A detailed analysis of the optical beam deflection technique for use in atomic force microscopy

Constant A.J. Putman, Bart G. de Grooth, Niek F. van Hulst, Jan Greve

Research output: Contribution to journalArticleAcademicpeer-review

192 Citations (Scopus)
151 Downloads (Pure)

Abstract

A Michelson interferometer and an optical beam deflection configuration (both shot noise and diffraction limited) are compared for application in an atomic force microscope. The comparison shows that the optical beam deflection method and the interferometer have essentially the same sensitivity. This remarkable result is explained by indicating the physical equivalence of both methods. Furthermore, various configurations using optical beam deflection are discussed. All the setups are capable of detecting the cantilever displacements with atomic resolution in a 10 kHz bandwidth.
Original languageEnglish
Pages (from-to)6-12
Number of pages6
JournalJournal of Applied Physics
Volume72
Issue number2
DOIs
Publication statusPublished - 1992

Fingerprint Dive into the research topics of 'A detailed analysis of the optical beam deflection technique for use in atomic force microscopy'. Together they form a unique fingerprint.

  • Cite this