A KrF-laser excited by a capacitively coupled longitudinal discharge

T. Gerber, P.J.M. Peters, Hubertus M.J. Bastiaens

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Abstract

The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.
Original languageUndefined
Pages (from-to)401-404
JournalOptics communications
Volume53
Issue number6
DOIs
Publication statusPublished - 1985

Keywords

  • IR-69443

Cite this

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title = "A KrF-laser excited by a capacitively coupled longitudinal discharge",
abstract = "The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.",
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volume = "53",
pages = "401--404",
journal = "Optics communications",
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A KrF-laser excited by a capacitively coupled longitudinal discharge. / Gerber, T.; Peters, P.J.M.; Bastiaens, Hubertus M.J.

In: Optics communications, Vol. 53, No. 6, 1985, p. 401-404.

Research output: Contribution to journalArticleAcademic

TY - JOUR

T1 - A KrF-laser excited by a capacitively coupled longitudinal discharge

AU - Gerber, T.

AU - Peters, P.J.M.

AU - Bastiaens, Hubertus M.J.

PY - 1985

Y1 - 1985

N2 - The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.

AB - The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.

KW - IR-69443

U2 - 10.1016/0030-4018(85)90026-4

DO - 10.1016/0030-4018(85)90026-4

M3 - Article

VL - 53

SP - 401

EP - 404

JO - Optics communications

JF - Optics communications

SN - 0030-4018

IS - 6

ER -