A mathematical model for wet-chemical diffusion-controlled mask etching through a circular hole

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Original language	English
Pages (from-to)	75-90
Journal	Journal of engineering mathematics
Volume	45
Issue number	1
DOIs	https://doi.org/10.1023/A:102208001
Publication status	Published - 2003

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@article{725e711e04714d698ecdf85f10e1353b,

title = "A mathematical model for wet-chemical diffusion-controlled mask etching through a circular hole",

author = "H.K. Kuiken",

year = "2003",

doi = "10.1023/A:102208001",

language = "English",

volume = "45",

pages = "75--90",

journal = "Journal of engineering mathematics",

issn = "0022-0833",

publisher = "Springer",

number = "1",

}