A novel electrostatic inchworm microactuator, which employs a built-in mechanical transformation and a large number of contraction units to generate large force and sub-micrometer resolution step, is presented. The actuator is fabricated in a single polysilicon device layer using a trench isolation technology. The entire actuator, including the clamps and the contraction element, fits in an area of 440 x 286 μm. Tests on the first prototype show an effective step size of 13 nm and a generated force of 0.55 mN. A driving voltage of 55 V has been used both for clamping and contraction.
|Title of host publication||Proceedings of Eurosensors 2003|
|Subtitle of host publication||17th European Conference on Solid-State Transducers September 21-24, 2003 Guimarães, Portugal|
|Place of Publication||Guimarães, Portugal|
|Number of pages||4|
|Publication status||Published - 1 Sep 2003|
|Event||Eurosensors XVII, European Conference on Solid-State Transducers - Guimaraes, Portugal|
Duration: 21 Sep 2003 → 24 Sep 2003
|Conference||Eurosensors XVII, European Conference on Solid-State Transducers|
|Period||21/09/03 → 24/09/03|
Sarajlic, E., Berenschot, J. W., Krijnen, G. J. M., & Elwenspoek, M. C. (2003). A low volume electrostatic inchworm microactuator with high-resolution and large force. In Proceedings of Eurosensors 2003: 17th European Conference on Solid-State Transducers September 21-24, 2003 Guimarães, Portugal (pp. 323-326). Guimarães, Portugal.