A dimension tolerant design of a 3D-intertial sensor

B.J. Kooi, Johan G. Bomer, Wouter Olthuis, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings 12th Micromechanics Europe Workshop MME 2001, Cork, Ireland
    Place of PublicationCork, Ireland
    Number of pages4
    Publication statusPublished - 16 Sept 2001


    • METIS-201702

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