TY - JOUR
T1 - A KrF-laser excited by a capacitively coupled longitudinal discharge
AU - Gerber, T.
AU - Peters, P.J.M.
AU - Bastiaens, Hubertus M.J.
PY - 1985
Y1 - 1985
N2 - The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.
AB - The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.
KW - IR-69443
U2 - 10.1016/0030-4018(85)90026-4
DO - 10.1016/0030-4018(85)90026-4
M3 - Article
VL - 53
SP - 401
EP - 404
JO - Optics communications
JF - Optics communications
SN - 0030-4018
IS - 6
ER -