A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes

D.H. Tong; F.C. Gielens; H.T.H. Hoang Thi Hanh; Johan W. Berenschot; Meint J. de Boer; Johannes G.E. Gardeniers; Henricus V. Jansen; W. Nijdam; C.J.M. van Rijn; Michael Curt Elwenspoek

doi:10.1109/SENSOR.2003.1216921

A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes

D.H. Tong, F.C. Gielens, H.T.H. Hoang Thi Hanh, Johan W. Berenschot, Meint J. de Boer, Johannes G.E. Gardeniers, Henricus V. Jansen, W. Nijdam, C.J.M. van Rijn, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

4 Citations (Scopus)

244 Downloads (Pure)

Abstract

A thin but strong and defect free palladium-silver (Pd-Ag) alloy membrane is fabricated with a sequence of well-known thin film and micromachining techniques. A microfabrication process also creates a robust wafer-scale membrane module, which is easy to be integrated into a membrane holder to have gastight connections to the outer world. The microfabricated membranes have been tested to determine the mechanical strength, hydrogen permeability and hydrogen selectivity. The membranes have high mechanical strength and can withstand pressures up to 3 bars at room temperature. High flow rates of up to 3.6 mol H/sub 2//m/sup 2/.s have been measured with a minimal selectivity of 1500 for H/sub 2//He. The membranes survived operation at 450/spl deg/C, which is a temperature relevant for practical application in industry, for more than 1000 hours

Original language	Undefined
Title of host publication	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003
Place of Publication	USA
Publisher	IEEE
Pages	1742-1745
Number of pages	4
ISBN (Print)	0-7803-7731-1
DOIs	https://doi.org/10.1109/SENSOR.2003.1216921
Publication status	Published - Jun 2003
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Boston, United States Duration: 8 Jun 2003 → 12 Jun 2003 Conference number: 12

Publication series

Name
Publisher	IEEE
Volume	2

Conference

Conference	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003
Abbreviated title	TRANSDUCERS 2003
Country/Territory	United States
City	Boston
Period	8/06/03 → 12/06/03

Keywords

IR-46305
EWI-11228
METIS-214520

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/SENSOR.2003.1216921

hydrogen_separation_-_tongFinal published version, 395 KB

Cite this

Tong, D. H., Gielens, F. C., Hoang Thi Hanh, H. T. H., Berenschot, J. W., de Boer, M. J., Gardeniers, J. G. E., Jansen, H. V., Nijdam, W., van Rijn, C. J. M., & Elwenspoek, M. C. (2003). A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes. In 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 (pp. 1742-1745). IEEE. https://doi.org/10.1109/SENSOR.2003.1216921

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abstract = "A thin but strong and defect free palladium-silver (Pd-Ag) alloy membrane is fabricated with a sequence of well-known thin film and micromachining techniques. A microfabrication process also creates a robust wafer-scale membrane module, which is easy to be integrated into a membrane holder to have gastight connections to the outer world. The microfabricated membranes have been tested to determine the mechanical strength, hydrogen permeability and hydrogen selectivity. The membranes have high mechanical strength and can withstand pressures up to 3 bars at room temperature. High flow rates of up to 3.6 mol H/sub 2//m/sup 2/.s have been measured with a minimal selectivity of 1500 for H/sub 2//He. The membranes survived operation at 450/spl deg/C, which is a temperature relevant for practical application in industry, for more than 1000 hours",

keywords = "IR-46305, EWI-11228, METIS-214520",

author = "D.H. Tong and F.C. Gielens and {Hoang Thi Hanh}, H.T.H. and Berenschot, {Johan W.} and {de Boer}, {Meint J.} and Gardeniers, {Johannes G.E.} and Jansen, {Henricus V.} and W. Nijdam and {van Rijn}, C.J.M. and Elwenspoek, {Michael Curt}",

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year = "2003",

month = jun,

doi = "10.1109/SENSOR.2003.1216921",

language = "Undefined",

isbn = "0-7803-7731-1",

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pages = "1742--1745",

booktitle = "12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003",

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Tong, DH, Gielens, FC, Hoang Thi Hanh, HTH, Berenschot, JW, de Boer, MJ, Gardeniers, JGE, Jansen, HV, Nijdam, W, van Rijn, CJM & Elwenspoek, MC 2003, A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes. in 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003. IEEE, USA, pp. 1742-1745, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, Boston, Massachusetts, United States, 8/06/03. https://doi.org/10.1109/SENSOR.2003.1216921

A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes. / Tong, D.H.; Gielens, F.C.; Hoang Thi Hanh, H.T.H. et al.
12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003. USA: IEEE, 2003. p. 1742-1745.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes

AU - Tong, D.H.

AU - Gielens, F.C.

AU - Hoang Thi Hanh, H.T.H.

AU - Berenschot, Johan W.

AU - de Boer, Meint J.

AU - Gardeniers, Johannes G.E.

AU - Jansen, Henricus V.

AU - Nijdam, W.

AU - van Rijn, C.J.M.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 12

PY - 2003/6

Y1 - 2003/6

N2 - A thin but strong and defect free palladium-silver (Pd-Ag) alloy membrane is fabricated with a sequence of well-known thin film and micromachining techniques. A microfabrication process also creates a robust wafer-scale membrane module, which is easy to be integrated into a membrane holder to have gastight connections to the outer world. The microfabricated membranes have been tested to determine the mechanical strength, hydrogen permeability and hydrogen selectivity. The membranes have high mechanical strength and can withstand pressures up to 3 bars at room temperature. High flow rates of up to 3.6 mol H/sub 2//m/sup 2/.s have been measured with a minimal selectivity of 1500 for H/sub 2//He. The membranes survived operation at 450/spl deg/C, which is a temperature relevant for practical application in industry, for more than 1000 hours

AB - A thin but strong and defect free palladium-silver (Pd-Ag) alloy membrane is fabricated with a sequence of well-known thin film and micromachining techniques. A microfabrication process also creates a robust wafer-scale membrane module, which is easy to be integrated into a membrane holder to have gastight connections to the outer world. The microfabricated membranes have been tested to determine the mechanical strength, hydrogen permeability and hydrogen selectivity. The membranes have high mechanical strength and can withstand pressures up to 3 bars at room temperature. High flow rates of up to 3.6 mol H/sub 2//m/sup 2/.s have been measured with a minimal selectivity of 1500 for H/sub 2//He. The membranes survived operation at 450/spl deg/C, which is a temperature relevant for practical application in industry, for more than 1000 hours

KW - IR-46305

KW - EWI-11228

KW - METIS-214520

U2 - 10.1109/SENSOR.2003.1216921

DO - 10.1109/SENSOR.2003.1216921

M3 - Conference contribution

SN - 0-7803-7731-1

SP - 1742

EP - 1745

BT - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003

PB - IEEE

CY - USA

T2 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003

Y2 - 8 June 2003 through 12 June 2003

ER -