In this work we describe the design, fabrication and testing of a mass-balanced planar x/y-scanner designed for parallel-probe storage applications (see Fig. 1a). We explore electrostatic actuation as an alternative to the electromagnetic actuation used in . To increase the shock resistance, mass-balancing is used and the scanner is fabricated by deep reactive ion etching through a complete wafer. To move the scan table in both positive and negative x and y directions, four comb drives are used. The comb-drive fingers are tapered to increase the generated force without decreasing the minimum trench width.
- TST-SMI: Formerly in EWI-SMI
- Probe Storage
- Electrostatic actuator
- TST-uSPAM: micro Scanning Probe Array Memory
- Comb drive
- Finite-element analysis (FEA)
Engelen, J. B. C., Rothuizen, H. E., Drechsler, U., Stutz, R., Despont, M., Abelmann, L., & Lantz, M. A. (2009). A Mass-balanced through-wafer electrostatic x/y-scanner for probe data storage. Microelectronic engineering, 86(4-6), 1230-1233. [10.1016/j.mee.2008.11.032]. https://doi.org/10.1016/j.mee.2008.11.032