A differential viscosity detector for use in miniaturized chemical separation systems

M.T. Blom, Emil Chmela, F.H.J. van der Heyden, R.E. Oosterbroek, Robert Tijssen, Michael Curt Elwenspoek, Albert van den Berg

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    We present a micromachined differential viscosity detector suitable for integration into an on-chip hydrodynamic chromatography system. The general design, however, is applicable to any liquid chromatography system that is used for separation of polymers. The micromachined part of the detector consists of a fluidic Wheatstone bridge and a low hydraulic capacitance pressure sensor of which the pressure sensing is based on optical detection of a membrane deflection. The stand-alone sensor shows a resolution in specific viscosity of 3/spl times/10/sup -3/, in which specific viscosity is defined as the increase in viscosity by a sample, relative to the baseline viscosity of a solvent.
    Original languageUndefined
    Pages (from-to)70-80
    Number of pages11
    JournalJournal of microelectromechanical systems
    Issue number1
    Publication statusPublished - 6 Feb 2005


    • IR-50944
    • EWI-9983
    • METIS-223757

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