A low noise microphone based on the microflown technology

H.E. de Bree, W.F. Druyvesteyn, Johan W. Berenschot, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	Undefined
Title of host publication	Proceedings of Transducers '99
Place of Publication	Sendai, Japan
Pages	-
Number of pages	2
Publication status	Published - 6 Jun 1999
Event	10th IEEE International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 99 - Sendai, Japan Duration: 7 Jun 1999 → 10 Jun 1999

Conference	10th IEEE International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 99
Period	7/06/99 → 10/06/99
Other	7-10 June 1999

Keywords

@inproceedings{d63664b106454326b1743959f0f18a08,

title = "A low noise microphone based on the microflown technology",

keywords = "METIS-112716, IR-15834",

author = "{de Bree}, H.E. and W.F. Druyvesteyn and Berenschot, {Johan W.} and Elwenspoek, {Michael Curt}",

year = "1999",

month = jun,

day = "6",

language = "Undefined",

pages = "--",

booktitle = "Proceedings of Transducers '99",

note = "10th IEEE International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 99 ; Conference date: 07-06-1999 Through 10-06-1999",

}

TY - GEN

T1 - A low noise microphone based on the microflown technology

AU - de Bree, H.E.

AU - Druyvesteyn, W.F.

AU - Berenschot, Johan W.

AU - Elwenspoek, Michael Curt

PY - 1999/6/6

Y1 - 1999/6/6

KW - METIS-112716

KW - IR-15834

M3 - Conference contribution

SP - -

BT - Proceedings of Transducers '99

CY - Sendai, Japan

T2 - 10th IEEE International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 99

Y2 - 7 June 1999 through 10 June 1999

ER -