A dimension tolerant design of a 3D-intertial sensor

B.J. Kooi, Johan G. Bomer, Wouter Olthuis, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland
    Place of PublicationCork, Ireland
    Pages187-190
    Number of pages4
    Publication statusPublished - 16 Sep 2001

    Keywords

    • METIS-201702

    Cite this

    Kooi, B. J., Bomer, J. G., Olthuis, W., & Bergveld, P. (2001). A dimension tolerant design of a 3D-intertial sensor. In Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland (pp. 187-190). Cork, Ireland.