beam deflection configuration (both shot noise and diffraction limited) are compared for application in an atomic force microscope. The comparison shows that the optical beam deflection method and the interferometer have essentially the same sensitivity. This remarkable result is explained by indicating the physical equivalence of both methods. Furthermore, various configurations using optical beam deflection are discussed. All the setups are capable of detecting the cantilever displacements with atomic resolution in a 10 kHz bandwidth.",

author = "Putman, {Constant A.J.} and {de Grooth}, {Bart G.} and {van Hulst}, {Niek F.} and Jan Greve",

year = "1992",

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journal = "Journal of Applied Physics",

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AU - Putman, Constant A.J.

AU - de Grooth, Bart G.

AU - van Hulst, Niek F.

AU - Greve, Jan

PY - 1992

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AB - A Michelson interferometer and an optical beam deflection configuration (both shot noise and diffraction limited) are compared for application in an atomic force microscope. The comparison shows that the optical beam deflection method and the interferometer have essentially the same sensitivity. This remarkable result is explained by indicating the physical equivalence of both methods. Furthermore, various configurations using optical beam deflection are discussed. All the setups are capable of detecting the cantilever displacements with atomic resolution in a 10 kHz bandwidth.

U2 - 10.1063/1.352149

DO - 10.1063/1.352149

M3 - Article

SN - 0021-8979

VL - 72

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EP - 12

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 2

ER -

A detailed analysis of the optical beam deflection technique for use in atomic force microscopy

Abstract

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