A linearized input-output representation of flexible multibody systems for control synthesis

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Abstract

In this paper, a linearized input–output representation of flexible multibody systems is proposed in which an arbitrary combination of positions, velocities, accelerations, and forces can be taken as input variables and as output variables. The formulation is based on a nonlinear finite element approach in which a multibody system is modeled as an assembly of rigid body elements interconnected by joint elements such as flexible hinges and beams. The proposed formulation is general in nature and can be applied for prototype modeling and control system analysis of mechatronic systems. Application of the theory is illustrated through a detailed model development of an active vibration isolation system for a metrology frame of a lithography machine.
Original languageEnglish
Pages (from-to)99-122
Number of pages23
JournalMultibody system dynamics
Volume21
Issue number2
DOIs
Publication statusPublished - 2009

Keywords

  • METIS-250729
  • IR-86141

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