A Mass-balanced through-wafer electrostatic x/y-scanner for probe data storage

Johannes Bernardus Charles Engelen; H.E. Rothuizen; U. Drechsler; R. Stutz; M. Despont; Leon Abelmann; M.A. Lantz

doi:10.1016/j.mee.2008.11.032

A Mass-balanced through-wafer electrostatic x/y-scanner for probe data storage

Johannes Bernardus Charles Engelen
, H.E. Rothuizen
, U. Drechsler
, R. Stutz
, M. Despont
, Leon Abelmann
, M.A. Lantz

Research output: Contribution to journal › Article › Academic › peer-review

14 Citations (Scopus)

6 Downloads (Pure)

Abstract

In this work we describe the design, fabrication and testing of a mass-balanced planar x/y-scanner designed for parallel-probe storage applications (see Fig. 1a). We explore electrostatic actuation as an alternative to the electromagnetic actuation used in [1]. To increase the shock resistance, mass-balancing is used and the scanner is fabricated by deep reactive ion etching through a complete wafer. To move the scan table in both positive and negative x and y directions, four comb drives are used. The comb-drive fingers are tapered to increase the generated force without decreasing the minimum trench width.

Original language	Undefined
Article number	10.1016/j.mee.2008.11.032
Pages (from-to)	1230-1233
Number of pages	4
Journal	Microelectronic engineering
Volume	86
Issue number	4-6
DOIs	https://doi.org/10.1016/j.mee.2008.11.032
Publication status	Published - Apr 2009
Event	Not yet know - Athens, Greece Duration: 15 Sept 2008 → 18 Sept 2008

Keywords

TST-SMI: Formerly in EWI-SMI
Probe Storage
IR-67994
Electrostatic actuator
DRIE
METIS-263692
MEMS
TST-uSPAM: micro Scanning Probe Array Memory
Comb drive
Finite-element analysis (FEA)
EWI-13822

Access to Document

10.1016/j.mee.2008.11.032

http://eprints.eemcs.utwente.nl/secure2/13822/01/johan.pdf

Cite this

@article{7e1675695a9643fdb126a1395d6137fa,

title = "A Mass-balanced through-wafer electrostatic x/y-scanner for probe data storage",

abstract = "In this work we describe the design, fabrication and testing of a mass-balanced planar x/y-scanner designed for parallel-probe storage applications (see Fig. 1a). We explore electrostatic actuation as an alternative to the electromagnetic actuation used in [1]. To increase the shock resistance, mass-balancing is used and the scanner is fabricated by deep reactive ion etching through a complete wafer. To move the scan table in both positive and negative x and y directions, four comb drives are used. The comb-drive fingers are tapered to increase the generated force without decreasing the minimum trench width.",

keywords = "TST-SMI: Formerly in EWI-SMI, Probe Storage, IR-67994, Electrostatic actuator, DRIE, METIS-263692, MEMS, TST-uSPAM: micro Scanning Probe Array Memory, Comb drive, Finite-element analysis (FEA), EWI-13822",

author = "Engelen, \{Johannes Bernardus Charles\} and H.E. Rothuizen and U. Drechsler and R. Stutz and M. Despont and Leon Abelmann and M.A. Lantz",

note = "MNE {\textquoteright}08 - The 34th International Conference on Micro- and Nano-Engineering ; Not yet know ; Conference date: 15-09-2008 Through 18-09-2008",

year = "2009",

month = apr,

doi = "10.1016/j.mee.2008.11.032",

language = "Undefined",

volume = "86",

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journal = "Microelectronic engineering",

issn = "0167-9317",

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T1 - A Mass-balanced through-wafer electrostatic x/y-scanner for probe data storage

AU - Engelen, Johannes Bernardus Charles

AU - Rothuizen, H.E.

AU - Drechsler, U.

AU - Stutz, R.

AU - Despont, M.

AU - Abelmann, Leon

AU - Lantz, M.A.

N1 - MNE ’08 - The 34th International Conference on Micro- and Nano-Engineering

PY - 2009/4

Y1 - 2009/4

N2 - In this work we describe the design, fabrication and testing of a mass-balanced planar x/y-scanner designed for parallel-probe storage applications (see Fig. 1a). We explore electrostatic actuation as an alternative to the electromagnetic actuation used in [1]. To increase the shock resistance, mass-balancing is used and the scanner is fabricated by deep reactive ion etching through a complete wafer. To move the scan table in both positive and negative x and y directions, four comb drives are used. The comb-drive fingers are tapered to increase the generated force without decreasing the minimum trench width.

AB - In this work we describe the design, fabrication and testing of a mass-balanced planar x/y-scanner designed for parallel-probe storage applications (see Fig. 1a). We explore electrostatic actuation as an alternative to the electromagnetic actuation used in [1]. To increase the shock resistance, mass-balancing is used and the scanner is fabricated by deep reactive ion etching through a complete wafer. To move the scan table in both positive and negative x and y directions, four comb drives are used. The comb-drive fingers are tapered to increase the generated force without decreasing the minimum trench width.

KW - TST-SMI: Formerly in EWI-SMI

KW - Probe Storage

KW - IR-67994

KW - Electrostatic actuator

KW - DRIE

KW - METIS-263692

KW - MEMS

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - Comb drive

KW - Finite-element analysis (FEA)

KW - EWI-13822

U2 - 10.1016/j.mee.2008.11.032

DO - 10.1016/j.mee.2008.11.032

M3 - Article

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EP - 1233

JO - Microelectronic engineering

JF - Microelectronic engineering

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M1 - 10.1016/j.mee.2008.11.032

T2 - Not yet know

Y2 - 15 September 2008 through 18 September 2008

ER -