A low noise microphone based on the microflown technology

H.E. de Bree, W.F. Druyvesteyn, Johan W. Berenschot, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Original languageUndefined
    Title of host publicationProceedings of Transducers '99
    Place of PublicationSendai, Japan
    Pages-
    Number of pages2
    Publication statusPublished - 6 Jun 1999

    Keywords

    • METIS-112716
    • IR-15834

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