A differential viscosity detector for use in miniaturized chemical separation systems

M.T. Blom, Emil Chmela, F.H.J. van der Heyden, R.E. Oosterbroek, Robert Tijssen, Michael Curt Elwenspoek, Albert van den Berg

    Research output: Contribution to journalArticleAcademicpeer-review

    14 Citations (Scopus)
    190 Downloads (Pure)

    Abstract

    We present a micromachined differential viscosity detector suitable for integration into an on-chip hydrodynamic chromatography system. The general design, however, is applicable to any liquid chromatography system that is used for separation of polymers. The micromachined part of the detector consists of a fluidic Wheatstone bridge and a low hydraulic capacitance pressure sensor of which the pressure sensing is based on optical detection of a membrane deflection. The stand-alone sensor shows a resolution in specific viscosity of 3/spl times/10/sup -3/, in which specific viscosity is defined as the increase in viscosity by a sample, relative to the baseline viscosity of a solvent.
    Original languageUndefined
    Pages (from-to)70-80
    Number of pages11
    JournalJournal of microelectromechanical systems
    Volume14
    Issue number1
    DOIs
    Publication statusPublished - 6 Feb 2005

    Keywords

    • IR-50944
    • EWI-9983
    • METIS-223757

    Cite this

    Blom, M. T., Chmela, E., van der Heyden, F. H. J., Oosterbroek, R. E., Tijssen, R., Elwenspoek, M. C., & van den Berg, A. (2005). A differential viscosity detector for use in miniaturized chemical separation systems. Journal of microelectromechanical systems, 14(1), 70-80. https://doi.org/10.1109/JMEMS.2004.840452