A dimension tolerant design of a 3D-intertial sensor

B.J. Kooi, Johan G. Bomer, Wouter Olthuis, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland
    Place of PublicationCork, Ireland
    Pages187-190
    Number of pages4
    Publication statusPublished - 16 Sep 2001

    Keywords

    • METIS-201702

    Cite this

    Kooi, B. J., Bomer, J. G., Olthuis, W., & Bergveld, P. (2001). A dimension tolerant design of a 3D-intertial sensor. In Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland (pp. 187-190). Cork, Ireland.
    Kooi, B.J. ; Bomer, Johan G. ; Olthuis, Wouter ; Bergveld, Piet. / A dimension tolerant design of a 3D-intertial sensor. Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland. Cork, Ireland, 2001. pp. 187-190
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    keywords = "METIS-201702",
    author = "B.J. Kooi and Bomer, {Johan G.} and Wouter Olthuis and Piet Bergveld",
    year = "2001",
    month = "9",
    day = "16",
    language = "Undefined",
    isbn = "-",
    pages = "187--190",
    booktitle = "Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland",

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    Kooi, BJ, Bomer, JG, Olthuis, W & Bergveld, P 2001, A dimension tolerant design of a 3D-intertial sensor. in Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland. Cork, Ireland, pp. 187-190.

    A dimension tolerant design of a 3D-intertial sensor. / Kooi, B.J.; Bomer, Johan G.; Olthuis, Wouter; Bergveld, Piet.

    Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland. Cork, Ireland, 2001. p. 187-190.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - A dimension tolerant design of a 3D-intertial sensor

    AU - Kooi, B.J.

    AU - Bomer, Johan G.

    AU - Olthuis, Wouter

    AU - Bergveld, Piet

    PY - 2001/9/16

    Y1 - 2001/9/16

    KW - METIS-201702

    M3 - Conference contribution

    SN - -

    SP - 187

    EP - 190

    BT - Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland

    CY - Cork, Ireland

    ER -

    Kooi BJ, Bomer JG, Olthuis W, Bergveld P. A dimension tolerant design of a 3D-intertial sensor. In Proceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland. Cork, Ireland. 2001. p. 187-190