A light absorption cell for microTAS with KOH/IPA etched 45 degrees mirrors in silicon

Roald M. Tiggelaar; T.T. Veenstra; Remco G.P. Sanders; Johannes G.E. Gardeniers; Michael Curt Elwenspoek; Albert van den Berg

A light absorption cell for microTAS with KOH/IPA etched 45 degrees mirrors in silicon

Roald M. Tiggelaar, T.T. Veenstra, Remco G.P. Sanders, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, Albert van den Berg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of Sensor Technology 2001 Conference
Editors	M. Elwenspoek
Place of Publication	Dordrecht
Publisher	Kluwer
Pages	137-142
ISBN (Print)	0-7923-7012-0
Publication status	Published - 14 May 2001
Event	Sensor Technology Conference 2001 - Enschede, Netherlands Duration: 14 May 2001 → 15 May 2001

Publication series

Name	MESA monographs

Conference

Conference	Sensor Technology Conference 2001
Country/Territory	Netherlands
City	Enschede
Period	14/05/01 → 15/05/01

Keywords

METIS-200190
IR-42013

Cite this

@inproceedings{675bc332080d4d97a579a91beb7d797e,

title = "A light absorption cell for microTAS with KOH/IPA etched 45 degrees mirrors in silicon",

keywords = "METIS-200190, IR-42013",

author = "Tiggelaar, {Roald M.} and T.T. Veenstra and Sanders, {Remco G.P.} and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt} and {van den Berg}, Albert",

year = "2001",

month = may,

day = "14",

language = "Undefined",

isbn = "0-7923-7012-0",

series = "MESA monographs",

publisher = "Kluwer",

pages = "137--142",

editor = "M. Elwenspoek",

booktitle = "Proceedings of Sensor Technology 2001 Conference",

address = "Netherlands",

note = "Sensor Technology Conference 2001 ; Conference date: 14-05-2001 Through 15-05-2001",

}

Tiggelaar, RM, Veenstra, TT, Sanders, RGP , Gardeniers, JGE, Elwenspoek, MC & van den Berg, A 2001, A light absorption cell for microTAS with KOH/IPA etched 45 degrees mirrors in silicon. in M Elwenspoek (ed.), Proceedings of Sensor Technology 2001 Conference. MESA monographs, Kluwer, Dordrecht, pp. 137-142, Sensor Technology Conference 2001, Enschede, Netherlands, 14/05/01.

A light absorption cell for microTAS with KOH/IPA etched 45 degrees mirrors in silicon. / Tiggelaar, Roald M.; Veenstra, T.T.; Sanders, Remco G.P. et al.
Proceedings of Sensor Technology 2001 Conference. ed. / M. Elwenspoek. Dordrecht: Kluwer, 2001. p. 137-142 (MESA monographs).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A light absorption cell for microTAS with KOH/IPA etched 45 degrees mirrors in silicon

AU - Tiggelaar, Roald M.

AU - Veenstra, T.T.

AU - Sanders, Remco G.P.

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

AU - van den Berg, Albert

PY - 2001/5/14

Y1 - 2001/5/14

KW - METIS-200190

KW - IR-42013

M3 - Conference contribution

SN - 0-7923-7012-0

T3 - MESA monographs

SP - 137

EP - 142

BT - Proceedings of Sensor Technology 2001 Conference

A2 - Elwenspoek, M.

PB - Kluwer

CY - Dordrecht

T2 - Sensor Technology Conference 2001

Y2 - 14 May 2001 through 15 May 2001

ER -