A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of MicroMechanics Europe (MME) 2000
Place of PublicationUppsala, Sweden
Pages-
Number of pages4
Publication statusPublished - 1 Oct 2000
Event11th MicroMechanics Europe Workshop, MME 2000 - Uppsala, Sweden
Duration: 1 Oct 20003 Oct 2000
Conference number: 11

Conference

Conference11th MicroMechanics Europe Workshop, MME 2000
Abbreviated titleMME
CountrySweden
CityUppsala
Period1/10/003/10/00

Keywords

  • METIS-113074
  • IR-16189

Cite this

Tiggelaar, R. M., Veenstra, T. T., Sanders, R. G. P., Gardeniers, J. G. E., Elwenspoek, M. C., & van den Berg, A. (2000). A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon. In Proceedings of MicroMechanics Europe (MME) 2000 (pp. -). Uppsala, Sweden.
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title = "A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon",
keywords = "METIS-113074, IR-16189",
author = "Tiggelaar, {Roald M.} and T.T. Veenstra and Sanders, {Remco G.P.} and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt} and {van den Berg}, Albert",
year = "2000",
month = "10",
day = "1",
language = "Undefined",
pages = "--",
booktitle = "Proceedings of MicroMechanics Europe (MME) 2000",

}

Tiggelaar, RM, Veenstra, TT, Sanders, RGP, Gardeniers, JGE, Elwenspoek, MC & van den Berg, A 2000, A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon. in Proceedings of MicroMechanics Europe (MME) 2000. Uppsala, Sweden, pp. -, 11th MicroMechanics Europe Workshop, MME 2000, Uppsala, Sweden, 1/10/00.

A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon. / Tiggelaar, Roald M.; Veenstra, T.T.; Sanders, Remco G.P.; Gardeniers, Johannes G.E.; Elwenspoek, Michael Curt; van den Berg, Albert.

Proceedings of MicroMechanics Europe (MME) 2000. Uppsala, Sweden, 2000. p. -.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon

AU - Tiggelaar, Roald M.

AU - Veenstra, T.T.

AU - Sanders, Remco G.P.

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

AU - van den Berg, Albert

PY - 2000/10/1

Y1 - 2000/10/1

KW - METIS-113074

KW - IR-16189

M3 - Conference contribution

SP - -

BT - Proceedings of MicroMechanics Europe (MME) 2000

CY - Uppsala, Sweden

ER -

Tiggelaar RM, Veenstra TT, Sanders RGP, Gardeniers JGE, Elwenspoek MC, van den Berg A. A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon. In Proceedings of MicroMechanics Europe (MME) 2000. Uppsala, Sweden. 2000. p. -