A KrF-laser excited by a capacitively coupled longitudinal discharge

T. Gerber, P.J.M. Peters, Hubertus M.J. Bastiaens

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The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.
Original languageUndefined
Pages (from-to)401-404
JournalOptics communications
Issue number6
Publication statusPublished - 1985


  • IR-69443

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