A KrF-laser excited by a capacitively coupled longitudinal discharge

T. Gerber; P.J.M. Peters; Hubertus M.J. Bastiaens

doi:10.1016/0030-4018(85)90026-4

A KrF-laser excited by a capacitively coupled longitudinal discharge

T. Gerber
, P.J.M. Peters
, Hubertus M.J. Bastiaens

Research output: Contribution to journal › Article › Academic

11 Citations (Scopus)

270 Downloads (Pure)

Abstract

The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.

Original language	Undefined
Pages (from-to)	401-404
Journal	Optics communications
Volume	53
Issue number	6
DOIs	https://doi.org/10.1016/0030-4018(85)90026-4
Publication status	Published - 1985

Keywords

IR-69443

Access to Document

10.1016/0030-4018(85)90026-4

Gerber85krf

Cite this

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title = "A KrF-laser excited by a capacitively coupled longitudinal discharge",

abstract = "The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.",

keywords = "IR-69443",

author = "T. Gerber and P.J.M. Peters and Bastiaens, \{Hubertus M.J.\}",

year = "1985",

doi = "10.1016/0030-4018(85)90026-4",

language = "Undefined",

volume = "53",

pages = "401--404",

journal = "Optics communications",

issn = "0030-4018",

publisher = "Elsevier",

number = "6",

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TY - JOUR

T1 - A KrF-laser excited by a capacitively coupled longitudinal discharge

AU - Gerber, T.

AU - Peters, P.J.M.

AU - Bastiaens, Hubertus M.J.

PY - 1985

Y1 - 1985

N2 - The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.

AB - The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.

KW - IR-69443

U2 - 10.1016/0030-4018(85)90026-4

DO - 10.1016/0030-4018(85)90026-4

M3 - Article

SN - 0030-4018

VL - 53

SP - 401

EP - 404

JO - Optics communications

JF - Optics communications

IS - 6

ER -