Abstract
The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.
Original language | Undefined |
---|---|
Pages (from-to) | 401-404 |
Journal | Optics communications |
Volume | 53 |
Issue number | 6 |
DOIs | |
Publication status | Published - 1985 |
Keywords
- IR-69443