A Mass-balanced through-wafer electrostatic x/y-scanner for probe data storage

Johannes Bernardus Charles Engelen, H.E. Rothuizen, U. Drechsler, R. Stutz, M. Despont, Leon Abelmann, M.A. Lantz

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    14 Citations (Scopus)
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    In this work we describe the design, fabrication and testing of a mass-balanced planar x/y-scanner designed for parallel-probe storage applications (see Fig. 1a). We explore electrostatic actuation as an alternative to the electromagnetic actuation used in [1]. To increase the shock resistance, mass-balancing is used and the scanner is fabricated by deep reactive ion etching through a complete wafer. To move the scan table in both positive and negative x and y directions, four comb drives are used. The comb-drive fingers are tapered to increase the generated force without decreasing the minimum trench width.
    Original languageUndefined
    Article number10.1016/j.mee.2008.11.032
    Pages (from-to)1230-1233
    Number of pages4
    JournalMicroelectronic engineering
    Issue number4-6
    Publication statusPublished - Apr 2009
    EventNot yet know - Athens, Greece
    Duration: 15 Sept 200818 Sept 2008


    • TST-SMI: Formerly in EWI-SMI
    • Probe Storage
    • IR-67994
    • Electrostatic actuator
    • DRIE
    • METIS-263692
    • MEMS
    • TST-uSPAM: micro Scanning Probe Array Memory
    • Comb drive
    • Finite-element analysis (FEA)
    • EWI-13822

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