A low volume electrostatic inchworm microactuator with high-resolution and large force

Edin Sarajlic, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

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    Abstract

    A novel electrostatic inchworm microactuator, which employs a built-in mechanical transformation and a large number of contraction units to generate large force and sub-micrometer resolution step, is presented. The actuator is fabricated in a single polysilicon device layer using a trench isolation technology. The entire actuator, including the clamps and the contraction element, fits in an area of 440 x 286 μm. Tests on the first prototype show an effective step size of 13 nm and a generated force of 0.55 mN. A driving voltage of 55 V has been used both for clamping and contraction.
    Original languageEnglish
    Title of host publicationProceedings of Eurosensors 2003
    Subtitle of host publication17th European Conference on Solid-State Transducers September 21-24, 2003 Guimarães, Portugal
    Place of PublicationGuimarães, Portugal
    Pages323-326
    Number of pages4
    Publication statusPublished - 1 Sep 2003
    EventEurosensors XVII, European Conference on Solid-State Transducers - Guimaraes, Portugal
    Duration: 21 Sep 200324 Sep 2003

    Conference

    ConferenceEurosensors XVII, European Conference on Solid-State Transducers
    CountryPortugal
    CityGuimaraes
    Period21/09/0324/09/03

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  • Cite this

    Sarajlic, E., Berenschot, J. W., Krijnen, G. J. M., & Elwenspoek, M. C. (2003). A low volume electrostatic inchworm microactuator with high-resolution and large force. In Proceedings of Eurosensors 2003: 17th European Conference on Solid-State Transducers September 21-24, 2003 Guimarães, Portugal (pp. 323-326). Guimarães, Portugal.