A dimension tolerant design of a 3D-intertial sensor

B.J. Kooi, Johan G. Bomer, Wouter Olthuis, Piet Bergveld

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland
Place of PublicationCork, Ireland
Pages187-190
Number of pages4
Publication statusPublished - 16 Sep 2001

Keywords

  • METIS-201702

Cite this

Kooi, B. J., Bomer, J. G., Olthuis, W., & Bergveld, P. (2001). A dimension tolerant design of a 3D-intertial sensor. In Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland (pp. 187-190). Cork, Ireland.
Kooi, B.J. ; Bomer, Johan G. ; Olthuis, Wouter ; Bergveld, Piet. / A dimension tolerant design of a 3D-intertial sensor. Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland. Cork, Ireland, 2001. pp. 187-190
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Kooi, BJ, Bomer, JG, Olthuis, W & Bergveld, P 2001, A dimension tolerant design of a 3D-intertial sensor. in Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland. Cork, Ireland, pp. 187-190.

A dimension tolerant design of a 3D-intertial sensor. / Kooi, B.J.; Bomer, Johan G.; Olthuis, Wouter; Bergveld, Piet.

Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland. Cork, Ireland, 2001. p. 187-190.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - A dimension tolerant design of a 3D-intertial sensor

AU - Kooi, B.J.

AU - Bomer, Johan G.

AU - Olthuis, Wouter

AU - Bergveld, Piet

PY - 2001/9/16

Y1 - 2001/9/16

KW - METIS-201702

M3 - Conference contribution

SN - -

SP - 187

EP - 190

BT - Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland

CY - Cork, Ireland

ER -

Kooi BJ, Bomer JG, Olthuis W, Bergveld P. A dimension tolerant design of a 3D-intertial sensor. In Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland. Cork, Ireland. 2001. p. 187-190