A light absorption cell for microTAS with KOH/IPA etched 45 degrees mirrors in silicon

Roald M. Tiggelaar, T.T. Veenstra, Remco G.P. Sanders, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, Albert van den Berg

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of Sensor Technology 2001 Conference
EditorsM. Elwenspoek
Place of PublicationDordrecht
PublisherKluwer
Pages137-142
ISBN (Print)0-7923-7012-0
Publication statusPublished - 14 May 2001
EventSensor Technology Conference 2001 - Enschede, Netherlands
Duration: 14 May 200115 May 2001

Publication series

NameMESA monographs

Conference

ConferenceSensor Technology Conference 2001
CountryNetherlands
CityEnschede
Period14/05/0115/05/01

Keywords

  • METIS-200190
  • IR-42013

Cite this

Tiggelaar, R. M., Veenstra, T. T., Sanders, R. G. P., Gardeniers, J. G. E., Elwenspoek, M. C., & van den Berg, A. (2001). A light absorption cell for microTAS with KOH/IPA etched 45 degrees mirrors in silicon. In M. Elwenspoek (Ed.), Proceedings of Sensor Technology 2001 Conference (pp. 137-142). (MESA monographs). Dordrecht: Kluwer.