A Large Range Multi-Axis Capacitive Force/Torque Sensor Realized in a Single SOI Wafer

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Abstract

A silicon capacitive force/torque sensor is designed and realized to be used for biomechanical applications and robotics. The sensor is able to measure the forces in three directions and two torques using four parallel capacitor plates and four comb-structures. Novel spring and lever structures are designed to separate the different force components and minimize mechanical crosstalk. The fabrication process is based on deep reactive ion etching on both sides of a single silicon-on-insulator wafer and uses only two masks making it a straight-forward and robust process. The sensor has a force range of 2 N in shear and normal direction and a torque range of more than 6 Nmm. It has a high sensitivity of 38 fF/N and 550 fF/N in shear and normal direction respectively.
Original languageEnglish
Title of host publication27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Place of PublicationSan Francisco
PublisherThe Printing House, Inc.
Pages680-683
Number of pages4
ISBN (Print)978-1-4799-3509-3
DOIs
Publication statusPublished - 26 Jan 2014
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, United States
Duration: 26 Jan 201430 Jan 2014
Conference number: 27

Publication series

Name
PublisherThe Printing House, Inc.

Conference

Conference27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Abbreviated titleMEMS
CountryUnited States
CitySan Francisco
Period26/01/1430/01/14

Fingerprint

Torque
Sensors
Silicon
Reactive ion etching
Crosstalk
Masks
Robotics
Capacitors
Fabrication

Keywords

  • METIS-304024
  • IR-89829
  • EWI-24583
  • TST-SENSORS

Cite this

Alveringh, D., Brookhuis, R. A., Wiegerink, R. J., & Krijnen, G. J. M. (2014). A Large Range Multi-Axis Capacitive Force/Torque Sensor Realized in a Single SOI Wafer. In 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 (pp. 680-683). San Francisco: The Printing House, Inc.. https://doi.org/10.1109/MEMSYS.2014.6765732
Alveringh, Dennis ; Brookhuis, Robert Anton ; Wiegerink, Remco J. ; Krijnen, Gijsbertus J.M. / A Large Range Multi-Axis Capacitive Force/Torque Sensor Realized in a Single SOI Wafer. 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014. San Francisco : The Printing House, Inc., 2014. pp. 680-683
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Alveringh, D, Brookhuis, RA, Wiegerink, RJ & Krijnen, GJM 2014, A Large Range Multi-Axis Capacitive Force/Torque Sensor Realized in a Single SOI Wafer. in 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014. The Printing House, Inc., San Francisco, pp. 680-683, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, United States, 26/01/14. https://doi.org/10.1109/MEMSYS.2014.6765732

A Large Range Multi-Axis Capacitive Force/Torque Sensor Realized in a Single SOI Wafer. / Alveringh, Dennis; Brookhuis, Robert Anton; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M.

27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014. San Francisco : The Printing House, Inc., 2014. p. 680-683.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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AB - A silicon capacitive force/torque sensor is designed and realized to be used for biomechanical applications and robotics. The sensor is able to measure the forces in three directions and two torques using four parallel capacitor plates and four comb-structures. Novel spring and lever structures are designed to separate the different force components and minimize mechanical crosstalk. The fabrication process is based on deep reactive ion etching on both sides of a single silicon-on-insulator wafer and uses only two masks making it a straight-forward and robust process. The sensor has a force range of 2 N in shear and normal direction and a torque range of more than 6 Nmm. It has a high sensitivity of 38 fF/N and 550 fF/N in shear and normal direction respectively.

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Alveringh D, Brookhuis RA, Wiegerink RJ, Krijnen GJM. A Large Range Multi-Axis Capacitive Force/Torque Sensor Realized in a Single SOI Wafer. In 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014. San Francisco: The Printing House, Inc. 2014. p. 680-683 https://doi.org/10.1109/MEMSYS.2014.6765732