A dimension tolerant design of a 3D-intertial sensor

B.J. Kooi, Johan G. Bomer, Wouter Olthuis, Piet Bergveld

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland
Place of Publication	Cork, Ireland
Pages	187-190
Number of pages	4
Publication status	Published - 16 Sept 2001

Keywords

@inproceedings{61e9d838c41a4895bd76d5eb1cb6ef7d,

title = "A dimension tolerant design of a 3D-intertial sensor",

keywords = "METIS-201702",

author = "B.J. Kooi and Bomer, {Johan G.} and Wouter Olthuis and Piet Bergveld",

year = "2001",

month = sep,

day = "16",

language = "Undefined",

isbn = "-",

pages = "187--190",

booktitle = "Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland",

}