A differential resonator design using a bossed structure for applications in mechanical sensors

Harrie A.C. Tilmans, Siebe Bouwstra, Dominicus J. IJntema, Miko Elwenspoek, Carl F. Klein

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    9 Citations (Scopus)
    9 Downloads (Pure)

    Abstract

    Theory and experimental results are presented of a differential resonator design employing a bossed structure for applications in mechanical sensors. The effects of residual strain, temperature and mechanical load on the resonance frequency are investigated. Mismatches in the resonators are accounted for in the analysis, resulting in a predicted temperature dependence of the offset and of the sensitivity. Experimental data obtained from a macroscopic brass model, mounted on a steel bar and applied as a force sensor, are given. Compared to a design employing a single resonator, the measurements indicate a doubling in force sensitivity and a reduction of both the intrinsic temperature dependence and of the differential thermal expansion effects. The results of this research are directly applicable to micromachined structures in silicon.
    Original languageEnglish
    Pages (from-to)385-393
    Number of pages9
    JournalSensors and actuators. A: Physical
    Volume26
    Issue number1-3
    DOIs
    Publication statusPublished - Mar 1991

    Keywords

    • IR-65128
    • EWI-14194

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