A flow-through microfluidic relative permittivity sensor

Yaxiang Zeng*, Remco Sanders, Remco Wiegerink, Joost Lötters

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

In this paper, we present the design, simulation, fabrication and characterization of a microfluidic relative permittivity sensor in which the fluid flows through an interdigitated electrode structure. Sensor fabrication is based on an silicon on insulator (SOI) wafer where the fluidic inlet and outlet are etched through the handle layer and the interdigitated electrodes are made in the device layer. An impedance analyzer was used to measure the impedance between the interdigitated electrodes for various non-conducting fluids with a relative permittivity ranging from 1 to 41. The sensor shows good linearity over this range of relative permittivity and can be integrated with other microfluidic sensors in a multiparameter chip.

Original languageEnglish
Article number325
JournalMicromachines
Volume11
Issue number3
DOIs
Publication statusPublished - 1 Mar 2020

Keywords

  • UT-Hybrid-D
  • Interdigitated electrodes
  • Relative permittivity sensor
  • Capacitance sensor

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