A low noise microphone based on the microflown technology

H.E. de Bree, W.F. Druyvesteyn, Johan W. Berenschot, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Original languageUndefined
    Title of host publicationProceedings of Transducers '99
    Place of PublicationSendai, Japan
    Pages-
    Number of pages2
    Publication statusPublished - 6 Jun 1999

    Keywords

    • METIS-112716
    • IR-15834

    Cite this

    de Bree, H. E., Druyvesteyn, W. F., Berenschot, J. W., & Elwenspoek, M. C. (1999). A low noise microphone based on the microflown technology. In Proceedings of Transducers '99 (pp. -). Sendai, Japan.