A low volume electrostatic inchworm microactuator with high-resolution and large force

Edin Sarajlic; Johan W. Berenschot; Gijsbertus J.M. Krijnen; Michael Curt Elwenspoek

A low volume electrostatic inchworm microactuator with high-resolution and large force

Edin Sarajlic, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A novel electrostatic inchworm microactuator, which employs a built-in mechanical transformation and a large number of contraction units to generate large force and sub-micrometer resolution step, is presented. The actuator is fabricated in a single polysilicon device layer using a trench isolation technology. The entire actuator, including the clamps and the contraction element, fits in an area of 440 x 286 μm. Tests on the first prototype show an effective step size of 13 nm and a generated force of 0.55 mN. A driving voltage of 55 V has been used both for clamping and contraction.

Original language	English
Title of host publication	Proceedings of Eurosensors 2003
Subtitle of host publication	17th European Conference on Solid-State Transducers September 21-24, 2003 Guimarães, Portugal
Place of Publication	Guimarães, Portugal
Pages	323-326
Number of pages	4
Publication status	Published - 1 Sept 2003
Event	Eurosensors XVII, European Conference on Solid-State Transducers - Guimaraes, Portugal Duration: 21 Sept 2003 → 24 Sept 2003

Conference

Conference	Eurosensors XVII, European Conference on Solid-State Transducers
Country/Territory	Portugal
City	Guimaraes
Period	21/09/03 → 24/09/03

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@inproceedings{88978a34f44846f7b2d6e40e0e021238,

title = "A low volume electrostatic inchworm microactuator with high-resolution and large force",

abstract = "A novel electrostatic inchworm microactuator, which employs a built-in mechanical transformation and a large number of contraction units to generate large force and sub-micrometer resolution step, is presented. The actuator is fabricated in a single polysilicon device layer using a trench isolation technology. The entire actuator, including the clamps and the contraction element, fits in an area of 440 x 286 μm. Tests on the first prototype show an effective step size of 13 nm and a generated force of 0.55 mN. A driving voltage of 55 V has been used both for clamping and contraction.",

author = "Edin Sarajlic and Berenschot, {Johan W.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

year = "2003",

month = sep,

day = "1",

language = "English",

pages = "323--326",

booktitle = "Proceedings of Eurosensors 2003",

note = "Eurosensors XVII, European Conference on Solid-State Transducers ; Conference date: 21-09-2003 Through 24-09-2003",

}

Sarajlic, E, Berenschot, JW , Krijnen, GJM & Elwenspoek, MC 2003, A low volume electrostatic inchworm microactuator with high-resolution and large force. in Proceedings of Eurosensors 2003: 17th European Conference on Solid-State Transducers September 21-24, 2003 Guimarães, Portugal. Guimarães, Portugal, pp. 323-326, Eurosensors XVII, European Conference on Solid-State Transducers, Guimaraes, Portugal, 21/09/03.

A low volume electrostatic inchworm microactuator with high-resolution and large force. / Sarajlic, Edin; Berenschot, Johan W.; Krijnen, Gijsbertus J.M. et al.
Proceedings of Eurosensors 2003: 17th European Conference on Solid-State Transducers September 21-24, 2003 Guimarães, Portugal. Guimarães, Portugal, 2003. p. 323-326.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A low volume electrostatic inchworm microactuator with high-resolution and large force

AU - Sarajlic, Edin

AU - Berenschot, Johan W.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2003/9/1

Y1 - 2003/9/1

N2 - A novel electrostatic inchworm microactuator, which employs a built-in mechanical transformation and a large number of contraction units to generate large force and sub-micrometer resolution step, is presented. The actuator is fabricated in a single polysilicon device layer using a trench isolation technology. The entire actuator, including the clamps and the contraction element, fits in an area of 440 x 286 μm. Tests on the first prototype show an effective step size of 13 nm and a generated force of 0.55 mN. A driving voltage of 55 V has been used both for clamping and contraction.

AB - A novel electrostatic inchworm microactuator, which employs a built-in mechanical transformation and a large number of contraction units to generate large force and sub-micrometer resolution step, is presented. The actuator is fabricated in a single polysilicon device layer using a trench isolation technology. The entire actuator, including the clamps and the contraction element, fits in an area of 440 x 286 μm. Tests on the first prototype show an effective step size of 13 nm and a generated force of 0.55 mN. A driving voltage of 55 V has been used both for clamping and contraction.

M3 - Conference contribution

SP - 323

EP - 326

BT - Proceedings of Eurosensors 2003

CY - Guimarães, Portugal

T2 - Eurosensors XVII, European Conference on Solid-State Transducers

Y2 - 21 September 2003 through 24 September 2003

ER -

A low volume electrostatic inchworm microactuator with high-resolution and large force

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