A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector

F.H.J. van der Heyden, M.T. Blom, Johannes G.E. Gardeniers, E. Chmela, Michael Curt Elwenspoek, R.P Tijssen, Albert van den Berg

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)

Abstract

A design is presented for a micromachined differential viscometer, that is suitable for integration into a planar hydrodynamic chromatography system (HDC) for polymer analysis. The viscometer consists of four equal flow restrictions and two pressure sensors, connected in a Wheatstone bridge configuration. Since this viscometer requires an ultra-low hydraulic capacitance differential pressure sensor, a pressure sensor is presented of which the internal volume displacement was reduced considerably compared to commercially available sensors. An optical method was used to detect membrane deflections with a magnitude of approximately 0.01 nm. This method lead to a linearity of 1% over the measured pressure range and a resolution of 2 Pa. With this pressure sensor integrated into the viscosity detector, viscosity measurements were performed on the viscosity difference of ethanol and water.
Original languageUndefined
Pages (from-to)102-109
Number of pages8
JournalSensors and actuators. B: Chemical
Volume92
Issue number1-2
DOIs
Publication statusPublished - 1 Jul 2003

Keywords

  • EWI-12294
  • IR-45881
  • TST-FLUID HANDLING
  • METIS-213478

Cite this

van der Heyden, F.H.J. ; Blom, M.T. ; Gardeniers, Johannes G.E. ; Chmela, E. ; Elwenspoek, Michael Curt ; Tijssen, R.P ; van den Berg, Albert. / A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector. In: Sensors and actuators. B: Chemical. 2003 ; Vol. 92, No. 1-2. pp. 102-109.
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abstract = "A design is presented for a micromachined differential viscometer, that is suitable for integration into a planar hydrodynamic chromatography system (HDC) for polymer analysis. The viscometer consists of four equal flow restrictions and two pressure sensors, connected in a Wheatstone bridge configuration. Since this viscometer requires an ultra-low hydraulic capacitance differential pressure sensor, a pressure sensor is presented of which the internal volume displacement was reduced considerably compared to commercially available sensors. An optical method was used to detect membrane deflections with a magnitude of approximately 0.01 nm. This method lead to a linearity of 1{\%} over the measured pressure range and a resolution of 2 Pa. With this pressure sensor integrated into the viscosity detector, viscosity measurements were performed on the viscosity difference of ethanol and water.",
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A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector. / van der Heyden, F.H.J.; Blom, M.T.; Gardeniers, Johannes G.E.; Chmela, E.; Elwenspoek, Michael Curt; Tijssen, R.P; van den Berg, Albert.

In: Sensors and actuators. B: Chemical, Vol. 92, No. 1-2, 01.07.2003, p. 102-109.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector

AU - van der Heyden, F.H.J.

AU - Blom, M.T.

AU - Gardeniers, Johannes G.E.

AU - Chmela, E.

AU - Elwenspoek, Michael Curt

AU - Tijssen, R.P

AU - van den Berg, Albert

PY - 2003/7/1

Y1 - 2003/7/1

N2 - A design is presented for a micromachined differential viscometer, that is suitable for integration into a planar hydrodynamic chromatography system (HDC) for polymer analysis. The viscometer consists of four equal flow restrictions and two pressure sensors, connected in a Wheatstone bridge configuration. Since this viscometer requires an ultra-low hydraulic capacitance differential pressure sensor, a pressure sensor is presented of which the internal volume displacement was reduced considerably compared to commercially available sensors. An optical method was used to detect membrane deflections with a magnitude of approximately 0.01 nm. This method lead to a linearity of 1% over the measured pressure range and a resolution of 2 Pa. With this pressure sensor integrated into the viscosity detector, viscosity measurements were performed on the viscosity difference of ethanol and water.

AB - A design is presented for a micromachined differential viscometer, that is suitable for integration into a planar hydrodynamic chromatography system (HDC) for polymer analysis. The viscometer consists of four equal flow restrictions and two pressure sensors, connected in a Wheatstone bridge configuration. Since this viscometer requires an ultra-low hydraulic capacitance differential pressure sensor, a pressure sensor is presented of which the internal volume displacement was reduced considerably compared to commercially available sensors. An optical method was used to detect membrane deflections with a magnitude of approximately 0.01 nm. This method lead to a linearity of 1% over the measured pressure range and a resolution of 2 Pa. With this pressure sensor integrated into the viscosity detector, viscosity measurements were performed on the viscosity difference of ethanol and water.

KW - EWI-12294

KW - IR-45881

KW - TST-FLUID HANDLING

KW - METIS-213478

U2 - 10.1016/S0925-4005(03)00099-6

DO - 10.1016/S0925-4005(03)00099-6

M3 - Article

VL - 92

SP - 102

EP - 109

JO - Sensors and actuators. B: Chemical

JF - Sensors and actuators. B: Chemical

SN - 0925-4005

IS - 1-2

ER -