The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.
Gerber, T., Peters, P. J. M., & Bastiaens, H. M. J. (1985). A KrF-laser excited by a capacitively coupled longitudinal discharge. Optics communications, 53(6), 401-404. https://doi.org/10.1016/0030-4018(85)90026-4