TY - JOUR
T1 - A differential viscosity detector for use in miniaturized chemical separation systems
AU - Blom, M.T.
AU - Chmela, E.
AU - van der Heyden, F.H.J.
AU - Oosterbroek, R.E.
AU - Tijssen, R.
AU - Elwenspoek, M.C.
AU - van den Berg, A.
PY - 2005/2/6
Y1 - 2005/2/6
N2 - We present a micromachined differential viscosity detector suitable for integration into an on-chip hydrodynamic chromatography system. The general design, however, is applicable to any liquid chromatography system that is used for separation of polymers. The micromachined part of the detector consists of a fluidic Wheatstone bridge and a low hydraulic capacitance pressure sensor of which the pressure sensing is based on optical detection of a membrane deflection. The stand-alone sensor shows a resolution in specific viscosity of 3/spl times/10/sup -3/, in which specific viscosity is defined as the increase in viscosity by a sample, relative to the baseline viscosity of a solvent.
AB - We present a micromachined differential viscosity detector suitable for integration into an on-chip hydrodynamic chromatography system. The general design, however, is applicable to any liquid chromatography system that is used for separation of polymers. The micromachined part of the detector consists of a fluidic Wheatstone bridge and a low hydraulic capacitance pressure sensor of which the pressure sensing is based on optical detection of a membrane deflection. The stand-alone sensor shows a resolution in specific viscosity of 3/spl times/10/sup -3/, in which specific viscosity is defined as the increase in viscosity by a sample, relative to the baseline viscosity of a solvent.
U2 - 10.1109/JMEMS.2004.840452
DO - 10.1109/JMEMS.2004.840452
M3 - Article
SN - 1057-7157
VL - 14
SP - 70
EP - 80
JO - Journal of microelectromechanical systems
JF - Journal of microelectromechanical systems
IS - 1
ER -