A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon

Roald M. Tiggelaar; T.T. Veenstra; Remco G.P. Sanders; Johannes G.E. Gardeniers; Michael Curt Elwenspoek; Albert van den Berg

A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon

Roald M. Tiggelaar, T.T. Veenstra, Remco G.P. Sanders, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, Albert van den Berg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of MicroMechanics Europe (MME) 2000
Place of Publication	Uppsala, Sweden
Pages	-
Number of pages	4
Publication status	Published - 1 Oct 2000
Event	11th MicroMechanics Europe Workshop, MME 2000 - Uppsala, Sweden Duration: 1 Oct 2000 → 3 Oct 2000 Conference number: 11

Conference

Conference	11th MicroMechanics Europe Workshop, MME 2000
Abbreviated title	MME
Country/Territory	Sweden
City	Uppsala
Period	1/10/00 → 3/10/00

Keywords

METIS-113074
IR-16189

Cite this

@inproceedings{2e29609d1df84fbf80e71d2f8e0baf06,

title = "A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon",

keywords = "METIS-113074, IR-16189",

author = "Tiggelaar, \{Roald M.\} and T.T. Veenstra and Sanders, \{Remco G.P.\} and Gardeniers, \{Johannes G.E.\} and Elwenspoek, \{Michael Curt\} and \{van den Berg\}, Albert",

year = "2000",

month = oct,

day = "1",

language = "Undefined",

pages = "--",

booktitle = "Proceedings of MicroMechanics Europe (MME) 2000",

note = "11th MicroMechanics Europe Workshop, MME 2000 ; Conference date: 01-10-2000 Through 03-10-2000",

}

TY - GEN

T1 - A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon

AU - Tiggelaar, Roald M.

AU - Veenstra, T.T.

AU - Sanders, Remco G.P.

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

AU - van den Berg, Albert

N1 - Conference code: 11

PY - 2000/10/1

Y1 - 2000/10/1

KW - METIS-113074

KW - IR-16189

M3 - Conference contribution

SP - -

BT - Proceedings of MicroMechanics Europe (MME) 2000

CY - Uppsala, Sweden

T2 - 11th MicroMechanics Europe Workshop, MME 2000

Y2 - 1 October 2000 through 3 October 2000

ER -