A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon

Roald M. Tiggelaar, T.T. Veenstra, Remco G.P. Sanders, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, Albert van den Berg

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of MicroMechanics Europe (MME) 2000
Place of PublicationUppsala, Sweden
Pages-
Number of pages4
Publication statusPublished - 1 Oct 2000
Event11th MicroMechanics Europe Workshop, MME 2000 - Uppsala, Sweden
Duration: 1 Oct 20003 Oct 2000
Conference number: 11

Conference

Conference11th MicroMechanics Europe Workshop, MME 2000
Abbreviated titleMME
CountrySweden
CityUppsala
Period1/10/003/10/00

Keywords

  • METIS-113074
  • IR-16189

Cite this

Tiggelaar, R. M., Veenstra, T. T., Sanders, R. G. P., Gardeniers, J. G. E., Elwenspoek, M. C., & van den Berg, A. (2000). A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon. In Proceedings of MicroMechanics Europe (MME) 2000 (pp. -). Uppsala, Sweden.